Dual dielectric field effect transistors for protected gate structures
for improved yield and performance in thin film transistor matrix
addressed liquid crystal displays
    1.
    发明授权
    Dual dielectric field effect transistors for protected gate structures for improved yield and performance in thin film transistor matrix addressed liquid crystal displays 失效
    用于保护栅极结构的双电介质场效应晶体管,用于改善薄膜晶体管矩阵寻址液晶显示器的产量和性能

    公开(公告)号:US5148248A

    公开(公告)日:1992-09-15

    申请号:US303091

    申请日:1989-01-26

    IPC分类号: H01L27/12

    CPC分类号: H01L27/12

    摘要: A dual dielectric structure is employed in the fabrication of thin film field effect transistors in a matrix addressed liquid display to provide improved transistor device characteristics and also to provide both electricial and chemical isolation for material employed in the gate metallization layer. In particular, the use of a layer of silicon oxide over the gate metallization layer is not only consistent with providing the desired electrical and chemical isolation, but also with providing redundant gate metallization material to be employed beneath source or data lines for electrical circuit redundancy. Gate line redundancy is also possible. The electrical and chemical isolation provided by the dual dielectric layer reduces the possibilities of short circuits occurring in the display. The absence of short circuits together with the improved redundancy characteristics significantly increase manufacturing yield. As display sizes increase, the yield problem becomes more and more significant, generally growing as the square of the diagonal measurement of the screen. The structure in the present invention also significantly reduces gate leakage current. In the process and structure of the present invention, gate electrode material is separated from semiconductor material by the aforementioned dual dielectric, typically comprising layers of silicon oxide disposed beneath a layer of silicon nitride which is, in turn, disposed beneath the active amorphous silicon semiconductor material.

    摘要翻译: 在矩阵寻址的液体显示器中制造薄膜场效应晶体管时采用双电介质结构以提供改进的晶体管器件特性,并且还为栅极金属化层中使用的材料提供电化学和化学隔离。 特别地,在栅极金属化层上使用一层氧化硅不仅与提供期望的电和化学隔离一致,而且还提供要用于电路冗余的源极或数据线下方的冗余栅极金属化材料。 栅线冗余也是可能的。 由双电介质层提供的电气和化学隔离减少了在显示器中发生短路的可能性。 没有短路以及改进的冗余特性显着提高了制造产量。 随着显示尺寸的增加,产量问题变得越来越重要,通常随屏幕对角线测量的平方而增长。 本发明的结构也显着地降低了栅极漏电流。 在本发明的方法和结构中,栅极电极材料通过上述双电介质与半导体材料分离,所述双电介质通常包括设置在有源非晶硅半导体下方的氮化硅层下方的氧化硅层 材料。

    Electron optics apparatus
    2.
    发明授权
    Electron optics apparatus 失效
    电子光学装置

    公开(公告)号:US4196373A

    公开(公告)日:1980-04-01

    申请号:US894757

    申请日:1978-04-10

    申请人: Harold G. Parks

    发明人: Harold G. Parks

    IPC分类号: H01J29/46 H01J29/56

    CPC分类号: H01J29/46

    摘要: Electron optics apparatus, for use in electron-beam lithography, electron-beam-addressable memory tubes and the like, utilizes a tri-potential collimating condenser lens and a multi-element matrix lens of the "flys eye" type with coarse deflection elements positioned therebetween to deflect the collimated electron beam from the condenser lens to the appropriate aperture in the matrix of lenslets. The condenser lens electrode and matrix lens electrode closest to one another, as well as the coarse deflection electrodes therebetween, are substantially the only elements in the apparatus which float at a relatively high electrical potential, thereby simplifying the requirements of peripheral circuitry while retaining the advantages of the "flys eye" matrix lens.

    摘要翻译: 用于电子束光刻,电子束可寻址存储管等的电子光学装置利用三电位准直聚光透镜和“飞眼”型的多元矩阵透镜,其中定位有粗偏转元件 以将准直电子束从聚光透镜偏转到小透镜矩阵中的适当孔径。 彼此最靠近的聚光透镜电极和矩阵透镜电极以及它们之间的粗偏转电极基本上是在相对较高电势下浮动的设备中的唯一元件,从而简化了外围电路的要求,同时保持了优点 的“飞眼”矩阵镜头。

    Alloy junction archival memory plane and methods for writing data thereon
    6.
    发明授权
    Alloy junction archival memory plane and methods for writing data thereon 失效
    合金结档存档平面及其上写入数据的方法

    公开(公告)号:US4081794A

    公开(公告)日:1978-03-28

    申请号:US673080

    申请日:1976-04-02

    摘要: A memory plane for an archival, non-volatile mass storage memory has a planar semiconductor diode with each of a plurality of small P-N junction diodes alloyed into the surface of its fabricated layer responsive to a selectively-actuated scanned energy beam at each location corresponding to a first binary value in a planar array of data sites. Formation of a P-N junction is prevented at each of the remaining sites of the planar data array to provide storage of data having the remaining binary value.Several alternative methods for formation of the alloy junction surface diodes are disclosed.

    摘要翻译: 用于归档非挥发性大容量存储器的存储器平面具有平面半导体二极管,其中多个小PN结二极管中的每一个合成到其制造的层的表面中,其响应于对应于每个位置处的每个位置处的选择性致动的扫描能量束 数据站点的平面数组中的第一个二进制值。 在平面数据阵列的每个剩余位置处防止形成P-N结以提供具有剩余二进制值的数据的存储。

    Methods of gray scale recording and archival memory target produced
thereby
    8.
    发明授权
    Methods of gray scale recording and archival memory target produced thereby 失效
    由此产生的灰度记录和归档记忆目标的方法

    公开(公告)号:US4130891A

    公开(公告)日:1978-12-19

    申请号:US822429

    申请日:1977-08-08

    摘要: One of a multiplicity of data values is permanently recorded at each data site in a two-dimensional data site array defined upon the surface of a semiconductor diode target by implanting an auxiliary bit thereat having an associated one of a multiplicity of possible dopant concentrations, at a uniform implantation depth, or of different implantation depths, at a uniform doping concentration, into a fabricated layer of the diode, responsive to respectively controlling the fluence or the landing energy of a writing ion beam.

    摘要翻译: 在多个数据值中的一个数据值被永久地记录在二维数据站点阵列中的每个数据站点上,该二维数据站点阵列在半导体二极管靶的表面上通过在其上注入具有多个可能的掺杂剂浓度的相关联的一个辅助位, 均匀的注入深度或不同的注入深度以均匀的掺杂浓度转换成二极管的制造层,响应于分别控制写入离子束的注量或着陆能量。

    Archival memory media and method for information recording thereon
    9.
    发明授权
    Archival memory media and method for information recording thereon 失效
    归档存储介质及其上的信息记录方法

    公开(公告)号:US4128897A

    公开(公告)日:1978-12-05

    申请号:US780175

    申请日:1977-03-22

    摘要: Binary information is stored in a semiconductor archival memory medium by formation of a region of an alloy, of the semiconductor material and a non-doping material, at each of a plurality of potential memory sites at which a first binary value of information is to be stored, with the remaining data sites being devoid of the alloyed region to store the remaining value of binary data. Methods for writing the formation of the alloyed region, and reading the information value stored at each memory site, are also disclosed.

    摘要翻译: 二元信息通过在信息的第一二进制值的多个潜在存储器位置中的每一个处形成半导体材料和非掺杂材料的合金区域来存储在半导体档案存储介质中 存储,剩余的数据站点没有合金区域以存储二进制数据的剩余值。 还公开了写入合金区域的形成以及读取存储在每个存储部位的信息值的方法。

    Magnetic deflection apparatus positioned behind target
    10.
    发明授权
    Magnetic deflection apparatus positioned behind target 失效
    位于目标后方的磁偏转装置

    公开(公告)号:US4122369A

    公开(公告)日:1978-10-24

    申请号:US839331

    申请日:1977-10-04

    摘要: An improved fine deflection, for use in an electron beam optical system, utilizes a magnetic deflector positioned adjacent to the surface of the target most remote from a matrix lens, which is positioned between the target and an electron beam emitter. The matrix lens is a single plate having multiple apertures forming matrix lenslets and has an electron beam accelerator positioned between the lens and the target for uniform acceleration of the electron beam passing through a selected one of the lenslets.

    摘要翻译: 用于电子束光学系统的改进的精细偏转利用位于与远离矩阵透镜的目标表面相邻定位在靶和电子束发射器之间的磁偏转器。 矩阵透镜是具有形成矩阵小透镜的多个孔的单板,并且具有位于透镜和目标之间的电子束加速器,用于均匀加速通过所选择的一个小透镜的电子束。