公开(公告)号：US20150048815A1

公开(公告)日：2015-02-19

申请号：US14460161

申请日：2014-08-14

Applicant: FEI Company

Inventor： Paul Johannes L. Barends ,  Mathijs P.W. van den Boogaard ,  Philip Brundage

IPC: G01R1/067

CPC classification number: G01R1/06705 ,  H01J37/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/24564 ,  H01J2237/24592

Abstract: A probe assembly can be connected and disconnected from its electrical harness within a vacuum chamber so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.

Abstract translation: 探针组件可以在真空室内与其电气线束连接和断开，从而安装工件的探头组件可以旋转和倾斜而不受电缆干扰，然后可以重新连接而不打开真空室。 还描述了当探针组件与其电气线束断开连接时，将样品和探针接地的手段，以及通过确保探头在操作过程中不会粘住太远的手段来防止探针机构和探针本身的损坏。

公开(公告)号：US08819926B2

公开(公告)日：2014-09-02

申请号：US13366316

申请日：2012-02-04

Applicant: Mehdi M Yazdanpanah ,  Romaneh Jalilian

Inventor： Mehdi M Yazdanpanah ,  Romaneh Jalilian

IPC: H01R43/00

CPC classification number: H05K3/222 ,  G01N35/10 ,  H01J2237/208 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01L21/76892 ,  H05K2201/0248 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49718 ,  Y10T29/49721 ,  Y10T29/49726 ,  Y10T29/4973

Abstract: Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.

Abstract translation: 本发明的实施例提供了在控制环境（例如聚焦离子束的真空室）中恢复附接到操纵器的探针的方法和装置，而不需要打开真空室。 本发明的另一个实施方案教导了在FIB真空室内的纳米针阵列中构造和应用各种形状的纳摩耳。 在另一个实施例中，本发明通过使用包含在相同受控空间中的纳米针阵列（作为纳米线供应）的纳米针通过再纳米布线来教导完成的和氧化物涂覆的电路板的编辑和校正。 在该实施例中，纳米针阵列中的单个纳米针由操纵器操纵并且以这样的方式放置以在期望的点之间进行电接触。

公开(公告)号：US08766214B2

公开(公告)日：2014-07-01

申请号：US13919656

申请日：2013-06-17

Applicant: FEI Company

Inventor： Brian Roberts Routh, Jr. ,  Peter Christiaan Tiemeijer ,  Bart Jozef Janssen ,  Thomas G. Miller ,  David Foord ,  Ivan Lazić

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/295

CPC classification number: H01J37/28 ,  B82Y35/00 ,  G01Q10/04 ,  H01J37/26 ,  H01J37/295 ,  H01J37/3056 ,  H01J2237/2067 ,  H01J2237/208 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2611 ,  H01J2237/2614 ,  H01J2237/31749

Abstract: The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. The method comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychographic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.

Abstract translation: 本发明涉及使用装备有电子柱和离子束柱的粒子光学装置，相机系统，机械手来制备和成像样品的方法。 该方法包括以下步骤：从第一电子图像导出样本的第一ptychographic图像，使样本变薄，并形成样品的第二ptychographic图像。 在本发明的实施例中，用于第二图像的种子图像是第一图像图像。 在另一个实施例中，第二ptychographic图像是在稀化期间去除的层的图像。 在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。

公开(公告)号：US08754664B2

公开(公告)日：2014-06-17

申请号：US13810512

申请日：2011-07-27

Applicant: Yasuhiko Nara ,  Tohru Ando

Inventor： Yasuhiko Nara ,  Tohru Ando

IPC: G01R1/26 ,  G01R31/28

CPC classification number: G01R31/2887 ,  G01R31/2891 ,  G01R31/307 ,  G01R31/311 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/20221 ,  H01J2237/208 ,  H01J2237/24564 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the electrical characteristics of the inspection object. A high-quality, high-magnification first image including an image of a target position in the inspection object on a sample is acquired. Next, a low-quality, low-magnification second image including the image of the target position in the inspection object on the sample and probe images is acquired. Next, data on the first image is built into the second image to generate an image for coarse-access observation which is the same in magnification as the second image. The generation of the image for coarse-access observation is repeated until a probe comes close to the target position in the inspection object.

Abstract translation: 当测量检查对象的电气特性而不影响检查对象的电气特性时，可实现SEM图像的高放大倍数，高分辨率和实时性。 获取包括样本中的检查对象中的目标位置的图像的高质量，高倍率的第一图像。 接下来，获取包括样本上的检查对象中的目标位置的图像和探测图像的低质量，低倍率的第二图像。 接下来，将第一图像上的数据内置到第二图像中，以生成与第二图像放大率相同的粗略观察的图像。 重复进行用于粗略观察的图像的生成，直到探针接近检查对象中的目标位置。

公开(公告)号：US08723144B2

公开(公告)日：2014-05-13

申请号：US11119230

申请日：2005-04-28

Applicant: Eitan Kidron ,  Dror Shemesh

Inventor： Eitan Kidron ,  Dror Shemesh

IPC: H01J37/08

CPC classification number: G01N1/32 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An apparatus is disclosed for forming a sample of an object, extracting the sample from the object, and subjecting this sample to microanalysis including surface analysis and electron transparency analysis in a vacuum chamber. In some embodiments, a means is provided for imaging an object cross section surface of an extracted sample. Optionally, the sample is iteratively thinned and imaged within the vacuum chamber. In some embodiments, the sample is situated on a sample support including an optional aperture. Optionally, the sample is situated on a surface of the sample support such that the object cross section surface is substantially parallel to the surface of the sample support. Once mounted on the sample support, the sample is either subjected to microanalysis in the vacuum chamber, or loaded onto a loading station. In some embodiments, the sample is imaged with an electron beam substantially normally incident to the object cross section surface.

Abstract translation: 公开了一种用于形成物体样品的装置，从物体中提取样品，并对该样品进行微量分析，包括真空室中的表面分析和电子透过度分析。 在一些实施例中，提供了用于对提取的样品的物体横截面进行成像的装置。 任选地，将样品迭代地稀释并在真空室内成像。 在一些实施例中，样品位于包括任选孔的样品支架上。 可选地，样品位于样品载体的表面上，使得物体横截面基本上平行于样品载体的表面。 一旦安装在样品支架上，样品就可以在真空室中进行微量分析，或者加载到装载站上。 在一些实施例中，用基本上正常地入射到物体横截面表面的电子束成像样品。

公开(公告)号：US20130140459A1

公开(公告)日：2013-06-06

申请号：US13309425

申请日：2011-12-01

Applicant: Simon Galloway

Inventor： Simon Galloway

IPC: H01J37/26

CPC classification number: G01N1/06 ,  G01N2001/068 ,  H01J37/02 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2445 ,  H01J2237/2611 ,  H01J2237/2808 ,  H01J2237/31749

Abstract: A system is disclosed for obtaining layered cathodoluminescence images of a sample wherein the light collecting equipment is highly efficient and wherein the microtoming or Focused Ion Beam equipment does not interfere with the efficiency of the light collecting equipment and wherein the position of the sample with respect to the light collecting equipment is not disturbed in the microtoming or ion beam milling process. Embodiments are disclosed allowing simultaneous collection of cathodoluminescence images and collection of other electron based imaging signals such as backscattered and secondary electrons.

Abstract translation: 公开了一种用于获得样品的层状阴极发光图像的系统，其中所述光收集设备是高效的，并且其中所述切片或聚焦离子束设备不干扰所述光收集设备的效率，并且其中所述样品相对于 在切片或离子束研磨过程中，光收集设备不受干扰。 公开了实施例，允许阴离子发光图像的同时收集和其他基于电子的成像信号（例如背散射和二次电子）的收集。

公开(公告)号：US20130112871A1

公开(公告)日：2013-05-09

申请号：US13810512

申请日：2011-07-27

Applicant: Yasuhiko Nara ,  Tohru Ando

Inventor： Yasuhiko Nara ,  Tohru Ando

IPC: H01J37/26

CPC classification number: G01R31/2887 ,  G01R31/2891 ,  G01R31/307 ,  G01R31/311 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/20221 ,  H01J2237/208 ,  H01J2237/24564 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the electrical characteristics of the inspection object. A high-quality, high-magnification first image including an image of a target position in the inspection object on a sample is acquired. Next, a low-quality, low-magnification second image including the image of the target position in the inspection object on the sample and probe images is acquired. Next, data on the first image is built into the second image to generate an image for coarse-access observation which is the same in magnification as the second image. The generation of the image for coarse-access observation is repeated until a probe comes close to the target position in the inspection object.

Abstract translation: 当测量检查对象的电气特性而不影响检查对象的电气特性时，可实现SEM图像的高放大倍数，高分辨率和实时性。 获取包括样本中的检查对象中的目标位置的图像的高质量，高倍率的第一图像。 接下来，获取包括样本上的检查对象中的目标位置的图像和探测图像的低质量，低倍率的第二图像。 接下来，将第一图像上的数据内置到第二图像中，以生成与第二图像放大率相同的粗略观察的图像。 重复进行用于粗略观察的图像的生成，直到探针接近检查对象中的目标位置。

公开(公告)号：US20120286175A1

公开(公告)日：2012-11-15

申请号：US13468926

申请日：2012-05-10

Applicant: Andrew Nicholas Searle ,  Simon Andrew Galloway ,  Klaus Leifer

Inventor： Andrew Nicholas Searle ,  Simon Andrew Galloway ,  Klaus Leifer

IPC: G01N1/08 ,  G21K5/00

CPC classification number: G01N1/42 ,  G02B21/32 ,  H01J37/20 ,  H01J2237/208 ,  H01J2237/31749

Abstract: The disclosed apparatus enables attachment to a sample to be excised from a frozen bulk sample, the transfer of the excised sample from the bulk sample to a separate cooled support structure by means of a manipulator tip that can be cooled and maintained at a temperature below that of vitreous ice and which provides both an active cooling path and cryogenic shielding to maintain the temperature of the excised sample below that of vitreous ice. The cryogenic shielding also helps minimize contamination of the cooled sample by condensation of volatile material. A method is disclosed for extracting a portion of a frozen sample, comprising attaching a thermally-isolated cooled manipulator tip to the sample with vapor deposition and removing a portion of the sample affixed to the tip without changing phase of the portion of the sample being removed, with a focused ion beam.

Abstract translation: 所公开的装置使得能够将附着到从冷冻大块样品中切除的样品，通过可以冷却并保持在低于该温度的温度的机械手尖端将切出的样品从大量样品转移到单独的冷却的支撑结构 的玻璃冰，并且其提供主动冷却路径和低温屏蔽，以将切除的样品的温度维持在玻璃冰的温度以下。 低温屏蔽还有助于通过挥发性物质的冷凝来最小化冷却样品的污染。 公开了一种用于提取冷冻样品的一部分的方法，包括通过气相沉积将热隔离的冷却的操纵器尖端附着到样品上，并且移除固定在尖端上的样品的一部分，而不改变被去除的样品部分的相位 ，聚焦离子束。

公开(公告)号：US20120241607A1

公开(公告)日：2012-09-27

申请号：US13439296

申请日：2012-04-04

Applicant: Arijit Bose ,  Anubhav Tripathi ,  Jinkee Lee

Inventor： Arijit Bose ,  Anubhav Tripathi ,  Jinkee Lee

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/208 ,  H01J2237/2802

Abstract: A method and system is provided for automatically preparing transmission electron microscopy (TEM) samples for examination by depositing extremely small samples onto a grid without need for a blotting step. A sample liquid droplet is formed at the end of a capillary, wherein a portion of the liquid is transferred to the TEM sample grid by contact. The excess volume in the liquid droplet is then retracted by an adjacent capillary. After a predetermined time interval, the retraction capillary is moved toward the drop of the sample to remove the excess volume. As compared to a conventional machine, where the blotting procedure can deform the structure of the molecule of interest, the present invention utilizes a very low shear rate for removal of the excess sample fluid.

Abstract translation: 提供了一种方法和系统，用于通过将非常小的样品沉积到网格上而无需印迹步骤，自动制备透射电子显微镜（TEM）样品进行检查。 在毛细管末端形成一个样品液滴，其中一部分液体通过接触转移到TEM样品网格。 液滴中的过剩体积然后被相邻的毛细管缩回。 在预定时间间隔之后，使收缩毛细管朝向样品的液滴移动以除去过量的体积。 与常规机器相比，其中印迹方法可能使感兴趣的分子的结构变形，本发明利用非常低的剪切速率去除多余的样品流体。

公开(公告)号：US08198603B2

公开(公告)日：2012-06-12

申请号：US12290397

申请日：2008-10-29

Applicant: Haruo Takahashi ,  Ikuko Nakatani ,  Junichi Tashiro

Inventor： Haruo Takahashi ,  Ikuko Nakatani ,  Junichi Tashiro

IPC: H01J37/20 ,  G21K5/10 ,  G01N1/28

CPC classification number: H01J37/20 ,  H01J37/023 ,  H01J37/3056 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/2062 ,  H01J2237/208 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A sample preparing device has a sample stage that supports a sample and undergoes rotation about a first rotation axis to bring a preselected direction of the sample piece into coincidence with an intersection line between a first plane formed by a surface of the sample piece and a second plane. A manipulator holds sample piece of the sample and undergoes rotation about a second rotation axis independently of the sample stage to rotate the sample piece to a preselected position in the state in which the preselected direction of the sample piece coincides with the intersection line. The manipulator is disposed relative to the sample stage so that an angle between the second rotation axis and the surface of the sample is in the range of 0° to 45°. The second plane corresponds to a plane obtained by rotating around the second rotation axis a line segment which is vertical to the surface of the sample and of which one end corresponds to an intersection between the surface of the sample and the second rotation axis.

Abstract translation: 样品制备装置具有样品台，其支撑样品并围绕第一旋转轴线旋转以使样品片的预选方向与由样品片的表面形成的第一平面和第二面之间的交线相符， 飞机 操纵器保持样品的样品并且独立于样品台绕第二旋转轴旋转，以在样品的预选方向与交叉线重合的状态下将样品片旋转到预选位置。 操纵器相对于样品台设置，使得第二旋转轴与样品表面之间的角度在0°至45°的范围内。 第二平面对应于通过围绕第二旋转轴旋转垂直于样品表面的线段并且其一端对应于样品表面和第二旋转轴线之间的交叉而获得的平面。