摘要:
A foldable cart assembly having a user tracking arrangement so as to follow movement of the user during motion over a field. The cart assembly has a plurality of ultrasound and RF sensors in communication with corresponding sensors in a remote handset transmission device carried by the user. The sensors provide timing, direction and distance information to a central processor on the cart for instructing individual electrical motors empowering the respective direction and speed of rotation of the cart's wheels.
摘要:
A serial thermal processing arrangement for treating a wafer of semiconductor material, comprising one or more of the following steps of: loading the wafer into a chamber at an initial station on a rotatable table at atmospheric pressure and purging the chamber with nitrogen gas; rotating the wafer to a first subsequent station, introducing formic acid vapor and nitrogen, heating the wafer at ambient atmospheric pressure; rotating the wafer to a second subsequent station, introducing formic acid vapor and nitrogen, heating the wafer at ambient atmospheric pressure; rotating the wafer to a third subsequent station, introducing a vacuum onto the wafer, heating the wafer in the absence of chemical treatment; rotating the wafer to a fourth subsequent station, introducing formic acid vapor and nitrogen, heating the wafer at ambient atmospheric pressure; rotating the wafer to a fifth subsequent station, introducing nitrogen gas, and cooling the wafer at ambient atmospheric pressure; and rotating the wafer to a last or sixth subsequent station for unloading the wafer from its chamber.
摘要:
A deposition system is described. The deposition system includes a deposition source that generates deposition flux comprising neutral atoms and molecules. A shield defining an aperture is positioned in the path of the deposition flux. The shield passes the deposition flux through the aperture and substantially blocks the deposition flux from propagating past the shield everywhere else. A substrate support is positioned adjacent to the shield. A dual-scanning system scans the substrate support relative to the aperture with a first and a second motion.
摘要:
An electron beam generator particularly adapted for direct-write semiconductor lithography applications is disclosed which includes a photoemissive cathode, a modulable laser for illuminating the photoemissive cathode, and light optics to create an optical pattern on the cathode. The photoemissive cathode is composed of a light transmissive substrate onto which is deposited an optically semitransparent, electrically conductive film. This film in turn is coated with a thin layer of a photoemissive substance such as cesium antimonide so that the photoemissive cathode emits an intense and substantially monochromatic beam of electrons upon laser light illumination. The emitted electron beam is configured in accordance with the optical pattern created on the cathode, and in passing through successive electron optical devices is further shaped and sized for use, for example, in lithographically generating very large scale integrated (VLSI) circuits on semiconductors.
摘要:
A method and a system for at least two autonomous vehicles to safely pass through a road intersection are provided. The method includes providing an information receiving circle in each of the maps circling the road intersection; providing a broadcasting circle circled by the information receiving circle concentrically, circling a road intersection; traveling all autonomous vehicles toward the road intersection and into the information receiving circle; traveling one of the autonomous vehicles into the broadcasting circle for broadcasting traffic information; receiving traffic information of the autonomous vehicle traveling in the broadcasting circle by the other autonomous vehicle; and determining which autonomous vehicle passes through the road intersection first according to the traffic information broadcasted by the autonomous vehicle. When the other autonomous vehicle determines to let the autonomous vehicle pass first, the other autonomous vehicle stops before the intersection until the autonomous vehicle has passed through the road intersection.
摘要:
A lockable hinge arrangement comprising a first hinge plate and a second hinge plate, wherein the first and the second hinge plates being hingedly connected to one another at one elongated first edge thereof to comprise the hinge arrangement. The hinge arrangement further a longitudinally displaceable elongated locking plate slidably attached to a second elongated edge of the second plate, the displacable locking plate arranged to secure and release the first plate and the second plate from one another. A locking plate cam arrangement effects and permits the locking and forced separating release of the first plate and the second plate from rigid securement with one another. The elongated locking plate is acted upon by both a first cam arrangement and a second cam arrangement.
摘要:
A foldable cart assembly having a user tracking arrangement so as to autonomously precede the movement of a user or follow movement instructions of the user during motion over a field. The cart assembly has a plurality of ultrasound and RF sensors in communication with corresponding sensors in a remote handset transmission device carried by the user. The sensors provide timing, direction and distance information to a central processor on the cart for instructing individual electrical motors empowering the respective direction and speed of rotation of the cart's wheels.
摘要:
A foldable cart assembly which is arranged to provide trackable transportation to a product or a person. The cart contains sensors and computer-controlled drive wheels to enable that cart assembly, when fully opened, to follow a safe path as directed by received electronic signals. That cart assembly is also tri-foldably collapsible, so as to have multiple portions pivoted into nesting configuration with one another thus containable in a minimal volume and even carried by an individual.
摘要:
An apparatus and a process for the manufacture of a solder-bump adhered wafer substrate for use in the semiconductor industry, comprising one or more of the following steps including: arranging a first compressive member and a second compressive member in an opposed, compressibly displaceable, spaced-apart relationship, with a pattern plate disposed therebetween with the pattern plate having a plurality of aligned through-holes arranged thereon; filling the through-holes with a molten solder; compressing the solder and the pattern plate between the first and second opposed compressive members to compact the solder therein and cleans the pattern plate of excess solder; chilling the pattern plate to solidify the molten solder in the through-holes; and removing the pattern plate from the spaced-apart compressive members to produce a wafer with solder bumps thereon.
摘要:
An apparatus and a process for the manufacture of a solder-bump adhered wafer substrate for use in the semiconductor industry, comprising one or more of the following steps including: arranging a first compressive member and a second compressive member in an opposed, compressibly displaceable, spaced-apart relationship, with a pattern plate disposed therebetween with the pattern plate having a plurality of aligned through-holes arranged thereon; filling the through-holes with a molten solder; compressing the solder and the pattern plate between the first and second opposed compressive members to compact the solder therein and cleans the pattern plate of excess solder; chilling the pattern plate to solidify the molten solder in the through-holes; and removing the pattern plate from the spaced-apart compressive members to produce a wafer with solder bumps thereon.