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1.发明申请公开(公告)号：US20220356598A1
公开(公告)日：2022-11-10
申请号：US17627717
申请日：2021-06-23
发明人： Wenwu YANG , Bokcheol SIM
摘要： An assembly sleeve of a single crystal pulling apparatus, and the single crystal pulling apparatus are provided. The assembly sleeve includes inner and outer cylinders and a bottom cylinder. The outer cylinder is provided with openings at both ends and sleeved onto the inner cylinder. The bottom cylinder is arranged at the opening at a lower end of the outer cylinder, and includes an annular plate and a lower cylinder. Each of the inner lower cylinders is of an inverted-cone shape, an upper end of the inner cylinder is connected to an upper end of the outer cylinder, an outer edge of the annular plate is hermetically connected to the lower end of the outer cylinder, an inner edge of the annular plate is connected to an upper end of the lower cylinder, and a lower end of the inner cylinder is fixedly connected to an upper surface of the annular plate.
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公开(公告)号：US11629985B2
公开(公告)日：2023-04-18
申请号：US16912885
申请日：2020-06-26
发明人： Hao Pan , Hyunguk Jeon
摘要： The present disclosure provides a method for regulating an inert gas flow in a crystal pulling furnace, a method for preparing monocrystalline silicon, and monocrystalline silicon. The method for regulating an inert gas flow includes introducing the inert gas into a main furnace chamber of the crystal pulling furnace from an auxiliary furnace chamber of the crystal pulling furnace, and regulating a flow direction of the inert gas flow introduced into the auxiliary furnace chamber of the crystal pulling furnace.
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3.发明申请公开(公告)号：US20230013467A1
公开(公告)日：2023-01-19
申请号：US17786794
申请日：2021-07-23
发明人： Wenwu YANG , Bokcheol SIM
IPC分类号： C30B15/14
摘要： A cylinder assembly of a single crystal pulling apparatus and a single crystal pulling apparatus are provided in the present disclosure. The cylinder assembly includes an inner cylinder, an outer cylinder, an annular plate and a sleeve. The inner cylinder has a shape of inverted conical. An upper end of the inner cylinder is connected to an upper end of the outer cylinder. A lower end of the outer cylinder is hermetically connected to an outer edge of the annular plate. A lower end of the inner cylinder is fixedly connected to an upper surface of the annular plate. The sleeve passes through and is fixed in an annular opening of the annular plate.
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4.发明授权公开(公告)号：US11932961B2
公开(公告)日：2024-03-19
申请号：US17627717
申请日：2021-06-23
发明人： Wenwu Yang , Bokcheol Sim
摘要： An assembly sleeve of a single crystal pulling apparatus, and the single crystal pulling apparatus are provided. The assembly sleeve includes inner and outer cylinders and a bottom cylinder. The outer cylinder is provided with openings at both ends and sleeved onto the inner cylinder. The bottom cylinder is arranged at the opening at a lower end of the outer cylinder, and includes an annular plate and a lower cylinder. Each of the inner lower cylinders is of an inverted-cone shape, an upper end of the inner cylinder is connected to an upper end of the outer cylinder, an outer edge of the annular plate is hermetically connected to the lower end of the outer cylinder, an inner edge of the annular plate is connected to an upper end of the lower cylinder, and a lower end of the inner cylinder is fixedly connected to an upper surface of the annular plate.
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公开(公告)号：US12116693B2
公开(公告)日：2024-10-15
申请号：US17786794
申请日：2021-07-23
发明人： Wenwu Yang , Bokcheol Sim
摘要： A cylinder assembly of a single crystal pulling apparatus and a single crystal pulling apparatus are provided in the present disclosure. The cylinder assembly includes an inner cylinder, an outer cylinder, an annular plate and a sleeve. The inner cylinder has a shape of inverted conical. An upper end of the inner cylinder is connected to an upper end of the outer cylinder. A lower end of the outer cylinder is hermetically connected to an outer edge of the annular plate. A lower end of the inner cylinder is fixedly connected to an upper surface of the annular plate. The sleeve passes through and is fixed in an annular opening of the annular plate.
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6.发明授权公开(公告)号：US11839945B2
公开(公告)日：2023-12-12
申请号：US16918041
申请日：2020-07-01
发明人： Yuxuan Guo , Sungwoo Cho
IPC分类号： B24B37/24 , B24D11/00 , B29C33/42 , B29C33/52 , B29C41/02 , B29K83/00 , B29K105/00 , B29L31/00 , B29C33/38
CPC分类号： B24B37/24 , B24D11/003 , B29C33/3842 , B29C33/42 , B29C33/52 , B29C41/02 , B29C2033/525 , B29K2083/005 , B29K2105/0005 , B29K2105/251 , B29L2031/736
摘要： A method for preparing a polishing pad includes: preparing a polishing pad transition structure formed with a plurality of grooves, openings of the plurality of grooves being all located on a same side surface of the polishing pad transition structure; filling the plurality of grooves of the polishing pad transition structure with inorganic nanoparticles; pouring a mixture of a liquid polymer and a curing agent on the polishing pad transition structure, and evacuating air in the liquid polymer and the plurality of grooves; and placing the polishing pad transition structure in an environment at a temperature higher than or equal to a first temperature threshold, and the cured liquid polymer and the polishing pad transition structure constituting the polishing pad.
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7.发明公开公开(公告)号：US20230349066A1
公开(公告)日：2023-11-02
申请号：US17914720
申请日：2021-09-24
发明人： Wenwu YANG , Bokcheol SIM
摘要： The present disclosure discloses a heater in a Hot-Zone of a single crystal pulling apparatus and a single crystal pulling apparatus. The heater in the Hot-Zone of the single crystal pulling apparatus includes a side-main heater and an auxiliary heater. Each of the side-main heater and the auxiliary heater is a cylindrical structure with openings at two ends thereof. Each of the side-main heater and the auxiliary heater includes a top open end and a bottom open end. The auxiliary heater is sleeved around the side-main heater, and the top open end of the auxiliary heater extends out of the top open end of the side-main heater.
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公开(公告)号：US20220307156A1
公开(公告)日：2022-09-29
申请号：US17603928
申请日：2021-05-11
发明人： Qinhu MAO , Bokcheol SIM , Jinkun KIM
IPC分类号： C30B15/14
摘要： The present disclosure provides a single crystal pulling apparatus Hot-Zone structure, a single crystal pulling apparatus and a crystal ingot. The single crystal pulling apparatus Hot-Zone structure is applied to a single crystal pulling apparatus. The single crystal pulling apparatus includes a puller body and a crucible provided in the center of the puller body. The single crystal pulling apparatus Hot-Zone structure includes: a side heater provided in a periphery of the crucible, and a diversion assembly provided between the side heater and the crucible, and configured to form a gas flow passage with an outer wall of the crucible, to discharge a gas to the outside of the puller body.
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