公开(公告)号：US11594389B2

公开(公告)日：2023-02-28

申请号：US17200954

申请日：2021-03-15

Applicant: Innovative Micro Technology

Inventor： Christopher S Gudeman ,  Marin Sigurdson

IPC: H01H50/00 ,  H01H50/54 ,  H01H49/00 ,  H01H50/36 ,  H01H50/64

Abstract: Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the contacts. The switch may generally be closed, with the shunt bar resting on the contacts. However, a magnetically permeable material may also be inlaid into the movable plate. The switch may then be opened by placing either a permanent magnet or an electromagnet in proximity to the switch.

公开(公告)号：US20160268084A1

公开(公告)日：2016-09-15

申请号：US15060630

申请日：2016-03-04

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Paul J. RUBEL ,  Marin Sigurdson

IPC: H01H59/00 ,  B81C1/00 ,  H01H49/00 ,  B81B7/00

CPC classification number: H01H59/0009 ,  B81B7/00 ,  B81B2201/012 ,  B81C1/00341 ,  H01H49/00 ,  H01H2001/0084

Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.

Abstract translation: 用于形成静电MEMS开关的系统和方法包括在第一基板上形成可移动的悬臂梁，在第二基板上形成电触点，并且使用气密密封来连接两个基板。 可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。 可以通过蚀刻SOI衬底的器件层中的周边形状来形成悬臂梁。 可移动梁中可能形成一个额外的空隙，使其由于附加的空隙而围绕另外的铰链线弯曲。 这可以给出光束并切换有利的运动特性。

公开(公告)号：US09953787B2

公开(公告)日：2018-04-24

申请号：US15060630

申请日：2016-03-04

Applicant: Innovative Micro Technology

Inventor： Christopher S. Gudeman ,  Paul J. Rubel ,  Marin Sigurdson

IPC: H01H59/00 ,  B81B7/00 ,  B81C1/00 ,  H01H49/00 ,  H01H1/00

CPC classification number: H01H59/0009 ,  B81B7/00 ,  B81B2201/012 ,  B81C1/00341 ,  H01H49/00 ,  H01H2001/0084

Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.

公开(公告)号：US20180079640A1

公开(公告)日：2018-03-22

申请号：US15700179

申请日：2017-09-11

Applicant: Innovative Micro Technology

Inventor： Christopher S. GUDEMAN ,  Marin Sigurdson

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00

CPC classification number: B81B3/0013 ,  B81B3/0086 ,  B81B7/0006 ,  B81B7/008 ,  B81C1/00206 ,  B81C1/00936 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2001/0078

Abstract: Systems and methods for forming an electrostatic MEMS switch that is used to switch a source of current or voltage. At least one surface of the MEMS switch may be rotated on approach to another substrate, such that when the surfaces are separated, the forces are shearing forces rather than static frictional forces.