Invention Grant
- Patent Title: Ion sources, systems and methods
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Application No.: US14684607Application Date: 2015-04-13
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Publication No.: US09236225B2Publication Date: 2016-01-12
- Inventor: Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
- Applicant: Carl Zeiss Microscopy, LLC
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/256 ; H01J37/28 ; B82Y10/00 ; B82Y40/00 ; H01J27/26 ; H01J37/08 ; H01J37/20 ; H01J37/252 ; H01J37/305 ; H01J37/304
Abstract:
Ion sources, systems and methods are disclosed.
Public/Granted literature
- US20150213997A1 ION SOURCES, SYSTEMS AND METHODS Public/Granted day:2015-07-30
Information query
