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    MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION
    1.
    发明申请
    MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION 有权

    公开(公告)号：US20210202196A1

    公开(公告)日：2021-07-01

    申请号：US17200954

    申请日：2021-03-15

    Applicant: Innovative Micro Technology

    Inventor： Christopher S. GUDEMAN ,  Marin SIGURDSON

    IPC: H01H50/00 ,  H01H50/54 ,  H01H50/64 ,  H01H50/36 ,  H01H49/00

    Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.

    SHIELDED DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE
    3.
    发明申请
    SHIELDED DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE 审中-公开

    公开(公告)号：US20190333728A1

    公开(公告)日：2019-10-31

    申请号：US16392662

    申请日：2019-04-24

    Applicant: Innovative Micro Technology

    Inventor： Christopher S. GUDEMAN ,  Paul J. RUBEL

    IPC: H01H59/00 ,  B81C1/00

    Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. The second substrate may have semiconductor integrated circuits formed thereon. The second substrate may also have a shielding layer formed thereon, such as to improve the impedance characteristics of the device.

    DEVICE WITH SEPARATION LIMITING STANDOFF
    7.
    发明申请
    DEVICE WITH SEPARATION LIMITING STANDOFF 审中-公开
    具有分离限制的设备

    公开(公告)号：US20170062165A1

    公开(公告)日：2017-03-02

    申请号：US15232871

    申请日：2016-08-10

    Applicant: Innovative Micro Technology

    Inventor： Christopher S. GUDEMAN ,  Paul J. RUBEL

    IPC: H01H59/00

    CPC classification number: H01H59/0009 ,  H01H2059/0072

    Abstract: An MEMS device, having two substantially parallel surfaces are separated by an initial distance. At least one of the surfaces includes a raised feature that limits the gap between the surfaces to less than the initial distance when an actuating voltage is applied. In some embodiments, the raised feature limits the gap to about 66% of the initial distance.

    Abstract translation: 具有两个基本上平行的表面的MEMS器件被分开初始距离。 至少一个表面包括凸起特征，其在施加致动电压时将表面之间的间隙限制为小于初始距离。 在一些实施例中，凸起特征将间隙限制为初始距离的约66％。

    SCANNING OPTICAL BEAM SOURCE
    8.
    发明申请
    SCANNING OPTICAL BEAM SOURCE 审中-公开

    公开(公告)号：US20190137611A1

    公开(公告)日：2019-05-09

    申请号：US16164802

    申请日：2018-10-19

    Applicant: Innovative Micro Technology

    Inventor： Christopher S. GUDEMAN

    IPC: G01S7/481 ,  G02B27/09 ,  G01S17/89 ,  G01S17/42

    Abstract: We describe here a scanning optical beam that is comprised of no moving parts The device includes a plurality of microfabricated beam shaping elements disposed in an array wherein each microfabricated beam shaping element is registered with a microfabricated light source but has an optical axis that is offset from the optical axis of the light source by a different amount, wherein the amount is a function of the distance from a center of the arrays. A method of operating the scanning optical beam is also described.

    MICROFABRICATED FIBER OPTIC PLATFORM
    9.
    发明申请
    MICROFABRICATED FIBER OPTIC PLATFORM 审中-公开

    公开(公告)号：US20180335575A1

    公开(公告)日：2018-11-22

    申请号：US15974516

    申请日：2018-05-08

    Applicant: Innovative Micro Technology

    Inventor： Christopher S. GUDEMAN

    IPC: G02B6/36 ,  G02B6/44 ,  G02B6/35 ,  H01S5/00 ,  H01S5/183

    CPC classification number: G02B6/3652 ,  G02B6/3596 ,  G02B6/3608 ,  G02B6/4471 ,  H01S5/0064 ,  H01S5/18366

    Abstract: Described here is a platform for supporting a fiber optic cable. The platform may be made on a silicon wafer using silicon lithographic processing techniques. The platform may include a substrate having a top planar surface; a trench formed in the substrate in the top planar surface and dimensioned to accept a fiber optic cable carrying radiation; and a reflecting surface formed in the top planar surface, wherein this reflecting surface is configured to reflect the radiation by total internal reflection, wherein the reflecting surface is configured to direct radiation travelling in a first direction into a second direction, substantially orthogonal to the first direction.

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