公开(公告)号：US20160141146A1

公开(公告)日：2016-05-19

申请号：US14547111

申请日：2014-11-18

Applicant: Sri Rama Prasanna Pavani

Inventor： Sri Rama Prasanna Pavani

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/20

CPC classification number: H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01L22/12 ,  H01L22/20

Abstract: A method for certifying an inspection system using a calibrated surface, comprising: acquiring a calibrated list from said calibrated surface, with said calibrated list comprising information about features located on said calibrated surface; inspecting said calibrated surface with said inspection system to generate an estimated list, with said estimated list comprising information about features located on said calibrated surface; generating a matched list by searching for the presence of one or more calibrated features in said estimated list, wherein said calibrated features are listed in said calibrated list; computing an estimated characteristic parameter from said matched list, wherein said estimated characteristic parameter quantifies features in said matched list having a unifying characteristic; and comparing said estimated characteristic parameter with a calibrated characteristic parameter, wherein said calibrated characteristic parameter quantifies features in said calibrated list having said unifying characteristic, whereby the ability of said inspection system to detect features with one or more characteristics is certified. A system and method for imaging a surface to generate an adaptive resolution image, comprising: determining a weakly scattering feature, wherein said weakly scattering feature produces a weak image response to be resolved by said adaptive resolution image; determining a coarse spot size such that said weakly scattering feature is detected in an image captured with said coarse spot size; capturing a coarse image of region with said coarse spot size, wherein said coarse image of region comprises one or more pixels corresponding to a predetermined region of said surface; classifying said coarse image of region into a coarse image of feature and a coarse image of surface, wherein a feature is detected in said coarse image of feature and a feature is not detected in said coarse image of surface; estimating a feature position from said coarse image of feature, wherein said feature position is the location of feature on said surface; capturing a fine image of feature at said feature position, wherein said fine image of feature is captured with a fine spot size having a smaller spot size than said coarse spot size; and combining said fine image of feature and said coarse image of surface to generate said adaptive resolution image, whereby feature regions are captured with finer resolution than featureless surface regions in said adaptive resolution image.

公开(公告)号：US09305740B2

公开(公告)日：2016-04-05

申请号：US13920284

申请日：2013-06-18

Applicant: Jürgen Frosien ,  Benjamin John Cook

Inventor： Jürgen Frosien ,  Benjamin John Cook

IPC: H01J37/04 ,  H01J37/147 ,  H01J37/153 ,  H01J37/26

CPC classification number: H01J37/045 ,  H01J37/1478 ,  H01J37/153 ,  H01J37/263 ,  H01J2237/1534 ,  H01J2237/281 ,  H01J2237/2815

Abstract: A charged particle beam device is described. In one aspect, the charged particle beam device includes a charged particle beam source, and a switchable multi-aperture for generating two or more beam bundles from a charged particle beam which includes: two or more aperture openings, wherein each of the two or more aperture openings is provided for generating a corresponding beam bundle of the two or more beam bundles; a beam blanker arrangement configured for individually blanking the two or more beam bundles; and a stopping aperture for blocking beam bundles. The device further includes a control unit configured to control the individual blanking of the two or more beam bundles for switching of the switchable multi-aperture and an objective lens configured for focusing the two or more beam bundles on a specimen or wafer.

Abstract translation: 描述带电粒子束装置。 一方面，带电粒子束装置包括带电粒子束源和用于从带电粒子束产生两束或更多束束的可切换多孔，该多束光束包括：两个或更多孔径开口，其中两个或更多个 提供孔径开口以产生两个或更多束束的相应束束; 束消除器配置，其被配置为单独地消隐所述两个或更多个束束; 以及用于阻挡束束的止动孔。 该装置还包括控制单元，该控制单元被配置为控制用于切换可切换多孔的两个或更多束束的单独消隐，以及被配置用于将两束或更多束束聚焦在样本或晶片上的物镜。

公开(公告)号：US09000395B2

公开(公告)日：2015-04-07

申请号：US14276000

申请日：2014-05-13

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/12 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US08921787B2

公开(公告)日：2014-12-30

申请号：US14258004

申请日：2014-04-21

Applicant: Christopher Su-Yan Own ,  William Andregg ,  Mochii, Inc.

Inventor： Christopher Su-Yan Own ,  Andrew Bleloch ,  William Andregg

IPC: G01N23/02 ,  G01N13/12 ,  H01J37/26

CPC classification number: H01J37/263 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2614 ,  H01J2237/262

Abstract: A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may be adapted to generate two or more images that are substantially incoherently related to one another, store the images, and combine amplitude signals at corresponding pixels of the respective images to improve a signal-to-noise ratio. Alternatively or in addition, the transmission electron microscope may be adapted to operate the specimen holder to move the specimen in relation to the beam optics during exposure or between exposures to operate the transmission electron microscope in an incoherent mode.

Abstract translation: 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以适于产生彼此基本上不相干的两个或更多个图像，存储图像，并将各个图像的相应像素处的振幅信号组合以提高信噪比。 或者或另外，透射电子显微镜可以适于操作样本保持器以在曝光期间或在曝光之间相对于光束光学元件移动样本，以以非相干模式操作透射电子显微镜。

公开(公告)号：US20140284476A1

公开(公告)日：2014-09-25

申请号：US14276000

申请日：2014-05-13

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/05 ,  H01J37/12 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍物上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US08841612B2

公开(公告)日：2014-09-23

申请号：US13812899

申请日：2011-08-08

Applicant: Muneyuki Fukuda ,  Naomasa Suzuki ,  Tomoyasu Shojo ,  Noritsugu Takahashi ,  Hiroshi Suzuki ,  Hiroshi Makino

Inventor： Muneyuki Fukuda ,  Naomasa Suzuki ,  Tomoyasu Shojo ,  Noritsugu Takahashi ,  Hiroshi Suzuki ,  Hiroshi Makino

IPC: G01N23/00 ,  H01J23/00 ,  H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  G01K7/00 ,  G01N23/22

CPC classification number: H01J37/263 ,  G01N23/22 ,  H01J37/222 ,  H01J37/28

Abstract: This charged particle beam microscope is characterized by being provided with selection means (153, 155) for a measurement processing method for detected particles (118) and by this means selecting a different measurement processing method for a scanning region with a large number of secondary electrons (115) emitted from a sample (114) and for a region with a small number of secondary electrons. Thus, in sample scanning using a charged particle beam microscope, an image in which the contrast of bottom holes and channel bottoms with few emitted secondary electrons is emphasized and images that emphasize shadow contrast can be acquired in a short period of time.

Abstract translation: 该带电粒子束显微镜的特征在于设置有用于检测粒子（118）的测量处理方法的选择装置（153,155），并且通过这种方式为具有大量二次电子的扫描区域选择不同的测量处理方法 （114）和二次电子数量少的区域（115）。 因此，在使用带电粒子束显微镜的样本扫描中，强调了具有较少发射的二次电子的底部孔和通道底部的对比度的图像，并且可以在短时间内获取强调阴影对比度的图像。

公开(公告)号：US08835846B2

公开(公告)日：2014-09-16

申请号：US14015658

申请日：2013-08-30

Applicant: FEI Company ,  Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.

Inventor： Bart Buijsse ,  Marco Hugo Petrus Moers ,  Radostin Stoyanov Danev

IPC: H01J37/26

CPC classification number: H01J31/283 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2614

Abstract: The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.

Abstract translation: 本发明涉及在配备有相位板的透射电子显微镜中形成样品的图像的方法。 这种相位板的现有技术使用可以以振铃和晕圈的形式引入伪影。 这些假象是由于衍射平面中相位板的锋利边缘引起的傅里叶域的突然变化引起的。 通过在记录图像的同时相对于非衍射光束（衍射图案）移动相位板，将傅立叶域中的突然转变改变为更渐进的转变，导致更少的伪像。

公开(公告)号：US08772716B2

公开(公告)日：2014-07-08

申请号：US13896103

申请日：2013-05-16

Applicant: FEI Company

Inventor： Bart Buijsse

IPC: G21K7/00 ,  G01N23/00

CPC classification number: H01J37/263 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: A phase plate, specifically a Zernike type phase plate, for use in an electron microscope comprises a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function.The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.

Abstract translation: 在电子显微镜中使用的相位板，特别是Zernike型相位板包括中心孔和引起通过所述膜的电子的相移的薄膜。 该相移会导致对比度传递函数（CTF）从正弦函数变为余弦函数。 相板配备有由较薄的膜承载的环形形式的膜。 因此，仅在较小的空间频率范围（对于低频），相位发生变化（因而CTF），而对于其他空间频率，相移可忽略不计，因此CTF保持不变。 由于载体膜的厚度小得多，所以电子的散射也是可忽略的。

公开(公告)号：US20140061463A1

公开(公告)日：2014-03-06

申请号：US14015658

申请日：2013-08-30

Applicant: Max-Planck-Gesellschaft zur Gorderung der Wissenschaften e.V. ,  FEI Company

Inventor： Bart Buijsse ,  Marco Hugo Petrus Moers ,  Radostin Stoyanov Danev

IPC: H01J37/26

CPC classification number: H01J31/283 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2614

Abstract: The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.

Abstract translation: 本发明涉及在配备有相位板的透射电子显微镜中形成样品的图像的方法。 这种相位板的现有技术使用可以以振铃和晕圈的形式引入伪影。 这些伪像是由于衍射平面中相位板的锋利边缘由于傅里叶域的突然变化引起的。 通过在记录图像的同时相对于非衍射光束（衍射图案）移动相位板，将傅立叶域中的突然转变改变为更渐进的转变，导致更少的伪像。

公开(公告)号：US20140061455A1

公开(公告)日：2014-03-06

申请号：US13764522

申请日：2013-02-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Takashi ISHII ,  Akira HAMAGUCHI

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/248

Abstract: In accordance with an embodiment, a method of adjusting quality of an image of patterns common in shape includes acquiring a first gray value and a first waveform within a reference image, acquiring a sample image, acquiring a second gray value and a second waveform from third and fourth regions within a sample image, respectively, and adjusting the brightness and contrast of the sample image. The first gray value is a standard for the brightness of the image from a first region within a reference image. The first and second waveforms represent a luminance profile of second and fourth regions including edges, respectively. The third and fourth regions correspond to the first and second regions. The brightness and contrast of the sample image are adjusted by matching the first gray value and the first waveform with the second gray value and the second waveform.

Abstract translation: 根据实施例，调整形状中共同的图案的质量的方法包括获取参考图像内的第一灰度值和第一波形，获取样本图像，从第三方获取第二灰度值和第二波形 和第四区域，并且调整样本图像的亮度和对比度。 第一灰度值是来自参考图像内的第一区域的图像的亮度的标准。 第一和第二波形分别表示包括边缘的第二和第四区域的亮度分布。 第三和第四区域对应于第一和第二区域。 通过将第一灰度值和第一波形与第二灰度值和第二波形匹配来调整样本图像的亮度和对比度。