Abstract:
An array substrate, a manufacturing method thereof, a display device, a thin-film transistor (TFT) and a manufacturing method thereof are disclosed. The method for manufacturing the TFT comprises: forming a pattern of an active layer and a gate insulating layer provided with a metal film on a base substrate patterning the metal film by one patterning process, and forming patterns of a gate electrode a source electrode, a drain electrode a gate line and a data line; forming a passivation layer on the base substrate; patterning the passivation layer by one patterning process, and forming a source contact hole, a drain contact hole and a bridge structure contact hole; and forming a transparent conductive film on the base substrate, and removing partial transparent conductive film to form a source contact portion, a drain contact portion, a pixel electrode and a bridge structure.
Abstract:
A pixel circuit, display panel and display apparatus are provided. The pixel circuit comprises a driving sub-circuit, whose first terminal is connected with first reference voltage source via power supply lead, and second terminal is connected with first terminal of a light emitting device; a charging sub-circuit, whose output terminal is connected with third terminal of the driving sub-circuit, which is configured to charge the driving sub-circuit before the driving sub-circuit drives the light emitting device to emit light; and a compensation sub-circuit, whose first terminal is connected with second terminal of the light emitting device, second terminal is connected with second reference voltage source, which is configured to compensate for voltage drop on the power supply lead of voltage which is provided to the driving sub-circuit from the first reference voltage source, so as to raise the uniformity of display brightness within display area of the panel.
Abstract:
A method for manufacturing an array substrate, a film-etching monitoring and a film-etching monitoring device. The monitoring method comprises: monitoring and recording the transmittance reference value of a film after a film pattern is formed; and monitoring the transmittance present value of the film in real time in the process of etching an overcoating layer to form a through hole after the overcoating layer is formed on the film pattern, and monitoring the etching degree of the film by determining the variation between the transmittance present value and the transmittance reference value. The device comprises a plurality of light sources (3) and a plurality of light-sensitive probes (4) disposed in the chamber. The light sources (3) are configured to irradiate the film on a substrate; and the light-sensitive probes (4) are configured to sense the transmittance of the film.
Abstract:
Embodiments of the present invention provide an array substrate, a manufacturing method thereof and a display device. The method for manufacturing the array substrate comprises: forming a pattern of an active layer of a switching thin-film transistor (TFT) and a pattern of a corresponding pixel electrode on a base substrate, in which the active layer of the switching TFT and the pixel electrode are on the same layer.
Abstract:
An array substrate and manufacturing method thereof and a display device are provided. The array substrate comprises a substrate (10) and a plurality of complementary thin film transistors provided on the substrate (10). The plurality of complementary thin film transistors comprise a first N-type thin film transistor (11) and a second P-type thin film transistor (12), and the first thin film transistor (11) is an oxide thin film transistor and the second thin film transistor (12) is a poly-silicon thin film transistor. The method of manufacturing the array substrate simplifies the manufacturing process and reduces production difficulty and cost.
Abstract:
An array substrate, a manufacturing method thereof, a display device, a thin-film transistor (TFT) and a manufacturing method thereof are disclosed. The method for manufacturing the TFT comprises: forming a pattern of an active layer and a gate insulating layer provided with a metal film on a base substrate; patterning the metal film by one patterning process, and forming patterns of a gate electrode, a source electrode, a drain electrode, a gate line and a data line; forming a passivation layer on the base substrate; patterning the passivation layer by one patterning process, and forming a source contact hole, a drain contact hole and a bridge structure contact hole; and forming a transparent conductive film on the base substrate, and removing partial transparent conductive film to form a source contact portion, a drain contact portion (214), a pixel electrode and a bridge structure. The manufacturing method can reduce the number of the patterning processes.
Abstract:
Provided are a CMOS circuit structure, a preparation method thereof and a display device, wherein a PMOS region in the CMOS circuit structure is of a LTPS TFT structure, that is, the PMOS semiconductor layer is prepared from a P type doped polysilicon material; an NMOS region is of an Oxide TFT structure, that is, the NMOS semiconductor layer is made of an oxide material; three doping processes applied to the NMOS region during the LTPS process may be omitted in the case in which the NMOS semiconductor layer in the NMOS region is made of an oxide material instead of the polysilicon material, which may simplify the preparation of the CMOS circuit structure as well as reduce a production cost. Furthermore, it is only required to crystallizing the PMOS semiconductor layer, which may also extend the lifespan of laser tube, contributing to reduction of the production cost.
Abstract:
An array substrate, a manufacturing method thereof, a display device, a thin-film transistor (TFT) and a manufacturing method thereof are disclosed. The method for manufacturing the TFT comprises: forming a pattern of an active layer and a gate insulating layer provided with a metal film on a base substrate; patterning the metal film by one patterning process, and forming patterns of a gate electrode, a source electrode, a drain electrode, a gate line and a data line; forming a passivation layer on the base substrate; patterning the passivation layer by one patterning process, and forming a source contact hole, a drain contact hole and a bridge structure contact hole; and forming a transparent conductive film on the base substrate, and removing partial transparent conductive film to form a source contact portion, a drain contact portion (214), a pixel electrode and a bridge structure. The manufacturing method can reduce the number of the patterning processes.
Abstract:
An array substrate and manufacturing method thereof, a display device, a thin film transistor and manufacturing method thereof are provided. The manufacturing method of an array substrate includes forming an active material layer (501), a gate insulating layer (204) and a metal thin film (502) on a base substrate (201), and forming a pattern including an active layer (203) and a pattern including a gate electrode (205), a source electrode (206), a drain electrode (207), a gate line (1063) and a data line (1061) by a first patterning process; forming a passivation layer (301) on the base substrate (201), and forming a source contact hole (302), a drain contact hole (303), and an bridge-structure contact hole (1062a) by a second patterning process; forming a transparent conductive thin film (1401) on the base substrate (201), and removing the transparent conductive thin film (1404) partially, so that a source contact section (401), a drain contact section (402), a pixel electrode (403), and an bridge structure (1062) are formed. With the manufacturing method, the use number of patterning processes is decreased.
Abstract:
Embodiments of the present invention relate to display technology field and provide a thin film transistor (1) and manufacturing method thereof, an array substrate, and a display device, and do not damage an active layer (12) of the thin film transistor while forming vias (16) over the source region (120) and the drain region (121) with via etching process. The thin film transistor (1) comprises a substrate (10), an active layer (12), a gate insulating layer (13), a gate (14) and an inter-layer insulating layer (17) disposed on the substrate (10), and further comprises: a conductive etching barrier layer (15) disposed on the active layer; the conductive etching barrier layer (15) being located to correspond to the source region (120) and the drain region (121) of the active layer (12) and vias (16) being formed over the source region (120) and the drain region (121) of the active layer (12) and not extending beyond edges of the conductive etching barrier layer (15).