公开(公告)号：US20070207584A1

公开(公告)日：2007-09-06

申请号：US11364334

申请日：2006-03-01

Applicant: Alok Paranjpye ,  Douglas Thompson

Inventor： Alok Paranjpye ,  Douglas Thompson

IPC: H01L21/8222

CPC classification number: B81C1/0069 ,  B81B2201/014 ,  B81C2201/018 ,  G03F7/40 ,  H01H61/04 ,  H01H2061/008

Abstract: A method for curing an epoxy-based photoresist uses a continuously varying temperature profile, to continuously raise the kinetic energy of the monomers involved in the curing process, allowing them to cross-link. By using the continuously varying temperature profile, the maximum temperature to achieve a more completely cured film is reduced, as is the total processing time. In addition, curing using the continuously varying temperature profile is a single step method, rather than a multi-step method of the prior art, significantly simplifying the process flow for producing the cured structures. The cured structures may have mechanical properties which render them suitable as functional elements of various MEMS devices, including rigid, dielectric tethers used in MEMS thermal switches, for example.

Abstract translation: 固化环氧系光致抗蚀剂的方法使用连续变化的温度分布，以连续提高参与固化过程的单体的动能，从而使它们交联。 通过使用连续变化的温度曲线，总的处理时间也减少了实现更完全固化的膜的最高温度。 此外，使用连续变化的温度分布的固化是单步法，而不是现有技术的多步法，显着简化了用于生产固化结构的工艺流程。 固化的结构可以具有机械性质，使得它们适合作为各种MEMS装置的功能元件，例如包括用于MEMS热开关的刚性介电系绳。

公开(公告)号：US20070170811A1

公开(公告)日：2007-07-26

申请号：US11334438

申请日：2006-01-19

Applicant: Paul Rubel

Inventor： Paul Rubel

IPC: H02N10/00

CPC classification number: H02N10/00 ,  F03G7/06 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

Abstract translation: MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。 在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。 加热两个相应的驱动梁使得第一段在基本上围绕锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。 通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。

公开(公告)号：US07233048B2

公开(公告)日：2007-06-19

申请号：US11211624

申请日：2005-08-26

Applicant: Kimon Rybnicek

Inventor： Kimon Rybnicek

IPC: H01L27/00 ,  H01L21/00

CPC classification number: B81C1/00301 ,  B81B2207/096 ,  H01L21/76879 ,  H01L21/76898

Abstract: A method for forming through hole vias in a substrate uses a partially exposed seed layer to plate the bottom of a blind trench formed in the front side of a substrate. Thereafter, the plating proceeds substantially uniformly from the bottom of the blind hole to the top. To form the through hole, the rear face of the substrate is ground or etched away to remove material up to and including the dead-end wall of the blind hole.

Abstract translation: 用于在衬底中形成通孔的方法使用部分暴露的种子层来平坦化形成在衬底前侧的盲沟的底部。 此后，电镀从盲孔的底部到顶部基本均匀地进行。 为了形成通孔，将基板的后表面研磨或蚀刻掉以去除直到并包括盲孔的死端壁的材料。

公开(公告)号：US07229838B2

公开(公告)日：2007-06-12

申请号：US11260367

申请日：2005-10-28

Applicant: John S. Foster ,  John C. Harley ,  Steven H. Hovey ,  Richard T. Martin ,  Hung D. Nguyen ,  Paul J. Rubel

Inventor： John S. Foster ,  John C. Harley ,  Steven H. Hovey ,  Richard T. Martin ,  Hung D. Nguyen ,  Paul J. Rubel

IPC: G01N1/10 ,  G01N21/64

CPC classification number: B01L3/502707 ,  A61M1/3633 ,  A61M1/3678 ,  B01L3/5027 ,  B01L3/50273 ,  B01L3/502761 ,  B01L2200/0647 ,  B01L2300/0864 ,  B01L2400/0484 ,  C12M47/04 ,  G01N21/6428 ,  G01N2015/0288 ,  G01N2015/149 ,  Y10T436/11 ,  Y10T436/112499 ,  Y10T436/2575

Abstract: A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.

Abstract translation: 微机械粒子分选芯片基于从感兴趣的部件发出的荧光信号的检测，使用分成两部分的致动器将感兴趣的部件引导到多个可能的出口路径中的一个。 两部分致动器可以包括力产生部分和微致动器部分。 微致动器部分可以是一次性的，而力产生部分可以是可再利用的。 通过使力产生部分靠近微致动器部分，微致动器被诱导移动，从而将感兴趣的部件与流体流的其余部分分离。 力产生部分和微致动器部分可以分开优化和制造，从而导致更快，更可靠和更便宜的颗粒分选。

公开(公告)号：US20060266692A1

公开(公告)日：2006-11-30

申请号：US11136552

申请日：2005-05-25

Applicant: John Foster ,  John Harley ,  Steven Hovey ,  Richard Martin ,  Paul Rubel ,  Hung Nguyen

Inventor： John Foster ,  John Harley ,  Steven Hovey ,  Richard Martin ,  Paul Rubel ,  Hung Nguyen

IPC: B01D63/00

CPC classification number: B01D61/14 ,  B01D63/00 ,  B01D65/08 ,  B01D67/0062 ,  B01D69/02 ,  B01D2321/2058 ,  G01N1/4077

Abstract: A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very tight tolerances in the filter barrier and gap dimensions to be maintained. Using the microfabrication techniques, the filter barriers can be made having arbitrary shapes, and arranged at an angle or curved with respect to the flow direction, making the pressure drop across the filtration stage more uniform in the cross flow direction.

Abstract translation: 微制造的交叉流过滤器可以具有多个过滤阶段。 过滤阶段可以包括微制造的过滤器屏障和在衬底中产生的间隙，从而允许保持过滤器屏障和间隙尺寸的非常严格的公差。 使用微细加工技术，过滤器屏障可以制成具有任意形状，并且以相对于流动方向成一定角度或弯曲的方式布置，使跨越过滤台的压降在横向方向上更均匀。

公开(公告)号：US07057245B2

公开(公告)日：2006-06-06

申请号：US10866123

申请日：2004-06-12

Applicant: Patrick Edward Feierabend ,  Richard Thomas Martin ,  Jeffery Frank Summers ,  Andrew Dexter Wallis ,  Paul J. Rubel ,  John Stuart Foster ,  John W Stocker

Inventor： Patrick Edward Feierabend ,  Richard Thomas Martin ,  Jeffery Frank Summers ,  Andrew Dexter Wallis ,  Paul J. Rubel ,  John Stuart Foster ,  John W Stocker

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract translation: 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

公开(公告)号：US11305982B2

公开(公告)日：2022-04-19

申请号：US16515943

申请日：2019-07-18

Applicant: Innovative Micro Technology

Inventor： Christopher S. Gudeman ,  Paul Rubel

IPC: H02K3/00 ,  B81B3/00

Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.

公开(公告)号：US10804850B2

公开(公告)日：2020-10-13

申请号：US16104146

申请日：2018-08-17

Applicant: Innovative Micro Technology

Inventor： Christopher S. Gudeman ,  Abbaspour Tamijani

IPC: H03B9/14 ,  H01L47/02 ,  H03B7/14 ,  G01H13/00 ,  H03B5/18 ,  H03B7/06 ,  G01N22/00 ,  H03B9/12

Abstract: Systems and methods for forming a compact gas sensor include using a lithographically fabricated high Q resonator coupled to at least one of a Gunn diode and an IMPATT diode. The resonator may include a plurality of cavities filled with a sample gas. A detector coupled to the resonator may measure the amplitude of the emitted mm wave radiation.

公开(公告)号：US20190304794A1

公开(公告)日：2019-10-03

申请号：US16369140

申请日：2019-03-29

Applicant: Innovative Micro Technology

Inventor： Tao Gilbert ,  Sangwoo Kim

IPC: H01L21/308 ,  H01L33/58 ,  H01L31/0232

Abstract: The method described here uses gray scale lithography to form curve surfaces in photoresist. These surfaces can be of arbitrary shape since the remaining resist following exposure and develop is dependent on the exposure dose, which is controlled precisely by the opacity of the photo-mask. The process may include a silicon etch step, followed by a photoresist etch step to form an etching cycle. Each etch cycle may form a pair of substantially orthogonal stepped surfaces, with a characteristic “rise” and “run.”

公开(公告)号：US20190137611A1

公开(公告)日：2019-05-09

申请号：US16164802

申请日：2018-10-19

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN

IPC: G01S7/481 ,  G02B27/09 ,  G01S17/89 ,  G01S17/42

Abstract: We describe here a scanning optical beam that is comprised of no moving parts The device includes a plurality of microfabricated beam shaping elements disposed in an array wherein each microfabricated beam shaping element is registered with a microfabricated light source but has an optical axis that is offset from the optical axis of the light source by a different amount, wherein the amount is a function of the distance from a center of the arrays. A method of operating the scanning optical beam is also described.