Diamond semiconductor system and method

    公开(公告)号:US11107684B2

    公开(公告)日:2021-08-31

    申请号:US16773891

    申请日:2020-01-27

    Applicant: Adam Khan

    Inventor: Adam Khan

    Abstract: Disclosed herein is a new and improved system and method for fabricating monolithically integrated diamond semiconductor. The method may include the steps of seeding the surface of a substrate material, forming a diamond layer upon the surface of the substrate material; and forming a semiconductor layer within the diamond layer, wherein the diamond semiconductor of the semiconductor layer has n-type donor atoms and a diamond lattice, wherein the donor atoms contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice at 100 kPa and 300K, and Wherein the n-type donor atoms are introduced to the lattice through ion tracks.

    DIAMOND COATED ANTIREFLECTIVE WINDOW SYSTEM AND METHOD

    公开(公告)号:US20200158915A1

    公开(公告)日:2020-05-21

    申请号:US16579742

    申请日:2019-09-23

    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antiretlective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.

    Diamond coated antireflective window system and method

    公开(公告)号:US10254445B2

    公开(公告)日:2019-04-09

    申请号:US15461371

    申请日:2017-03-16

    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate; a plurality of polycrystalline diamond films, a plurality of germanium films, and a plurality of fused silica films. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a plurality of diamond layers above the optical substrate, forming a plurality of germanium layers above the optical substrate; and forming a plurality of fused silica layers above the optical substrate, wherein the reflectance of the antireflective coating is between 0.1 and 3.0 percent for infrared spectrum wavelengths between 1800 and 5000 nanometers.

    P-CHANNEL NANOCRYSTALLINE DIAMOND FIELD EFFECT TRANSISTOR
    8.
    发明申请
    P-CHANNEL NANOCRYSTALLINE DIAMOND FIELD EFFECT TRANSISTOR 审中-公开
    P沟道纳米金刚石场效应晶体管

    公开(公告)号:US20080073646A1

    公开(公告)日:2008-03-27

    申请号:US11838100

    申请日:2007-08-13

    Applicant: Adam Khan

    Inventor: Adam Khan

    CPC classification number: H01L29/812 H01L29/1602 H01L29/66045

    Abstract: An electrically conducting p-channel diamond lattice field effect transistor (DLFET) composed of nanocrystalline diamond having at least about 1020 atoms/cm3 of boron in conduction channel is disclosed, along with methods of making the same. The nanocrystalline diamond may be characterized by having an average grain size diameter of less than 1 μm, and in particular, grain sizes on the order of 10 to 20 nm, for improved performance of the DLFET.

    Abstract translation: 公开了一种导电p沟道金刚石晶格场效应晶体管(DLFET),其由导电沟道中具有至少约10 20个/ cm 3的硼的纳米晶体金刚石组成, 以及制作相同的方法。 为了改善DLFET的性能,纳米晶金刚石的特征在于具有小于1μm的平均粒径直径,特别是10-20nm量级的晶粒尺寸。

    Diamond Semiconductor System and Method

    公开(公告)号:US20220013361A1

    公开(公告)日:2022-01-13

    申请号:US17329117

    申请日:2021-05-24

    Applicant: Adam Khan

    Inventor: Adam Khan

    Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The system may include a diamond malarial having n-type donor atoms and a diamond lattice, wherein 0.16% of the donor atoms contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice at 100 kPa and 300K. The method of fabricating diamond semiconductors may include the steps of selecting a diamond material having a diamond lattice; introducing a minimal amount of acceptor dopant atoms to the diamond lattice to create ion tracks; introducing substitutional dopant atoms to the diamond lattice through the ion tracks; and annealing the diamond lattice.

    Diamond coated antireflective window system and method

    公开(公告)号:US11112539B2

    公开(公告)日:2021-09-07

    申请号:US16579742

    申请日:2019-09-23

    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.

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