公开(公告)号：US09534848B2

公开(公告)日：2017-01-03

申请号：US13975945

申请日：2013-08-26

Applicant: KLA-Tencor Corporation

Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

IPC: F21V29/00 ,  F28C3/04 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60 ,  F21V19/00

CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

公开(公告)号：US20160205758A1

公开(公告)日：2016-07-14

申请号：US14989348

申请日：2016-01-06

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Kenneth P. Gross ,  Richard Solarz ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Anant Chimmalgi ,  Xiumei Liu ,  Brooke Bruguier

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。

公开(公告)号：US20160163516A1

公开(公告)日：2016-06-09

申请号：US15043804

申请日：2016-02-15

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

IPC: H01J37/32 ,  H01J65/04

CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

公开(公告)号：US09232622B2

公开(公告)日：2016-01-05

申请号：US14476149

申请日：2014-09-03

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

IPC: F21V5/00 ,  F21V7/00 ,  F21V13/00 ,  F21V13/04 ,  H01J61/02 ,  H05G2/00 ,  G03F7/20 ,  H01J61/30 ,  H01J61/33 ,  H01J61/04

CPC classification number: H05G2/008 ,  G03F7/70016 ,  H01J61/02 ,  H01J61/025 ,  H01J61/04 ,  H01J61/302 ,  H01J61/33 ,  H01J65/04

Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.

Abstract translation: 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有至少一个属性的壁，该特性被改变以补偿系统中的光学像差。

公开(公告)号：US20150333471A1

公开(公告)日：2015-11-19

申请号：US14667235

申请日：2015-03-24

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Rahul Yadav ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Derstine

IPC: H01S3/0915 ,  H01S3/00 ,  H05G2/00

CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

Abstract translation: 用于产生高功率宽带光的系统包括多个光持续等离子体光源。 光源中的每一个包括泵送源，用于容纳气体并被配置为从泵浦源接收泵浦照明的气体容纳结构和抛物面反射器元件，抛物面反射器元件被布置成收集所产生的宽度辐射的至少一部分 等离子体并形成准直宽带辐射输出。 该系统还包括一组光学元件，其被配置为将来自多个光持久等离子体光源的抛物面反射器元件的准直宽带输出组合成聚集的宽带光束。

公开(公告)号：US20150271905A1

公开(公告)日：2015-09-24

申请号：US14660849

申请日：2015-03-17

Applicant: KLA-Tencor Corporation

Inventor： Sebaek Oh ,  Anant Chimmalgi ,  Rahul Yadav ,  Matthew Derstine ,  Ilya Bezel

IPC: H05G2/00 ,  H01J65/00

CPC classification number: H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

公开(公告)号：US20150201483A1

公开(公告)日：2015-07-16

申请号：US14567546

申请日：2014-12-11

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Amir Torkaman

IPC: H05H1/24

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J61/52 ,  H01J65/04

Abstract: A plasma cell for forming light-sustained plasma includes a transmission element configured to contain a volume of gas, a first terminal flange disposed at or near an opening of the transmission element, a second terminal flange disposed at or near another opening of the transmission element, a floating flange disposed between the first or second terminal flange and the transmission element. The floating flange is movable to compensate for thermal expansion of the transmission element. Further, the floating flange is configured to enclose the internal volume of the transmission element to contain a volume of gas within the transmission element. The transmission element is configured to receive illumination from an illumination source in order to generate plasma within the volume of gas. The transmission element is transparent to a portion of the illumination from the illumination source and a portion of broadband radiation emitted by the plasma.

Abstract translation: 用于形成光持久等离子体的等离子体单元包括被配置为容纳一定体积的气体的传输元件，设置在传动元件的开口处或附近的第一端子凸缘，设置在传输元件的另一个开口处或附近的第二端子凸缘 设置在第一或第二端子凸缘与传动元件之间的浮动凸缘。 浮动凸缘可移动以补偿传动元件的热膨胀。 此外，浮动凸缘构造成包围传动元件的内部容积以容纳传动元件内的一定体积的气体。 传输元件被配置为从照明源接收照明，以在气体体积内产生等离子体。 传输元件对于来自照明源的照明的一部分和由等离子体发射的宽带辐射的一部分是透明的。

公开(公告)号：US10976025B2

公开(公告)日：2021-04-13

申请号：US15895868

申请日：2018-02-13

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer ,  Matthew Derstine ,  Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Rudolf Brunner

IPC: H01J61/52 ,  H01J61/40 ,  F21V9/06 ,  H01J61/12 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

公开(公告)号：US10887974B2

公开(公告)日：2021-01-05

申请号：US15187590

申请日：2016-06-20

Applicant: KLA-Tencor Corporation

Inventor： Matthew Derstine ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin

IPC: H05G2/00 ,  H05H1/24

Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

公开(公告)号：US10823943B2

公开(公告)日：2020-11-03

申请号：US16165842

申请日：2018-10-19

Applicant: KLA-Tencor Corporation

Inventor： Shiyu Zhang ,  Ilya Bezel

IPC: G02B17/08 ,  G03F7/20 ,  G01N21/88 ,  G01N21/21

Abstract: A plasma light source with lamp house correction is disclosed. The system may include a pump source configured to generate pump illumination. The pump illumination may be directed, by an elliptical reflector element, to a volume of gas contained within a plasma lamp in order to generate a plasma. The plasma may be configured to generate broadband illumination. The system may also include a correction plate and/or an aspherical elliptical reflector element configured to alter the pump illumination to correct for aberrations introduced by the plasma lamp. The system may also include an additional aspherical correction plate configured to alter the broadband illumination to correct for aberrations introduced by optical elements of the system.