公开(公告)号：US11823883B2

公开(公告)日：2023-11-21

申请号：US17531674

申请日：2021-11-19

Applicant: NOVA MEASURING INSTRUMENTS, INC.

Inventor： Christopher F. Bevis ,  Yungman Alan Liu ,  David Allen Reed ,  Eli Cheifetz ,  Amit Weingarten ,  Alexander Kadyshevitch

IPC: H01J49/02 ,  H01J49/06 ,  G01T1/20 ,  G01T1/208 ,  G01T1/29 ,  G01T1/28

CPC classification number: H01J49/025 ,  G01T1/2006 ,  G01T1/208 ,  G01T1/28 ,  G01T1/2928 ,  H01J49/06 ,  H01J2237/2445

Abstract: An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.

公开(公告)号：US11796646B2

公开(公告)日：2023-10-24

申请号：US17897613

申请日：2022-08-29

Applicant: Motional AD LLC

Inventor： Geng Fu

IPC: G01S7/4861 ,  G01S7/481 ,  G01T1/164

CPC classification number: G01S7/4861 ,  G01S7/4816 ,  G01T1/1645 ,  H01J2237/2445

Abstract: Provided is a silicon photomultiplier (SiPM) device and a silicon photomultiplier based LiDAR. The SiPM device includes a first sub-region and a second sub-region. In the first sub-region, the photodiode is operated with a first internal gain. In the second sub-region, the photodiode is operated with a second internal gain and the second internal gain in smaller than the first internal gain. A first anode generates current from the first sub-region in response to a low flux event, and the second anode generates current from the second sub-region in response to a high flux event. A common cathode outputs current generated from the first sub-region or the second sub-region.

公开(公告)号：US11676795B2

公开(公告)日：2023-06-13

申请号：US17191022

申请日：2021-03-03

Applicant: FEI Company

Inventor： Pavel Stejskal ,  Bohuslav Sed'a ,  Petr Hlavenka ,  Libor Novák ,  Jan Stopka

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/049 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2801

Abstract: The invention relates to system and method of inspecting a specimen with a plurality of charged particle beamlets. The method comprises the steps of providing a specimen, providing a plurality of charged particle beamlets and focusing said plurality of charged particle beamlets onto said specimen, and detecting a flux of radiation emanating from the specimen in response to said irradiation by said plurality of charged particle beamlets.

公开(公告)号：US20180012728A1

公开(公告)日：2018-01-11

申请号：US15703925

申请日：2017-09-13

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Alon Litman ,  Efim Vinnitsky

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/20 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/2807

Abstract: A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

公开(公告)号：US09842724B2

公开(公告)日：2017-12-12

申请号：US15012599

申请日：2016-02-01

Applicant: KLA-Tencor Corporation

Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

IPC: H01J37/28 ,  G03F1/62 ,  G03F1/86

CPC classification number: H01J37/28 ,  G03F1/62 ,  G03F1/86 ,  H01J37/244 ,  H01J2237/2002 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2817

Abstract: A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

公开(公告)号：US09812288B2

公开(公告)日：2017-11-07

申请号：US15119950

申请日：2015-01-09

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minami Shouji ,  Takashi Ohshima ,  Yuusuke Oominami ,  Hideo Morishita ,  Kunio Harada

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

公开(公告)号：US09812287B2

公开(公告)日：2017-11-07

申请号：US14983038

申请日：2015-12-29

Applicant: FEI Company

Inventor： Cornelis Sander Kooijman ,  Thijs Thomas Withaar ,  Gerard Nicolaas Anne van Veen

IPC: H01J37/244 ,  H01J37/285 ,  G01N23/223 ,  G01N23/225

CPC classification number: H01J37/244 ,  G01N23/223 ,  G01N23/2252 ,  G01N23/2257 ,  G01N2223/501 ,  H01J37/285 ,  H01J2237/2445

Abstract: An improved spectroscopic analysis apparatus and method are disclosed, comprising directing a beam of radiation onto a measurement location on a specimen, thereby causing a flux of X-rays to emanate from this location; examining the X-ray flux using a detector arrangement, thus acquiring a spectrum; choosing a set of different measurement directions originating from the location; recording outputs from the detector arrangement for different measurement directions; adopting a spectral model that is a convoluted mix of terms B and Lp, where B is the Bremsstrahlung background spectrum and Lp comprises spectral lines corresponding to the specimen composition at the measurement location; and then automatically deconvolving the set of measurements on the basis of the spectral model to calculate Lp to determine the chemical composition of the specimen at the measurement location. The method includes corrections for differential X-ray absorption within the specimen along the different measurement directions.

公开(公告)号：US09601312B2

公开(公告)日：2017-03-21

申请号：US15052650

申请日：2016-02-24

Applicant: FEI Company

Inventor： Brian Roberts Routh, Jr.

IPC: H01J37/30 ,  H01J37/305 ,  H01J37/147 ,  H01J37/10 ,  H01J37/077 ,  H01J37/08 ,  H01J37/285 ,  H01J27/16 ,  H01J37/05 ,  H01J37/304 ,  G01T1/28 ,  H01J37/26

CPC classification number: H01J37/285 ,  G01T1/28 ,  H01J27/16 ,  H01J37/05 ,  H01J37/077 ,  H01J37/08 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/265 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/0817 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/31749

Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.

公开(公告)号：US09601308B2

公开(公告)日：2017-03-21

申请号：US14439993

申请日：2012-10-31

Applicant: Hitachi, Ltd.

Inventor： Yoshihiro Anan ,  Masanari Koguchi

IPC: G01T1/20 ,  H01J37/244 ,  G01N23/225 ,  H01J37/28 ,  G21K1/06 ,  H01J37/252

CPC classification number: H01J37/244 ,  G01N23/2252 ,  G21K1/067 ,  G21K2201/064 ,  H01J37/252 ,  H01J37/28 ,  H01J2237/2442 ,  H01J2237/2445

Abstract: To analyze an element to be evaluated with high sensitivity and high accuracy in a short period of time, in an electron beam analyzer including a wavelength dispersive X-ray analyzer in an electron microscope. The electron beam analyzer has one diffraction grating in which a plurality of patterns having maximum X-ray reflectance with respect to the respective X-rays are formed. It simultaneously detects an X-ray as an energy reference and an X-ray spectrum to be evaluated. The positional displacement of X-ray energy due to the installation/replacement of the diffraction grating is corrected using the X-ray spectrum as the energy reference, thereby enabling to perform an analysis with high sensitivity and high accuracy in a short period of time.

公开(公告)号：US09518942B2

公开(公告)日：2016-12-13

申请号：US14716984

申请日：2015-05-20

Applicant: JEOL Ltd.

Inventor： Naoki Kato ,  Masaru Takakura ,  Norihisa Mori ,  Shinya Fujita ,  Shigeru Honda

IPC: G01N23/222 ,  G01N23/225 ,  H01J37/244

CPC classification number: G01N23/2252 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2448

Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

Abstract translation: 相位分析器包括：主成分分析部，其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析，计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图，峰值位置检测部分，其根据散点图检测峰值位置;聚类部分，其计算每个点与每个峰值位置之间的距离; 散点图，并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部，其基于聚类部的分类结果生成相位图。