公开(公告)号：US20160381776A1

公开(公告)日：2016-12-29

申请号：US15187590

申请日：2016-06-20

Applicant: KLA-Tencor Corporation

Inventor： Matthew Derstine ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin

IPC: H05H1/24

CPC classification number: H05G2/008

Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

Abstract translation: 用于产生激光持续宽带光的系统包括被配置为产生泵浦光束的泵浦源，用于容纳气体的气体容纳结构和多遍光学组件。 多遍光学组件包括一个或多个光学元件，其被配置为执行泵浦光束通过气体的一部分的多次通过以维持宽带发光等离子体。 一个或多个光学元件被布置成收集透射通过等离子体的泵送光束的未吸收部分，并将所收集的未吸收的泵送光束部分引导回到气体的该部分中。

公开(公告)号：US09526158B1

公开(公告)日：2016-12-20

申请号：US14814622

申请日：2015-07-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC: H02J1/02 ,  H05H1/24 ,  H01J61/09 ,  H01J1/02 ,  H01J23/033

CPC classification number: H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

Abstract: A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.

Abstract translation: 一种激光持续等离子体光源，其具有包含在电池内的气体体积的电池。 至少一个激光器被引导到气体体积中，用于维持等离子体产生光的气体体积内的等离子体。 提供了用于在层流中连续地向等离子体提供气体体积的装置。 反射器收集光并将光提供到期望的位置。

公开(公告)号：US09390902B2

公开(公告)日：2016-07-12

申请号：US14224945

申请日：2014-03-25

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Kenneth P. Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

IPC: H01J65/00

CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。

公开(公告)号：US09318311B2

公开(公告)日：2016-04-19

申请号：US13647680

申请日：2012-10-09

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Rajeev Patil

IPC: H01J61/52 ,  H01J61/28 ,  H01J65/04

CPC classification number: H01J61/526 ,  H01J61/28 ,  H01J65/04

Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

Abstract translation: 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。

公开(公告)号：US20150357179A1

公开(公告)日：2015-12-10

申请号：US14699781

申请日：2015-04-29

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Matthew Panzer ,  Ilya Bezel

IPC: H01J61/30 ,  H05G2/00 ,  H01J65/04

CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

Abstract translation: 激光维持等离子体光源包括等离子体灯，其构造成容纳一定体积的气体并且从泵浦激光器接收照明以产生等离子体。 等离子体灯包括对来自泵浦激光器的照明透明的一个或多个透明部分和由等离子体发射的宽带辐射的至少一部分。 一个或多个透明部分由具有高于700ppm的高氢氧化物含量的透明材料形成。

公开(公告)号：US09185788B2

公开(公告)日：2015-11-10

申请号：US14288092

申请日：2014-05-27

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

IPC: H01J65/04 ,  H05H1/24 ,  H01J61/30

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J65/04 ,  H05G2/003 ,  H05G2/008

Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元还包括设置在等离子体产生之上的顶部流量控制元件，其包括被配置为引导等离子体羽流向上的内部通道，以及设置在等离子体产生区域下方的底部流量控制元件，其包括配置在内部通道 以将气体向上引导到等离子体产生区域。 顶部流量控制元件和底部流量控制元件布置在传动元件内以形成用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域的一个或多个气体返回通道。

公开(公告)号：US20150049778A1

公开(公告)日：2015-02-19

申请号：US14459095

申请日：2014-08-13

Applicant: KLA-Tencor Corporation

Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Panzer ,  Eugene Shifrin

IPC: H01S3/097

CPC classification number: G02B27/1006

Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

Abstract translation: 用于分离等离子体泵浦光和收集的宽带光的系统包括被配置为产生包括至少第一波长的泵浦照明的泵浦源，用于容纳一定体积气体的气体容纳元件，被配置为将来自泵浦源的泵浦照明 进入气体体积以在气体体积内产生等离子体，其中等离子体发射包括至少第二波长的宽带辐射和位于收集器的反射表面和泵浦源之间的照明分离棱镜元件，并布置成在空间上分离 所述泵浦照明包括第一波长和发射的宽带辐射，其包括从等离子体发射的至少第二波长。

公开(公告)号：US20150048741A1

公开(公告)日：2015-02-19

申请号：US14459155

申请日：2014-08-13

Applicant: KLA-Tencor Corporation

Inventor： David W. Shortt ,  Steven R. Lange ,  Matthew Derstine ,  Kenneth P. Gross ,  Wei Zhao ,  Ilya Bezel ,  Anatoly Shchemelinin

IPC: H05H1/46

CPC classification number: G21K5/00

Abstract: The inspection of a sample with VUV light from a laser sustained plasma includes generating pumping illumination including a first selected wavelength, or range of wavelength, containing a volume of gas suitable for plasma generation, generating broadband radiation including a second selected wavelength, or range of wavelengths, by forming a plasma within the volume of gas by focusing the pumping illumination into the volume of gas, illuminating a surface of a sample with the broadband radiation emitted from the plasma via an illumination pathway, collecting illumination from a surface of the sample, focusing the collected illumination onto a detector via a collection pathway to form an image of at least a portion of the surface of the sample and purging the illumination pathway and/or the collection pathway with a selected purge gas.

Abstract translation: 使用来自激光持续等离子体的VUV光检测样品包括产生包括第一选定波长或波长范围的泵浦照明，其包含适于等离子体产生的气体体积，产生包括第二选定波长的宽度辐射或范围 通过将泵浦照明聚焦到气体体积中，通过将等离子体聚焦在气体体积中，利用从等离子体经由照明路径发射的宽带辐射来照射样品的表面，从样品的表面收集照明， 通过收集路径将收集的照明聚焦到检测器上，以形成样品表面的至少一部分的图像，并用所选择的吹扫气体吹扫照明路径和/或收集路径。

公开(公告)号：US20150034838A1

公开(公告)日：2015-02-05

申请号：US14288092

申请日：2014-05-27

Applicant: KLA-TENCOR CORPORATION

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

IPC: H05H1/24

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J65/04 ,  H05G2/003 ,  H05G2/008

Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元还包括设置在等离子体产生之上的顶部流量控制元件，其包括被配置为引导等离子体羽流向上的内部通道，以及设置在等离子体产生区域下方的底部流量控制元件，其包括配置在内部通道 以将气体向上引导到等离子体产生区域。 顶部流量控制元件和底部流量控制元件布置在传动元件内以形成用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域的一个或多个气体返回通道。

公开(公告)号：US20140367592A1

公开(公告)日：2014-12-18

申请号：US14476149

申请日：2014-09-03

Applicant: KLA-Tencor Corporation, a Delaware Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70016 ,  H01J61/02 ,  H01J61/025 ,  H01J61/04 ,  H01J61/302 ,  H01J61/33 ,  H01J65/04

Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.

Abstract translation: 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有至少一个属性的壁，该特性被改变以补偿系统中的光学像差。