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公开(公告)号：US11305982B2
公开(公告)日：2022-04-19
申请号：US16515943
申请日：2019-07-18
Applicant: Innovative Micro Technology
Inventor： Christopher S. Gudeman , Paul Rubel
Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.
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