公开(公告)号：US20110107473A1

公开(公告)日：2011-05-05

申请号：US11686046

申请日：2007-03-14

申请人： Robert W. Carpick ,  Kumar Sridharan ,  Anirudha V. Sumant

发明人： Robert W. Carpick ,  Kumar Sridharan ,  Anirudha V. Sumant

IPC分类号： G01Q70/14 ,  C23C14/06 ,  C23C14/48 ,  B82Y40/00 ,  B82Y35/00

CPC分类号： G01Q70/14 ,  C23C16/0272 ,  C23C16/26

摘要： Diamond-like carbon (DLC) coated nanoprobes and methods for fabricating such nanoprobes are provided. The nanoprobes provide hard, wear-resistant, low friction probes for use in such applications as atomic force microscopy, nanomachining, nanotribology, metrology and nanolithography. The diamond-like carbon coatings include a carbon implantation layer which increases adhesion of a deposited DLC layer to an underlying nanoprobe tip.

摘要翻译： 提供了类金刚石碳（DLC）涂层的纳米探针及其制造方法。 纳米探针提供硬，耐磨，低摩擦探针，用于诸如原子力显微镜，纳米加工，纳米钻孔，计量学和纳米光刻技术的应用。 类金刚石碳涂层包括碳沉积层，其增加沉积的DLC层与下面的纳米探针末端的粘附。