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    Distance sensor and distance image sensor
    1.
    发明授权
    Distance sensor and distance image sensor 有权

    公开(公告)号：US11215698B2

    公开(公告)日：2022-01-04

    申请号：US16322664

    申请日：2017-05-30

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Mitsuhito Mase ,  Jun Hiramitsu ,  Akihiro Shimada

    IPC: H01L27/00 ,  G01S7/481 ,  H04N5/369 ,  G01S17/89 ,  G01S7/4863 ,  H01L27/146

    Abstract: A range sensor includes a silicon substrate and a transfer electrode. The silicon substrate includes a first principal surface and a second principal surface opposing each other. The silicon substrate is provided with a charge generation region configured to generate a charge in response to incident light and a charge collection region configured to collect charges from the charge generation region, on the first principal surface side. The transfer electrode is disposed between the charge generation region and the charge collection region on the first principal surface. A region of the second principal surface corresponding at least to the charge generation region is formed with a plurality of protrusions. The plurality of protrusions includes a slope inclined with respect to a thickness direction of the silicon substrate. A (111) plane of the silicon substrate is exposed as the slope at the protrusion. A height of the protrusion is 200 nm or more.

    Distance measuring device
    2.
    发明授权
    Distance measuring device 有权

    公开(公告)号：US11054522B2

    公开(公告)日：2021-07-06

    申请号：US15316935

    申请日：2015-05-28

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Mitsuhito Mase ,  Jun Hiramitsu ,  Akihiro Shimada

    IPC: G01S17/10 ,  G01S17/89 ,  H04N5/369 ,  H01L27/146 ,  G01S7/481 ,  G01S7/487 ,  G01S17/42 ,  G01S7/4863 ,  G01S7/4865

    Abstract: In accordance with an irradiation position of pulsed light, a selecting unit outputs a first transfer signal to a first transfer electrodes and outputs a second transfer signal to a second transfer electrodes, to allow signal charges to flow into first and second signal charge-collecting regions of a pixel corresponding to the irradiation position, and outputs a third transfer signal to a third transfer electrodes to allow unnecessary charges to flow into an unnecessary charge-discharging regions of a pixel other than the pixel corresponding to the irradiation position. An arithmetic unit reads out signals corresponding to respective quantities of signal charges collected in the first and second signal charge-collecting regions of the pixel selected by the selecting unit, and calculates a distance to an object based on a ratio between a quantity of signal charges collected in the first signal charge-collecting regions and a quantity of signal charges collected in the second signal charge-collecting regions.

    Ranging method and ranging device
    3.
    发明授权
    Ranging method and ranging device 有权

    公开(公告)号：US10684371B2

    公开(公告)日：2020-06-16

    申请号：US15502031

    申请日：2015-08-04

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Mitsuhito Mase ,  Jun Hiramitsu ,  Akihiro Shimada

    IPC: G01S17/10 ,  G01S17/89 ,  G01C3/06 ,  G01S7/4914 ,  G01S7/4915 ,  H01L27/146 ,  G01S17/36 ,  H01L27/148 ,  H01L31/113 ,  H04N5/374 ,  H04N5/376

    Abstract: A ranging method uses a light source and a range sensor. The range sensor includes a charge-generating area and first and second charge-accumulating areas. Charges generated in the charge-generating area are transferred to the first charge-accumulating area during a first period so as to be accumulated in the first charge-accumulating area and the second charge-accumulating area during a second period so as to be accumulated in the second charge-accumulating area. A distance d to an object OJ is arithmetized based on a quantity of charges accumulated in the first charge-accumulating area and a quantity of charges accumulated in the second charge-accumulating area. When pulse light is emitted from the light source, the pulse light whose light-intensity stable period within the emission period of the pulse light is set in advance to be longer than each of the first and second periods is emitted from the light source.

    Solid state imaging device
    5.
    发明授权
    Solid state imaging device 有权

    公开(公告)号：US11942506B2

    公开(公告)日：2024-03-26

    申请号：US16643110

    申请日：2018-07-19

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Shin-ichiro Takagi ,  Mitsuhito Mase ,  Jun Hiramitsu ,  Yasuhito Yoneta ,  Masaharu Muramatsu

    IPC: H01L27/148 ,  H01L27/146 ,  H04N25/71 ,  H04N25/73

    CPC classification number: H01L27/14843 ,  H01L27/14603 ,  H01L27/14607 ,  H01L27/14812 ,  H04N25/71 ,  H01L27/14831 ,  H04N25/73

    Abstract: The photosensitive region includes a first impurity region and a second impurity region having a higher impurity concentration than that of the first impurity region. The photosensitive region includes one end positioned away from the transfer section in the second direction and another end positioned closer to the transfer section in the second direction. A shape of the second impurity region in plan view is line-symmetric with respect to a center line of the photosensitive region along the second direction. A width of the second impurity region in the first direction increases in a transfer direction from the one end to the other end. An increase rate of the width of the second impurity region in each of sections, obtained by dividing the photosensitive region into n sections in the second direction, becomes gradually higher in the transfer direction. Here, n is an integer of two or more.

    Distance image sensor
    9.
    发明授权
    Distance image sensor 有权

    公开(公告)号：US10224354B2

    公开(公告)日：2019-03-05

    申请号：US15308668

    申请日：2015-01-29

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Mitsuhito Mase ,  Jun Hiramitsu ,  Akihiro Shimada

    IPC: H01L27/146 ,  G01S17/89 ,  G01S7/486 ,  G01C3/08 ,  G01S7/491 ,  G01S17/36

    Abstract: In any three of three range sensors consecutively aligned in a one-dimensional direction, first signal charge-accumulating regions are adjacent to each other in the one-dimensional direction in the range sensor positioned in a center of the three range sensors and the range sensor positioned closer to one side of the one-dimensional direction than the range sensor positioned in the center of the three range sensors, and the first signal charge-accumulating region and the second signal charge-accumulating region are adjacent to each other in the one-dimensional direction in the range sensor positioned in the center of the three range sensors and the range sensor positioned closer to an another side of the one-dimensional direction than the range sensor positioned in the center of the three range sensors.

    COMPOSITE SENSOR AND COMPOSITE SENSOR MODULE
    10.
    发明申请
    COMPOSITE SENSOR AND COMPOSITE SENSOR MODULE 有权
    复合传感器和复合传感器模块

    公开(公告)号：US20150211935A1

    公开(公告)日：2015-07-30

    申请号：US14415868

    申请日：2013-04-16

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Fumikazu Ojima ,  Mitsuhito Mase ,  Naoto Sakurai

    IPC: G01J5/12 ,  G01J1/04 ,  G01C3/02

    CPC classification number: G01J5/12 ,  G01C3/02 ,  G01J1/0407 ,  G01J3/36 ,  G01J5/0275 ,  G01J5/045 ,  G01J5/0859 ,  G01J2005/123 ,  G01S7/4816 ,  G01S17/023 ,  H01L27/14649 ,  H01L2224/48091 ,  H04N5/33 ,  H04N5/374 ,  H01L2924/00014

    Abstract: In a composite sensor, an arrangement region of thermal image sensors and an arrangement region of range image sensors are arranged so as to overlap each other as seen in the mounting direction. This makes it possible to acquire thermal and range images coaxially, thereby suppressing image misalignment between the thermal and range images. In the composite sensor, a seal body formed by mounting the first and second substrates on top of each other seals a space about the thermal image sensors in a vacuum state. This can prevent the heat occurring about the range image sensors from affecting the thermal image sensor side. In addition, the substrate arranged with the thermal image sensors and the substrate arranged with the range image sensors are separate from each other, which can secure a degree of freedom in designing.

    Abstract translation: 在复合传感器中，沿着安装方向看，热图像传感器的排列区域和范围图像传感器的布置区域被布置成彼此重叠。 这使得可以同轴地获取热和范围图像，从而抑制热和距离图像之间的图像未对准。 在复合传感器中，通过将第一和第二基板彼此顶部安装形成的密封体在真空状态下封闭围绕热像传感器的空间。 这可以防止范围图像传感器发生的热量影响热图像传感器侧。 此外，布置有热图像传感器的基板和布置有范围图像传感器的基板彼此分离，这可以确保设计的自由度。

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