Invention Grant
- Patent Title: Rigid-backed, membrane-based chip tooling
- Patent Title (中): 刚性支撑,膜基芯片工具
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Application No.: US13087209Application Date: 2011-04-14
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Publication No.: US08197626B2Publication Date: 2012-06-12
- Inventor: John Trezza , Ross Frushour
- Applicant: John Trezza , Ross Frushour
- Applicant Address: US DE Wilmington
- Assignee: Cufer Asset Ltd. L.L.C.
- Current Assignee: Cufer Asset Ltd. L.L.C.
- Current Assignee Address: US DE Wilmington
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
An apparatus for use with multiple individual chips having a rigid plate, and a deformable membrane located on the plate, the deformable membrane having a thickness sufficient to allow the deformable membrane to peripherally conform to each of the individual multiple chips irrespective of any difference in height among the multiple individual chips and to prevent each of the multiple individual chips from moving in a lateral direction, the deformable membrane being configured to uniformly transfer a vertical force, applied to the rigid plate, to the chips so as to bring, under pressure, a bonding surface of each individual chip into contact with a bonding surface of an element to which the individual chips will be bonded during a connect and release cycle without causing damage to the individual chips or bonding surface.
Public/Granted literature
- US20110212573A1 RIGID-BACKED, MEMBRANE-BASED CHIP TOOLING Public/Granted day:2011-09-01
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