公开(公告)号：US20160336143A1

公开(公告)日：2016-11-17

申请号：US15066536

申请日：2016-03-10

Applicant: Kabushiki Kaisha Toshiba

Inventor： Takashi ISHII

IPC: H01J37/20 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/265 ,  H01J2237/20214 ,  H01J2237/221 ,  H01J2237/2826

Abstract: In accordance with an embodiment, a charged particle beam apparatus includes an irradiating section, a detecting section, a range setting section, a scanning control section, a control section, and a sample position calibrating section. The range setting section sets a scanning range of a charged particle beam. The scanning control section scans the set scanning range with the charged particle beam. The control section relatively rotates the sample by each predetermined unit in association with an entering direction of the charged particle beam, detects peak values of the signal from the detecting section when the scanning range is scanned by each rotating angle with the charged particle beam, specifies the rotating angle corresponding to the maximum peak value among the peak values of the respective detected rotating angles, and specifies a reference position to observe the sample on the basis of the specified rotating angle.

Abstract translation: 根据实施例，带电粒子束装置包括照射部分，检测部分，范围设定部分，扫描控制部分，控制部分和样本位置校准部分。 范围设定部设定带电粒子束的扫描范围。 扫描控制部分用带电粒子束扫描设定的扫描范围。 控制部分相对于带电粒子束的进入方向相对旋转每个预定单元的样本，当扫描范围用带电粒子束的每个旋转角扫描时，检测来自检测部分的信号的峰值，指定 对应于各个检测的旋转角度的峰值中的最大峰值的旋转角度，并且指定基于指定的旋转角度观察样本的参考位置。

公开(公告)号：US20140061455A1

公开(公告)日：2014-03-06

申请号：US13764522

申请日：2013-02-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Takashi ISHII ,  Akira HAMAGUCHI

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/248

Abstract: In accordance with an embodiment, a method of adjusting quality of an image of patterns common in shape includes acquiring a first gray value and a first waveform within a reference image, acquiring a sample image, acquiring a second gray value and a second waveform from third and fourth regions within a sample image, respectively, and adjusting the brightness and contrast of the sample image. The first gray value is a standard for the brightness of the image from a first region within a reference image. The first and second waveforms represent a luminance profile of second and fourth regions including edges, respectively. The third and fourth regions correspond to the first and second regions. The brightness and contrast of the sample image are adjusted by matching the first gray value and the first waveform with the second gray value and the second waveform.

Abstract translation: 根据实施例，调整形状中共同的图案的质量的方法包括获取参考图像内的第一灰度值和第一波形，获取样本图像，从第三方获取第二灰度值和第二波形 和第四区域，并且调整样本图像的亮度和对比度。 第一灰度值是来自参考图像内的第一区域的图像的亮度的标准。 第一和第二波形分别表示包括边缘的第二和第四区域的亮度分布。 第三和第四区域对应于第一和第二区域。 通过将第一灰度值和第一波形与第二灰度值和第二波形匹配来调整样本图像的亮度和对比度。

公开(公告)号：US20230326096A1

公开(公告)日：2023-10-12

申请号：US18298957

申请日：2023-04-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Takanori YOSHII ,  Takashi ISHII ,  Yoshiyuki HIRAHARA ,  Takehiro KATO ,  Yasuo NAMIOKA

IPC: G06T11/00 ,  G06T7/00

CPC classification number: G06T11/00 ,  G06T7/0008 ,  G06T2207/30164

Abstract: According to one embodiment, a processing device causes a display of a first object at a position separated from a fastening location of a screw. The first object is virtual and indicates the fastening location. The processing device associates first data and second data when a prescribed physical object contacts the first object and the first data is received from a tool turning the screw. The second data is related to the fastening location.