公开(公告)号：US10593062B2

公开(公告)日：2020-03-17

申请号：US15386262

申请日：2016-12-21

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuko Otani ,  Kazuo Aoki ,  Yohei Minekawa

IPC: G06T7/80 ,  H04N5/232 ,  H04N5/225 ,  G02B21/12 ,  G03F7/20 ,  G06T7/73 ,  G01N21/95 ,  G01N21/956 ,  G01N23/2251 ,  G02B21/00 ,  G02B21/06 ,  G02B21/36 ,  G06K9/62 ,  G06T7/00 ,  H04N5/235 ,  H04N7/18

Abstract: A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.

公开(公告)号：US10269536B2

公开(公告)日：2019-04-23

申请号：US15554812

申请日：2015-03-25

Applicant: Hitachi High-Technologies Corporation

Inventor： Satoshi Takada ,  Naomasa Suzuki ,  Kazuo Aoki ,  Takehiko Konno ,  Takayuki Hoshino

IPC: H01J37/244 ,  H01J37/14 ,  H01J37/28 ,  G01N23/2252

Abstract: The objective of the present invention is to simultaneously achieve image observations at a high resolution using an electron microscope, and X-ray analysis at a high energy-resolution using a microcalorimeter. An X-ray detector is disposed at a position where the intensity of the magnetic field from an objective lens is weaker than the critical magnetic field of a material used in a thermal insulation shield for a superconducting transition-edge sensor or a microcalorimeter. In addition, an optical system for transmitting X-rays to the detector is inserted between a sample and the detector. Alternatively, a magnetic field shield for shielding the X-ray detector is used.