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公开(公告)号：US08648431B2
公开(公告)日：2014-02-11
申请号：US13220116
申请日：2011-08-29
申请人： Kazuhide Abe , Tadahiro Sasaki , Atsuko Iida , Kazuhiko Itaya , Takashi Kawakubo
发明人： Kazuhide Abe , Tadahiro Sasaki , Atsuko Iida , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H01L29/84
CPC分类号： H03J3/20 , H03B5/326 , H03H9/02566
摘要： According to one embodiment, an acoustic semiconductor device includes an element unit, and a first terminal. The element unit includes an acoustic resonance unit. The acoustic resonance unit includes a semiconductor crystal. An acoustic standing wave is excitable in the acoustic resonance unit and is configured to be synchronously coupled with electric charge density within at least one portion of the semiconductor crystal via deformation-potential coupling effect. The first terminal is electrically connected to the element unit. At least one selected from outputting and inputting an electrical signal is implementable via the first terminal. The electrical signal is coupled with the electric charge density. The outputting the electrical signal is from the acoustic resonance unit, and the inputting the electrical signal is into the acoustic resonance unit.
摘要翻译： 根据一个实施例，声学半导体器件包括元件单元和第一端子。 元件单元包括声共振单元。 声共振单元包括半导体晶体。 声驻波在声共振单元中是可兴奋的，并且被配置为通过变形电势耦合效应与半导体晶体的至少一部分内的电荷密度同步耦合。 第一端子电连接到元件单元。 从输出和输入电信号中选出的至少一个可经由第一终端实现。 电信号与电荷密度耦合。 输出电信号来自声共振单元，并且输入电信号进入声共振单元。
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公开(公告)号：US20120206018A1
公开(公告)日：2012-08-16
申请号：US13422023
申请日：2012-03-16
IPC分类号： H01L41/053 , H01L41/18
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译： 根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。
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公开(公告)号：US07847252B2
公开(公告)日：2010-12-07
申请号：US12207744
申请日：2008-09-10
申请人： Takashi Kawakubo , Michihiko Nishigaki , Toshihiko Nagano , Yoshinori Iida , Ikuo Fujiwara , Hiroto Honda
发明人： Takashi Kawakubo , Michihiko Nishigaki , Toshihiko Nagano , Yoshinori Iida , Ikuo Fujiwara , Hiroto Honda
IPC分类号： H01L27/14
摘要： An infrared-detecting element includes: a substrate; a laminated body; an anchor coupling a part of the laminated body with the substrate and supporting the laminated body with a gap above the substrate; and an amplifier provided on the substrate and connected to at least one of the lower electrode and the upper electrode. The laminated body has a lower electrode, an upper electrode, and a piezoelectric film made of aluminum nitride which is provided between the lower electrode and the upper electrode and in which a c-axis is oriented almost perpendicularly to a film plane. The amplifier has a circuit performing conversion into voltage according to a charge generated in the laminated body.
摘要翻译： 红外线检测元件包括：基板; 层压体; 将所述层叠体的一部分与所述基板连接的支撑体，并且在所述基板的上方具有间隙地支撑所述层叠体; 以及设置在所述基板上并连接到所述下电极和所述上电极中的至少一个的放大器。 层叠体具有下电极，上电极和由氮化铝制成的压电膜，该氮化铝设置在下电极和上电极之间，并且其中c轴几乎垂直于膜平面取向。 放大器具有根据层叠体中产生的电荷而进行电压转换的电路。
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公开(公告)号：US07830068B2
公开(公告)日：2010-11-09
申请号：US12354182
申请日：2009-01-15
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , B81B3/0021 , B81B2201/032 , H01G5/18 , H01H2057/006 , H01L41/094 , H01L41/0973
摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.
摘要翻译： 致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。 第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。 第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。 第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。 第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。
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公开(公告)号：US07816841B2
公开(公告)日：2010-10-19
申请号：US12133027
申请日：2008-06-04
IPC分类号： H01L41/08
CPC分类号： H01G5/16 , H01H2057/006 , H01L41/094 , H01L41/0946
摘要： A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.
摘要翻译： 压电驱动MEMS装置包括：基板; 设置在基板上的支撑部; 设置在基板上的固定电极; 以及致动器，其具有第一电极膜，形成在所述第一电极膜上的压电膜和形成在所述压电膜上的第二电极膜，所述致动器的第一端由所述支撑部支撑，所述致动器的第二端为 被设置为与固定电极相对。 致动器的第二端通过穿过第一电极膜，压电膜和第二电极膜的多个狭缝分成多个电极部分，每个电极部分的至少一部分连接到相邻部分 电极部分，并且每个电极部分能够分别产生弯曲变形。
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公开(公告)号：US20100244628A1
公开(公告)日：2010-09-30
申请号：US12578664
申请日：2009-10-14
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/047 , H01L41/094
摘要： A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
摘要翻译： 压电驱动MEMS元件包括基板，光束，固定部分，固定电极部分和电源。 光束设置有下电极膜，下压电膜，中间电极膜，上压电膜和上电极膜。 固定部分将光束的一端固定到基板上，以便在基板上方具有间隙地保持光束。 固定电极部分在固定电极部分和光束的另一端之间具有电容性间隙。 此外，下电极膜，中间电极膜和上电极膜中的至少一个或两个比其余部分厚。
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公开(公告)号：US07770274B2
公开(公告)日：2010-08-10
申请号：US11946910
申请日：2007-11-29
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H04R17/00
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译： 压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。 压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。
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公开(公告)号：US07732990B2
公开(公告)日：2010-06-08
申请号：US11683755
申请日：2007-03-08
IPC分类号： H01L41/08
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/094
摘要： A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.
摘要翻译： MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作， 第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作 第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。
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公开(公告)号：US07675222B2
公开(公告)日：2010-03-09
申请号：US11781667
申请日：2007-07-23
申请人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
发明人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
IPC分类号： H01L41/08
CPC分类号： H01G7/06 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
摘要翻译： 薄膜压电致动器包括驱动部件，其至少一端由锚固部分支撑。 驱动部包括：压电膜，设置在压电膜的第一区域下方的第一下电极，设置在与压电膜的第一区不同的第二区域下方的第二下电极，与第一下电极相对设置的第一上电极 压电膜上的第一下电极，与压电膜上的第二下电极相对设置的第二上电极，经由形成在压电膜中的第一通孔电连接第一下电极和第二上电极的第一连接部 以及第二连接部，其经由形成在所述压电膜中的第二通路孔电连接所述第二下部电极和所述第一上部电极。
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公开(公告)号：US07498904B2
公开(公告)日：2009-03-03
申请号：US11447999
申请日：2006-06-07
申请人： Ryoichi Ohara , Naoko Yanase , Kenya Sano , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo
发明人： Ryoichi Ohara , Naoko Yanase , Kenya Sano , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H03H9/00
CPC分类号： H03H9/02133 , H03H3/02 , H03H9/02157 , H03H9/13 , H03H9/174 , H03H2003/023
摘要： A piezoelectric thin film resonator includes a substrate in which a cavity is formed, a first electrode having a first electrode edge and partly spanning the cavity on the substrate; a piezoelectric layer placed on the first electrode, a second electrode having a second electrode edge and placed on the piezoelectric layer, a resonator unit constituted by an overlapping part of the first electrode, the piezoelectric layer, the second electrode, and the cavity; and a second lead wiring which is integral with the second electrode, extends to the substrate where the cavity is not present, and has a width larger than a part of a peripheral length of the cavity to which the second electrode edge extends. In the piezoelectric thin film resonator, a first length defined by the periphery of the first electrode of the resonator unit is larger than a second length defined by the second electrode edge of the resonator unit.
摘要翻译： 压电薄膜谐振器包括其中形成腔的衬底，具有第一电极边缘并且部分跨越衬底上的空腔的第一电极; 设置在第一电极上的压电层，具有第二电极边缘并放置在压电层上的第二电极，由第一电极，压电层，第二电极和空腔的重叠部分构成的谐振器单元; 以及与第二电极成一体的第二引线，延伸到不存在空腔的基板，并且具有大于第二电极边缘延伸的空腔的周长的一部分的宽度。 在压电薄膜谐振器中，由谐振器单元的第一电极的周边限定的第一长度大于由谐振器单元的第二电极边缘限定的第二长度。
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