GRAPHENE GROWTH ON SIDEWALLS OF PATTERNED SUBSTRATE
    53.
    发明申请
    GRAPHENE GROWTH ON SIDEWALLS OF PATTERNED SUBSTRATE 审中-公开
    石墨基底上的石墨生长

    公开(公告)号:US20150376778A1

    公开(公告)日:2015-12-31

    申请号:US14765258

    申请日:2014-02-01

    申请人: SOLAN, LLC

    发明人: Mark Alan Davis

    摘要: A method for forming a graphite-based structure comprises patterning a substrate thereby forming a plurality of elements, each respective element in the plurality of elements separated from an adjacent element by a corresponding trench in a plurality of trenches on the substrate. A first element in the plurality of elements has a first surface. A first trench in the plurality of trenches separates the first element from an adjacent element in the plurality of elements, and the first trench has a second surface. The first surface and the second surface are separated by a first side wall of the first element. The method further comprises creating a graphene initiating layer on the first side wall of the first element. The method also comprises generating graphene using the graphene initiating layer thereby forming the graphite-based structure.

    摘要翻译: 一种用于形成石墨基结构的方法,包括使衬底形成图案,从而形成多个元件,多个元件中的每个元件通过衬底上的多个沟槽中的相应沟槽与相邻元件分离。 多个元件中的第一元件具有第一表面。 多个沟槽中的第一沟槽将第一元件与多个元件中的相邻元件分开,并且第一沟槽具有第二表面。 第一表面和第二表面由第一元件的第一侧壁分开。 该方法还包括在第一元件的第一侧壁上创建石墨烯起始层。 该方法还包括使用石墨烯起始层产生石墨烯,从而形成基于石墨的结构。

    Method of fabricating nitride semiconductor light emitting device
    57.
    发明授权
    Method of fabricating nitride semiconductor light emitting device 有权
    制造氮化物半导体发光器件的方法

    公开(公告)号:US09209349B2

    公开(公告)日:2015-12-08

    申请号:US14184171

    申请日:2014-02-19

    摘要: A method of fabricating a nitride semiconductor light emitting device is provided. The method includes growing a first group-III-nitride semiconductor layer on a substrate, the first group-III-nitride semiconductor layer having a top surface formed as a group-III-rich surface exhibiting a group-III-polarity and a bottom surface formed as a N-rich surface exhibiting a N-polarity. The method further includes selectively etching a N-polarity region in the top surface of the first group III nitride semiconductor layer, forming a second group III nitride semiconductor layer on the first group III nitride semiconductor layer to fill the etched N-polarity region and forming a light emitting structure including first and second conductivity type nitride semiconductor layers and an active layer on the second group III nitride semiconductor layer.

    摘要翻译: 提供一种制造氮化物半导体发光器件的方法。 该方法包括在衬底上生长第一III族氮化物半导体层,第一III族氮化物半导体层具有形成为具有III族极性的III族富集表面的顶表面和底表面 形成为呈现N极性的富N的表面。 该方法还包括选择性地蚀刻第一III族氮化物半导体层的顶表面中的N极区域,在第一III族氮化物半导体层上形成第二III族氮化物半导体层以填充蚀刻的N极区域并形成 包括第一和第二导电型氮化物半导体层的发光结构和在第二III族氮化物半导体层上的有源层。