公开(公告)号：US07057245B2

公开(公告)日：2006-06-06

申请号：US10866123

申请日：2004-06-12

Applicant: Patrick Edward Feierabend ,  Richard Thomas Martin ,  Jeffery Frank Summers ,  Andrew Dexter Wallis ,  Paul J. Rubel ,  John Stuart Foster ,  John W Stocker

Inventor： Patrick Edward Feierabend ,  Richard Thomas Martin ,  Jeffery Frank Summers ,  Andrew Dexter Wallis ,  Paul J. Rubel ,  John Stuart Foster ,  John W Stocker

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract translation: 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

公开(公告)号：US06593749B2

公开(公告)日：2003-07-15

申请号：US09873076

申请日：2001-05-31

Applicant: John Stuart Foster ,  Patrick Edward Feierabend ,  Michael James Shillinger

Inventor： John Stuart Foster ,  Patrick Edward Feierabend ,  Michael James Shillinger

IPC: G01R3108

CPC classification number: G01H9/00

Abstract: Pressurized fluid from a nozzle is applied against the movable member of a micromechanical device, in order to measure the mechanical properties of the device. The technique is non-destructive, non-invasive, can be applied at the wafer, row or die level, and at early or intermediate stages of fabrication.

公开(公告)号：US06831380B2

公开(公告)日：2004-12-14

申请号：US09764919

申请日：2001-01-17

Applicant: Tara Jean Rybnicek ,  John Wesley Stocker ,  Jeffery Frank Summers ,  John Stuart Foster ,  Richard Thomas Martin ,  Paul John Rubel ,  Patrick Edward Feierabend

Inventor： Tara Jean Rybnicek ,  John Wesley Stocker ,  Jeffery Frank Summers ,  John Stuart Foster ,  Richard Thomas Martin ,  Paul John Rubel ,  Patrick Edward Feierabend

IPC: H02K3316

CPC classification number: H01H50/005 ,  G02B26/02 ,  H01F7/124 ,  H01F7/13 ,  H01F7/1638 ,  H01H3/60 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2001/0078 ,  Y10S310/06

Abstract: A surface micromachined micromagnetic actuator is described, wherein rotary actuation is accomplished by a member pivotably mounted on the surface of the substrate. Angular motion of the member about the pivot point is imparted by the interaction of a magnetic tab affixed to the member, with flux generated in the gap of an electromagnetic core. Rotary motion is restricted to less than 360 degrees by using an integrally formed hinge between the pivoting member and the pivot point, rather than by a more complex bearing. By virtue of this design, a large range of motion can be achieved without requiring a true bearing to be fabricated in the device. The pivoting member is also constrained in either of two stable positions upon de-energization of the electromagnetic core, by the attachment of a bistable spring between the pivoting member and the substrate.

Abstract translation: 描述了一种表面微加工微磁致动器，其中旋转致动由可枢转地安装在基板表面上的部件实现。 构件围绕枢转点的角运动通过固定到构件的磁性凸片与在电磁芯的间隙中产生的磁通的相互作用来赋予。 通过在枢转构件和枢转点之间使用整体形成的铰链而不是由更复杂的轴承来将旋转运动限制在小于360度。 凭借这种设计，可以实现大范围的运动，而不需要在装置中制造真正的轴承。 通过将双稳态弹簧连接在枢转构件和基底之间，枢转构件也在电磁芯的断电时被限制在两个稳定位置中的任一个中。

公开(公告)号：US06812061B1

公开(公告)日：2004-11-02

申请号：US09764913

申请日：2001-01-17

Applicant: Patrick Edward Feierabend ,  Richard Thomas Martin ,  Jeffery Frank Summers ,  Andrew Dexter Wallis ,  Paul J. Rubel ,  John Stuart Foster ,  John W Stocker

Inventor： Patrick Edward Feierabend ,  Richard Thomas Martin ,  Jeffery Frank Summers ,  Andrew Dexter Wallis ,  Paul J. Rubel ,  John Stuart Foster ,  John W Stocker

IPC: H01L2144

CPC classification number: B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract translation: 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。