-
公开(公告)号:US20150213997A1
公开(公告)日:2015-07-30
申请号:US14684607
申请日:2015-04-13
Applicant: Carl Zeiss Microscopy, LLC
Inventor: Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
IPC: H01J37/08 , H01J37/304 , H01J37/305 , H01J37/256 , H01J37/317
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/256 , H01J37/28 , H01J37/304 , H01J37/3053 , H01J37/3056 , H01J2237/08 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/31701 , H01J2237/3174 , H01J2237/3175 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
-
公开(公告)号:US09029765B2
公开(公告)日:2015-05-12
申请号:US13892772
申请日:2013-05-13
Applicant: Carl Zeiss Microscopy, LLC
Inventor: Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall G. Percival , Billy W. Ward
IPC: H01J37/304 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/305
CPC classification number: H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
Abstract translation: 公开了离子源,系统和方法。 在一些实施例中,离子源,系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。 这可以提高性能(例如,增加可靠性,稳定性等)。 在某些实施方案中,离子源,系统和方法可以增强制备具有期望物理属性的尖端的能力(例如尖端顶点上的原子数)。 这可以提高性能(例如,增加可靠性,稳定性等)。
-
公开(公告)号:US09236225B2
公开(公告)日:2016-01-12
申请号:US14684607
申请日:2015-04-13
Applicant: Carl Zeiss Microscopy, LLC
Inventor: Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
IPC: H01J37/317 , H01J37/256 , H01J37/28 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/305 , H01J37/304
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/256 , H01J37/28 , H01J37/304 , H01J37/3053 , H01J37/3056 , H01J2237/08 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/31701 , H01J2237/3174 , H01J2237/3175 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
-
公开(公告)号:US20130256532A1
公开(公告)日:2013-10-03
申请号:US13892772
申请日:2013-05-13
Applicant: Carl Zeiss Microscopy, LLC
Inventor: Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall G. Percival , Billy W. Ward
IPC: H01J37/304
CPC classification number: H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
Abstract translation: 公开了离子源,系统和方法。 在一些实施例中,离子源,系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。 这可以提高性能(例如,增加可靠性,稳定性等)。 在某些实施方案中,离子源,系统和方法可以增强制备具有期望物理属性的尖端的能力(例如尖端顶点上的原子数)。 这可以提高性能(例如,增加可靠性,稳定性等)。
-
公开(公告)号:US09012867B2
公开(公告)日:2015-04-21
申请号:US14286453
申请日:2014-05-23
Applicant: Carl Zeiss Microscopy, LLC
Inventor: Billy W. Ward , John A. Notte, IV , Louis S. Farkas , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
IPC: H01J27/26 , H01J27/02 , H01J49/10 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/305 , H01J37/317 , B82Y10/00 , B82Y40/00
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/256 , H01J37/28 , H01J37/304 , H01J37/3053 , H01J37/3056 , H01J2237/08 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/31701 , H01J2237/3174 , H01J2237/3175 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
-
公开(公告)号:US20140306121A1
公开(公告)日:2014-10-16
申请号:US14286453
申请日:2014-05-23
Applicant: Carl Zeiss Microscopy, LLC
Inventor: Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/256 , H01J37/28 , H01J37/304 , H01J37/3053 , H01J37/3056 , H01J2237/08 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/31701 , H01J2237/3174 , H01J2237/3175 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
Abstract translation: 公开了离子源,系统和方法。
-
-
-
-
-