公开(公告)号：US07942182B2

公开(公告)日：2011-05-17

申请号：US11329506

申请日：2006-01-10

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: B32B37/00

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple individual chips having a rigid plate, and a deformable membrane located on the plate, the deformable membrane having a thickness sufficient to allow the deformable membrane to peripherally conform to each of the individual multiple chips irrespective of any difference in height among the multiple individual chips and to prevent each of the multiple individual chips from moving in a lateral direction, the deformable membrane being configured to uniformly transfer a vertical force, applied to the rigid plate, to the chips so as to bring, under pressure, a bonding surface of each individual chip into contact with a bonding surface of an element to which the individual chips will be bonded during a connect and release cycle without causing damage to the individual chips or bonding surface.

Abstract translation: 一种用于具有刚性板的多个单独芯片的装置和位于板上的可变形膜，该可变形膜具有足够的厚度，以允许可变形膜周向地符合每个单独的多个芯片，而与高度的任何差异无关 在多个单个芯片中，并且为了防止多个单独芯片中的每一个沿横向方向移动，可变形膜被构造成均匀地将施加到刚性板的垂直力传递到芯片，以便在压力下， 每个单独芯片的接合表面在连接和释放循环期间与单个芯片将被接合的元件的接合表面接触，而不会损坏单个芯片或接合表面。

公开(公告)号：US20110212573A1

公开(公告)日：2011-09-01

申请号：US13087209

申请日：2011-04-14

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: H01L21/50

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple individual chips having a rigid plate, and a deformable membrane located on the plate, the deformable membrane having a thickness sufficient to allow the deformable membrane to peripherally conform to each of the individual multiple chips irrespective of any difference in height among the multiple individual chips and to prevent each of the multiple individual chips from moving in a lateral direction, the deformable membrane being configured to uniformly transfer a vertical force, applied to the rigid plate, to the chips so as to bring, under pressure, a bonding surface of each individual chip into contact with a bonding surface of an element to which the individual chips will be bonded during a connect and release cycle without causing damage to the individual chips or bonding surface.

Abstract translation: 一种用于具有刚性板的多个单独芯片的装置和位于板上的可变形膜，该可变形膜具有足够的厚度，以允许可变形膜周向地符合每个单独的多个芯片，而与高度的任何差异无关 在多个单个芯片中，并且为了防止多个单独芯片中的每一个沿横向方向移动，可变形膜被构造成均匀地将施加到刚性板的垂直力传递到芯片，以便在压力下， 每个单独芯片的接合表面在连接和释放循环期间与单个芯片将被接合的元件的接合表面接触，而不会损坏单个芯片或接合表面。

公开(公告)号：US07946331B2

公开(公告)日：2011-05-24

申请号：US11329883

申请日：2006-01-10

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: B32B37/00

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple chips having multiple posts as to engage at least a portion of a surface of one of the multiple chips, a frame configured to releasably constrain each of the posts so that, when unconstrained, each individual post can contact an individual chip and, when constrained, will allow a uniform vertical force to be applied to the chips.

Abstract translation: 一种用于具有多个芯片的多个芯片的装置，用于接合所述多个芯片中的一个芯片的表面的至少一部分，框架，其被配置为可释放地约束每个所述柱，使得当不受约束时，每个单独的柱可以接触个体 并且当被约束时将允许将均匀的垂直力施加到芯片。

公开(公告)号：US20070120241A1

公开(公告)日：2007-05-31

申请号：US11329883

申请日：2006-01-10

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: H01L23/02 ,  H01L21/00

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple chips having multiple posts as to engage at least a portion of a surface of one of the multiple chips, a frame configured to releasably constrain each of the posts so that, when unconstrained, each individual post can contact an individual chip and, when constrained, will allow a uniform vertical force to be applied to the chips.

Abstract translation: 一种用于具有多个芯片的多个芯片的装置，用于接合所述多个芯片中的一个芯片的表面的至少一部分，框架，其被配置为可释放地约束每个所述柱，使得当不受约束时，每个单独的柱可以接触个体 并且当被约束时将允许将均匀的垂直力施加到芯片。

公开(公告)号：US08197627B2

公开(公告)日：2012-06-12

申请号：US13087953

申请日：2011-04-15

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: B32B37/00

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple chips having multiple posts as to engage at least a portion of a surface of one of the multiple chips, a frame configured to releasably constrain each of the posts so that, when unconstrained, each individual post can contact an individual chip and, when constrained, will allow a uniform vertical force to be applied to the chips.

Abstract translation: 一种用于具有多个芯片的多个芯片的装置，用于接合所述多个芯片中的一个芯片的表面的至少一部分，框架，其被配置为可释放地约束每个所述柱，使得当不受约束时，每个单独的柱可以接触个体 并且当被约束时将允许将均匀的垂直力施加到芯片。

公开(公告)号：US20110223717A1

公开(公告)日：2011-09-15

申请号：US13087953

申请日：2011-04-15

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: H01L21/50

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple chips having multiple posts as to engage at least a portion of a surface of one of the multiple chips, a frame configured to releasably constrain each of the posts so that, when unconstrained, each individual post can contact an individual chip and, when constrained, will allow a uniform vertical force to be applied to the chips.

Abstract translation: 一种用于具有多个芯片的多个芯片的装置，用于接合所述多个芯片中的一个芯片的表面的至少一部分，框架，其被配置为可释放地约束每个所述柱，使得当不受约束时，每个单独的柱可以接触个体 并且当被约束时将允许将均匀的垂直力施加到芯片。

公开(公告)号：US20060281292A1

公开(公告)日：2006-12-14

申请号：US11329506

申请日：2006-01-10

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: H01L21/30 ,  H01L21/44

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple individual chips having a rigid plate, and a deformable membrane located on the plate, the deformable membrane having a thickness sufficient to allow the deformable membrane to peripherally conform to each of the individual multiple chips irrespective of any difference in height among the multiple individual chips and to prevent each of the multiple individual chips from moving in a lateral direction, the deformable membrane being configured to uniformly transfer a vertical force, applied to the rigid plate, to the chips so as to bring, under pressure, a bonding surface of each individual chip into contact with a bonding surface of an element to which the individual chips will be bonded during a connect and release cycle without causing damage to the individual chips or bonding surface.

Abstract translation: 一种用于具有刚性板的多个单独芯片的装置和位于板上的可变形膜，该可变形膜具有足够的厚度，以允许可变形膜周向地符合每个单独的多个芯片，而与高度的任何差异无关 在多个单个芯片中，并且为了防止多个单独芯片中的每一个沿横向方向移动，可变形膜被构造成均匀地将施加到刚性板的垂直力传递到芯片，以便在压力下， 每个单独芯片的接合表面在连接和释放循环期间与单个芯片将被接合的元件的接合表面接触，而不会损坏单个芯片或接合表面。

公开(公告)号：US08197626B2

公开(公告)日：2012-06-12

申请号：US13087209

申请日：2011-04-14

Applicant: John Trezza ,  Ross Frushour

Inventor： John Trezza ,  Ross Frushour

IPC: B32B37/00

CPC classification number: H01L24/11 ,  H01L21/4853 ,  H01L21/6835 ,  H01L21/76898 ,  H01L23/427 ,  H01L23/48 ,  H01L23/481 ,  H01L23/488 ,  H01L23/49827 ,  H01L23/5389 ,  H01L23/552 ,  H01L23/66 ,  H01L24/02 ,  H01L24/13 ,  H01L24/16 ,  H01L24/24 ,  H01L24/75 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68327 ,  H01L2221/68345 ,  H01L2221/68363 ,  H01L2221/68368 ,  H01L2223/6616 ,  H01L2223/6622 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/114 ,  H01L2224/1147 ,  H01L2224/116 ,  H01L2224/11912 ,  H01L2224/13012 ,  H01L2224/13021 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13084 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13166 ,  H01L2224/13184 ,  H01L2224/1358 ,  H01L2224/136 ,  H01L2224/13609 ,  H01L2224/16146 ,  H01L2224/16237 ,  H01L2224/24226 ,  H01L2224/45111 ,  H01L2224/75 ,  H01L2224/75305 ,  H01L2224/81001 ,  H01L2224/81011 ,  H01L2224/81054 ,  H01L2224/81136 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81204 ,  H01L2224/81825 ,  H01L2224/81894 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2225/06513 ,  H01L2225/06524 ,  H01L2225/06531 ,  H01L2225/06534 ,  H01L2225/06541 ,  H01L2225/06555 ,  H01L2225/06589 ,  H01L2225/06593 ,  H01L2225/06596 ,  H01L2924/00013 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01052 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04953 ,  H01L2924/05042 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/0422 ,  H01S5/0425 ,  H01S5/183 ,  H01S5/18308 ,  H01S2301/176 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An apparatus for use with multiple individual chips having a rigid plate, and a deformable membrane located on the plate, the deformable membrane having a thickness sufficient to allow the deformable membrane to peripherally conform to each of the individual multiple chips irrespective of any difference in height among the multiple individual chips and to prevent each of the multiple individual chips from moving in a lateral direction, the deformable membrane being configured to uniformly transfer a vertical force, applied to the rigid plate, to the chips so as to bring, under pressure, a bonding surface of each individual chip into contact with a bonding surface of an element to which the individual chips will be bonded during a connect and release cycle without causing damage to the individual chips or bonding surface.

Abstract translation: 一种用于具有刚性板的多个单独芯片的装置和位于板上的可变形膜，该可变形膜具有足够的厚度，以允许可变形膜周向地符合每个单独的多个芯片，而与高度的任何差异无关 在多个单个芯片中，并且为了防止多个单独芯片中的每一个沿横向方向移动，可变形膜被构造成均匀地将施加到刚性板的垂直力传递到芯片，以便在压力下， 每个单独芯片的接合表面在连接和释放循环期间与单个芯片将被接合的元件的接合表面接触，而不会损坏单个芯片或接合表面。