Method of manufacturing multi-channel transistor device and multi-channel transistor device manufactured using the method
    63.
    发明授权
    Method of manufacturing multi-channel transistor device and multi-channel transistor device manufactured using the method 有权
    使用该方法制造多通道晶体管器件和多通道晶体管器件的方法

    公开(公告)号:US07655988B2

    公开(公告)日:2010-02-02

    申请号:US11241179

    申请日:2005-09-30

    IPC分类号: H01L27/088

    摘要: A multi-channel transistor device and a method of manufacturing the same are provided. The method of a manufacturing a multi-channel transistor device includes defining an active region in a semiconductor substrate by forming an isolation layer exposing an upper side portion of the active region. An active expanding region is formed on the exposed upper side portion of the active region by selective epitaxial growth (SEG). A portion of the active region is selectively etched to define first channel bars in the active expanding region that extend between first and second laterally separated portions of the active region and a second channel bar that is an unetched portion of the active region. A portion of the isolation layer is selectively removed such as to expose side portions of the second channel bar and bottom surface portions of the first channel bars. A gate is formed on the first and second channel bars with a gate dielectric layer between the gate and the channel bars. A source/drain region is formed in a region of the active expanding region adjacent to the gate, thereby resulting in a multi-channel transistor structure.

    摘要翻译: 提供了多通道晶体管器件及其制造方法。 制造多通道晶体管器件的方法包括通过形成暴露有源区的上侧部分的隔离层来限定半导体衬底中的有源区。 通过选择性外延生长(SEG)在有源区的暴露的上侧部分上形成有源扩展区。 有源区域的一部分被选择性地蚀刻以限定在有源扩展区域中的第一通道条,该有源扩展区域在有源区域的第一和第二横向分离部分之间延伸,而第二通道条是有源区的未蚀刻部分。 选择性地去除隔离层的一部分,以暴露第二通道杆的侧部和第一通道杆的底表面部分。 栅极形成在第一和第二沟道条上,栅极介电层和沟道条之间具有栅极电介质层。 源极/漏极区域形成在与栅极相邻的有源扩展区域的区域中,从而形成多沟道晶体管结构。

    Methods of forming a pattern and methods of manufacturing a memory device using the same
    68.
    发明申请
    Methods of forming a pattern and methods of manufacturing a memory device using the same 有权
    形成图案的方法和使用该图案的存储器件的制造方法

    公开(公告)号:US20080081442A1

    公开(公告)日:2008-04-03

    申请号:US11605266

    申请日:2006-11-29

    IPC分类号: H01L21/20

    摘要: In a method of forming a pattern, a sacrificial layer pattern and a stop layer pattern for preventing or reducing an epitaxial growth may be formed on a substrate. The sacrificial layer pattern may have a first hole therethrough, and the first hole partially exposes a top surface of the substrate. At least one active pattern may be formed on a bottom and a sidewall of the first hole by performing a selective epitaxial growth process on the top surface of the substrate and a sidewall of the sacrificial layer pattern. The sacrificial layer pattern and the stop layer pattern for preventing or reducing the epitaxial growth may be removed from the substrate. The at least one active pattern formed by the above method may have a finer size and an improved shaped compared to a conventional active pattern formed by directly patterning layers using a photoresist pattern. Damages in a photolithography process may be prevented or reduced from being generated.

    摘要翻译: 在形成图案的方法中,可以在基板上形成用于防止或减少外延生长的牺牲层图案和停止层图案。 牺牲层图案可以具有穿过其的第一孔,并且第一孔部分地暴露衬底的顶表面。 通过在衬底的顶表面和牺牲层图案的侧壁上执行选择性外延生长工艺,可以在第一孔的底部和侧壁上形成至少一个活性图案。 可以从衬底去除用于防止或减少外延生长的牺牲层图案和停止层图案。 与通过使用光致抗蚀剂图案直接图案化图案形成的常规有源图案相比,通过上述方法形成的至少一个有源图案可以具有更细的尺寸和改进的形状。 可以防止或减少光刻工艺中的损伤。

    Method of manufacturing multi-channel transistor device and multi-channel transistor device manufactured using the method
    69.
    发明申请
    Method of manufacturing multi-channel transistor device and multi-channel transistor device manufactured using the method 有权
    使用该方法制造多通道晶体管器件和多通道晶体管器件的方法

    公开(公告)号:US20060073662A1

    公开(公告)日:2006-04-06

    申请号:US11241179

    申请日:2005-09-30

    IPC分类号: H01L21/336

    摘要: A multi-channel transistor device and a method of manufacturing the same are provided. The method of a manufacturing a multi-channel transistor device includes defining an active region in a semiconductor substrate by forming an isolation layer exposing an upper side portion of the active region. An active expanding region is formed on the exposed upper side portion of the active region by selective epitaxial growth (SEG). A portion of the active region is selectively etched to define first channel bars in the active expanding region that extend between first and second laterally separated portions of the active region and a second channel bar that is an unetched portion of the active region. A portion of the isolation layer is selectively removed such as to expose side portions of the second channel bar and bottom surface portions of the first channel bars. A gate is formed on the first and second channel bars with a gate dielectric layer between the gate and the channel bars. A source/drain region is formed in a region of the active expanding region adjacent to the gate, thereby resulting in a multi-channel transistor structure.

    摘要翻译: 提供了多通道晶体管器件及其制造方法。 制造多通道晶体管器件的方法包括通过形成暴露有源区的上侧部分的隔离层来限定半导体衬底中的有源区。 通过选择性外延生长(SEG)在有源区的暴露的上侧部分上形成有源扩展区。 有源区域的一部分被选择性地蚀刻以限定在有源扩展区域中的第一通道条,该有源扩展区域在有源区域的第一和第二横向分离部分之间延伸,而第二通道条是有源区的未蚀刻部分。 选择性地去除隔离层的一部分,以暴露第二通道杆的侧部和第一通道杆的底表面部分。 栅极形成在第一和第二沟道条上,栅极介电层和沟道条之间具有栅极电介质层。 源极/漏极区域形成在与栅极相邻的有源扩展区域的区域中,从而形成多沟道晶体管结构。