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公开(公告)号：US09269519B2
公开(公告)日：2016-02-23
申请号：US14731830
申请日：2015-06-05
IPC分类号： H01L29/84 , H01H59/00 , H01L27/20 , H03K17/975
CPC分类号： H01H59/0009 , B82Y30/00 , B82Y40/00 , H01H2059/0081 , H01H2209/014 , H01H2209/046 , H01H2209/07 , H01H2239/004 , H01H2239/006 , H01L27/13 , H01L27/20 , H03K17/975 , Y10T29/49105
摘要： An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.
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公开(公告)号：US20150295134A1
公开(公告)日：2015-10-15
申请号：US14682947
申请日：2015-04-09
CPC分类号： H01L33/34 , H01L33/0054
摘要： A system and method for transparent diamond semiconductor electronics are provided. The system may include a transparent substrate, a diamond active layer, a conductive layer, and an application that incorporates the transparent layer, the diamond layer, and the conductive layer. The method may include selecting a transparent substrate, creating a diamond material having a diamond lattice on the substrate, introducing acceptor dopant atoms to the diamond lattice to create ion tracks, introducing substitutional dopant atoms, annealing the diamond lattice, adding a conductive layer to the diamond lattice, and incorporating the substrate, and the diamond lattice, and the conductive layer into an application.
摘要翻译： 提供了一种用于透明金刚石半导体电子器件的系统和方法。 该系统可以包括透明衬底，金刚石活性层，导电层以及包含透明层，金刚石层和导电层的应用。 该方法可以包括选择透明衬底，在衬底上形成具有金刚石晶格的金刚石材料，将受体掺杂剂原子引入金刚石晶格以产生离子轨迹，引入取代掺杂剂原子，退火金刚石晶格，向 金刚石晶格，并将衬底，金刚石晶格和导电层并入应用中。
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公开(公告)号：US08673164B2
公开(公告)日：2014-03-18
申请号：US13248074
申请日：2011-09-29
申请人： Anirudha V. Sumant
发明人： Anirudha V. Sumant
IPC分类号： C03C25/00
CPC分类号： C23C16/02 , B01D67/0051 , B01D67/0062 , B01D67/0072 , B01D69/105 , B01D71/021 , B01D2323/24 , C23C16/27
摘要： A method to fabricate nanoporous diamond membranes and a nanoporous diamond membrane are provided. A silicon substrate is provided and an optical lithography is used to produce metal dots on the silicon substrate with a predefined spacing between the dots. Selective seeding of the silicon wafer with nanodiamond solution in water is performed followed by controlled lateral diamond film growth producing the nanoporous diamond membrane. Back etching of the under laying silicon is performed to open nanopores in the produced nanoporous diamond membrane.
摘要翻译： 提供了制备纳米多孔金刚石膜和纳米多孔金刚石膜的方法。 提供硅衬底，并且使用光学光刻法在硅衬底上以点之间的预定间隔产生金属点。 进行在纳米金刚石溶液中的硅晶片在水中的选择性接种，然后控制横向金刚石膜生长，产生纳米多孔金刚石膜。 进行下沉硅的背蚀刻以在所制备的纳米多孔金刚石膜中打开纳米孔。
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公开(公告)号：US20150197701A1
公开(公告)日：2015-07-16
申请号：US14415499
申请日：2013-07-18
申请人： Anirudha V. Sumant , Ali Erdemir , Junho Choi , Diana Berman
发明人： Anirudha V. Sumant , Ali Erdemir , Junho Choi , Diana Berman
IPC分类号： C10M103/04 , B05D5/08 , B05D1/02 , C23C16/26 , C23C16/40
CPC分类号： C10M103/04 , B05D1/02 , B05D5/08 , B82Y30/00 , C10M103/02 , C10M177/00 , C10M2201/0413 , C10N2230/06 , C10N2250/08 , C10N2250/121 , C10N2270/00 , C10N2280/00 , C23C16/26 , C23C16/40 , Y10T428/30
摘要： A system and method for forming at least one of graphene and graphene oxide on a substrate and an opposed wear member. The system includes graphene and graphene oxide formed by an exfoliation process or solution processing method to dispose graphene and/or graphene oxide onto a substrate. The system further includes an opposing wear member disposed on another substrate and a gas atmosphere of an inert gas like N2, ambient, a humid atmosphere and a water solution.
摘要翻译： 一种用于在基材和相对的磨损部件上形成石墨烯和氧化石墨烯中的至少一种的系统和方法。 该系统包括通过剥离工艺或溶液处理方法形成的石墨烯和石墨烯氧化物，以将石墨烯和/或石墨烯氧化物置于基材上。 该系统还包括设置在另一基板上的相对的磨损构件和诸如N2，环境，潮湿气氛和水溶液的惰性气体的气体气氛。
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5.发明授权Graphene layer formation at low substrate temperature on a metal and carbon based substrate 有权在金属和碳基底层的低衬底温度下形成石墨烯层公开(公告)号：US08906772B2
公开(公告)日：2014-12-09
申请号：US13481110
申请日：2012-05-25
申请人： Anirudha V. Sumant
发明人： Anirudha V. Sumant
IPC分类号： H01L21/331 , H01L21/822243
CPC分类号： H01L21/02376 , B82Y40/00 , H01L21/02381 , H01L21/02444 , H01L21/02491 , H01L21/02527 , H01L21/0262
摘要： A system and method for forming graphene layers on a substrate. The system and methods include direct growth of graphene on diamond and low temperature growth of graphene using a solid carbon source.
摘要翻译： 一种用于在基板上形成石墨烯层的系统和方法。 该系统和方法包括使用固体碳源直接生长石墨烯在金刚石上和石墨烯的低温生长。
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公开(公告)号：US20140023864A1
公开(公告)日：2014-01-23
申请号：US13553484
申请日：2012-07-19
申请人： Anirudha V. Sumant , Ali Erdemir , Junho Choi , Diana Berman
发明人： Anirudha V. Sumant , Ali Erdemir , Junho Choi , Diana Berman
CPC分类号： C10M103/04 , B05D1/02 , B05D5/08 , B82Y30/00 , C10M103/02 , C10M177/00 , C10M2201/0413 , C10N2230/06 , C10N2250/08 , C10N2250/121 , C10N2270/00 , C10N2280/00 , C23C16/26 , C23C16/40 , Y10T428/30
摘要： A system and method for forming graphene on a substrate and an opposed wear member having a DLC coating. The system includes graphene formed by an exfoliation process to dispose solution processed graphene onto a substrate. The system further includes an opposing wear member of DLC disposed on another substrate and a gas atmosphere of an inert gas like N2.
摘要翻译： 一种用于在基底上形成石墨烯的系统和方法以及具有DLC涂层的相对磨损件。 该系统包括通过剥离工艺形成的石墨烯，以将溶液处理的石墨烯处理到基底上。 该系统还包括设置在另一基板上的DLC的相对的磨损构件和诸如N 2的惰性气体的气体气氛。
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公开(公告)号：US20130273720A1
公开(公告)日：2013-10-17
申请号：US13448068
申请日：2012-04-16
IPC分类号： H01L21/20
CPC分类号： H01L21/02488 , H01L21/02376 , H01L21/02381 , H01L21/02444 , H01L21/02491 , H01L21/02527 , H01L21/0262 , H01L21/02658
摘要： A system and method for forming graphene layers on a substrate. The system and methods include direct growth of graphene on diamond and low temperature growth of graphene using a solid carbon source.
摘要翻译： 一种用于在基板上形成石墨烯层的系统和方法。 该系统和方法包括使用固体碳源直接生长石墨烯在金刚石上和石墨烯的低温生长。
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公开(公告)号：US20130084436A1
公开(公告)日：2013-04-04
申请号：US13248074
申请日：2011-09-29
申请人： Anirudha V. Sumant
发明人： Anirudha V. Sumant
CPC分类号： C23C16/02 , B01D67/0051 , B01D67/0062 , B01D67/0072 , B01D69/105 , B01D71/021 , B01D2323/24 , C23C16/27
摘要： A method to fabricate nanoporous diamond membranes and a nanoporous diamond membrane are provided. A silicon substrate is provided and an optical lithography is used to produce metal dots on the silicon substrate with a predefined spacing between the dots. Selective seeding of the silicon wafer with nanodiamond solution in water is performed followed by controlled lateral diamond film growth producing the nanoporous diamond membrane. Back etching of the under laying silicon is performed to open nanopores in the produced nanoporous diamond membrane.
摘要翻译： 提供了制备纳米多孔金刚石膜和纳米多孔金刚石膜的方法。 提供硅衬底，并且使用光学光刻法在硅衬底上以点之间的预定间隔产生金属点。 进行在纳米金刚石溶液中的硅晶片在水中的选择性接种，然后控制横向金刚石膜生长，产生纳米多孔金刚石膜。 进行下沉硅的背蚀刻以在所制备的纳米多孔金刚石膜中打开纳米孔。
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公开(公告)号：US20110107473A1
公开(公告)日：2011-05-05
申请号：US11686046
申请日：2007-03-14
CPC分类号： G01Q70/14 , C23C16/0272 , C23C16/26
摘要： Diamond-like carbon (DLC) coated nanoprobes and methods for fabricating such nanoprobes are provided. The nanoprobes provide hard, wear-resistant, low friction probes for use in such applications as atomic force microscopy, nanomachining, nanotribology, metrology and nanolithography. The diamond-like carbon coatings include a carbon implantation layer which increases adhesion of a deposited DLC layer to an underlying nanoprobe tip.
摘要翻译： 提供了类金刚石碳（DLC）涂层的纳米探针及其制造方法。 纳米探针提供硬，耐磨，低摩擦探针，用于诸如原子力显微镜，纳米加工，纳米钻孔，计量学和纳米光刻技术的应用。 类金刚石碳涂层包括碳沉积层，其增加沉积的DLC层与下面的纳米探针末端的粘附。
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10.发明申请Novel ultrananocrystalline diamond probes for high-resolution low-wear nanolithographic techniques 审中-公开用于高分辨率低磨损纳米光刻技术的新型超微晶金刚石探针公开(公告)号：US20070220959A1
公开(公告)日：2007-09-27
申请号：US11542812
申请日：2006-10-04
IPC分类号： G01B5/28
摘要： A monolithically integrated 3-D membrane or diaphragm/tip (called 3-D tip) of substantially all UNCD having a tip with a radius of about less than 50 nm capable of measuring forces in all three dimensions or being used as single tips or in large arrays for imprint of data on memory media, fabrication of nanodots of different materials on different substrates and many other uses such as nanolithography production of nanodots of biomaterials on substrates, etc. A method of molding UNCD is disclosed including providing a substrate with a predetermined pattern and depositing an oxide layer prior to depositing a carbide-forming metallic seed layer, followed by seeding with diamond nano or micropowder in solvent suspension, or mechanically polishing with diamond powder, or any other seeding method, followed by UNCD film growth conforming to the predetermined pattern. Thereafter, one or more steps of masking and/or etching and/or coating and/or selective removal and/or patterning and/or electroforming and/or lapping and/or polishing are used in any combination to form the tip or probe.
摘要翻译： 基本上所有UNCD具有半径约小于50nm的尖端的能够测量所有三维尺寸的力或用作单个尖端的基本上所有UNCD的单片集成的3-D膜或膜片/尖端（称为3-D尖端） 用于记录介质上的数据压印的大型阵列，不同衬底上的不同材料的纳米点的制造以及许多其他用途，例如在衬底上的生物材料的纳米点的纳米光刻生产。公开了一种模制UNCD的方法，包括提供具有预定 在沉积形成碳化物的金属种子层之前沉积氧化物层，然后在溶剂悬浮液中用金刚石纳米或微粉子接种，或用金刚石粉末机械抛光，或任何其他播种方法，随后是符合 预定模式。 此后，以任何组合使用掩蔽和/或蚀刻和/或涂覆和/或选择性去除和/或图案化和/或电铸和/或研磨和/或抛光的一个或多个步骤以形成尖端或探针。
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