- 专利标题: Polishing pad, method for preparing the same, and chemical and mechanical polishing equipment
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申请号: US16918041申请日: 2020-07-01
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公开(公告)号: US11839945B2公开(公告)日: 2023-12-12
- 发明人: Yuxuan Guo , Sungwoo Cho
- 申请人: XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD. , XI'AN ESWIN SILICON WAFER TECHNOLOGY CO., LTD.
- 申请人地址: CN Xi'an
- 专利权人: XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD.,XI'AN ESWIN SILICON WAFER TECHNOLOGY CO., LTD.
- 当前专利权人: XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD.,XI'AN ESWIN SILICON WAFER TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Xi'an; CN Xi'an
- 代理机构: Maginot, Moore & Beck LLP
- 优先权: CN 1911006629.6 2019.10.22
- 主分类号: B24B37/24
- IPC分类号: B24B37/24 ; B24D11/00 ; B29C33/42 ; B29C33/52 ; B29C41/02 ; B29K83/00 ; B29K105/00 ; B29L31/00 ; B29C33/38
摘要:
A method for preparing a polishing pad includes: preparing a polishing pad transition structure formed with a plurality of grooves, openings of the plurality of grooves being all located on a same side surface of the polishing pad transition structure; filling the plurality of grooves of the polishing pad transition structure with inorganic nanoparticles; pouring a mixture of a liquid polymer and a curing agent on the polishing pad transition structure, and evacuating air in the liquid polymer and the plurality of grooves; and placing the polishing pad transition structure in an environment at a temperature higher than or equal to a first temperature threshold, and the cured liquid polymer and the polishing pad transition structure constituting the polishing pad.
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