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    Sample preparing device and sample posture shifting method
    1.
    发明授权
    Sample preparing device and sample posture shifting method 有权
    样品制备装置和样品姿态转换方法

    公开(公告)号：US08198603B2

    公开(公告)日：2012-06-12

    申请号：US12290397

    申请日：2008-10-29

    Applicant: Haruo Takahashi ,  Ikuko Nakatani ,  Junichi Tashiro

    Inventor： Haruo Takahashi ,  Ikuko Nakatani ,  Junichi Tashiro

    IPC: H01J37/20 ,  G21K5/10 ,  G01N1/28

    CPC classification number: H01J37/20 ,  H01J37/023 ,  H01J37/3056 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/2062 ,  H01J2237/208 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A sample preparing device has a sample stage that supports a sample and undergoes rotation about a first rotation axis to bring a preselected direction of the sample piece into coincidence with an intersection line between a first plane formed by a surface of the sample piece and a second plane. A manipulator holds sample piece of the sample and undergoes rotation about a second rotation axis independently of the sample stage to rotate the sample piece to a preselected position in the state in which the preselected direction of the sample piece coincides with the intersection line. The manipulator is disposed relative to the sample stage so that an angle between the second rotation axis and the surface of the sample is in the range of 0° to 45°. The second plane corresponds to a plane obtained by rotating around the second rotation axis a line segment which is vertical to the surface of the sample and of which one end corresponds to an intersection between the surface of the sample and the second rotation axis.

    Abstract translation: 样品制备装置具有样品台，其支撑样品并围绕第一旋转轴线旋转以使样品片的预选方向与由样品片的表面形成的第一平面和第二面之间的交线相符， 飞机 操纵器保持样品的样品并且独立于样品台绕第二旋转轴旋转，以在样品的预选方向与交叉线重合的状态下将样品片旋转到预选位置。 操纵器相对于样品台设置，使得第二旋转轴与样品表面之间的角度在0°至45°的范围内。 第二平面对应于通过围绕第二旋转轴旋转垂直于样品表面的线段并且其一端对应于样品表面和第二旋转轴线之间的交叉而获得的平面。

    Apparatus for working and observing samples and method of working and observing cross sections
    3.
    发明授权
    Apparatus for working and observing samples and method of working and observing cross sections 有权
    用于工作和观察样品的装置和工作和观察截面的方法

    公开(公告)号：US07755044B2

    公开(公告)日：2010-07-13

    申请号：US12047013

    申请日：2008-03-12

    Applicant: Toshiaki Fujii ,  Haruo Takahashi ,  Junichi Tashiro

    Inventor： Toshiaki Fujii ,  Haruo Takahashi ,  Junichi Tashiro

    IPC: G21K5/04 ,  G21K5/10

    CPC classification number: H01J37/3056 ,  G01N1/286 ,  H01J2237/31745

    Abstract: The apparatus for working and observing samples comprises a sample plate on which a sample is to be placed; a first ion beam lens barrel capable of irradiating a first ion beam over a whole predetermined irradiation range at one time; a mask that can be arranged between the sample plate and the first ion beam lens barrel, and shields part of the first ion beam; mask-moving means capable of moving the mask; a charged particle beam lens barrel capable of scanning a focused beam of charged particles in the range irradiated with the first ion beam; and detection means capable of detecting a secondarily generated substance.

    Abstract translation: 用于工作和观察样品的装置包括样品板，样品板将放置在样品板上; 一次能够在整个预定照射范围内照射第一离子束的第一离子束透镜镜筒; 可以在样品板和第一离子束透镜筒之间布置的掩模，并且屏蔽第一离子束的一部分; 掩模移动装置，能够移动面罩; 带电粒子束透镜镜筒，其能够扫描在第一离子束照射的范围内的聚集的带电粒子束; 以及能够检测次要生成物质的检测装置。

    Composite charged-particle beam system
    4.
    发明授权
    Composite charged-particle beam system 有权
    复合带电粒子束系统

    公开(公告)号：US07718981B2

    公开(公告)日：2010-05-18

    申请号：US12134919

    申请日：2008-06-06

    Applicant: Haruo Takahashi ,  Yo Yamamoto ,  Toshiaki Fujii

    Inventor： Haruo Takahashi ,  Yo Yamamoto ,  Toshiaki Fujii

    IPC: G01N23/00

    CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/20242 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.

    Abstract translation: 提供了一种作为复合带电粒子束系统布置气体离子束装置，FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1，SEM透镜镜筒2，气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中，使得聚焦离子束4，电子束5和气体离子束6在单点相交，FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交，并且FIB透镜镜筒1的轴线，气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上

    COMPOSITE CHARGED-PARTICLE BEAM SYSTEM
    6.
    发明申请
    COMPOSITE CHARGED-PARTICLE BEAM SYSTEM 有权
    复合充电粒子束系统

    公开(公告)号：US20080315088A1

    公开(公告)日：2008-12-25

    申请号：US12134919

    申请日：2008-06-06

    Applicant: Haruo Takahashi ,  Yo YAMAMOTO ,  Toshiaki FUJII

    Inventor： Haruo Takahashi ,  Yo YAMAMOTO ,  Toshiaki FUJII

    IPC: G01N23/00

    CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/20242 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.

    Abstract translation: 提供了一种作为复合带电粒子束系统布置气体离子束装置，FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1，SEM透镜镜筒2，气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中，使得聚焦离子束4，电子束5和气体离子束6在单点相交，FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交，并且FIB透镜镜筒1的轴线，气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上

    Charged particle beam apparatus
    9.
    发明申请
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US20070045560A1

    公开(公告)日：2007-03-01

    申请号：US11509520

    申请日：2006-08-24

    Applicant: Haruo Takahashi ,  Toshiaki Fujii ,  Yutaka Ikku ,  Kouji Iwasaki ,  Yo Yamamoto

    Inventor： Haruo Takahashi ,  Toshiaki Fujii ,  Yutaka Ikku ,  Kouji Iwasaki ,  Yo Yamamoto

    IPC: H01J37/20 ,  G01N1/28

    CPC classification number: H01J37/304 ,  G01N1/32 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto a surface of the sliced specimen, a specimen stage on which the sliced specimen is fixed and having at least one or more rotation axis, a specimen posture recognition means recognizing positional relation of the sliced specimen with respect to the specimen stage and a specimen stage control means controlling the specimen stage based on a specimen posture recognized by the posture recognition means and an installation angle of the gas-ion beam irradiation apparatus in order to allow an incident angle of the gas-ion beam with respect to the obverse or the reverse of the sliced specimen to be a desired value.

    Abstract translation: 为了包括聚焦离子束装置，通过加工试样和观察切片试样来制造切片样品，观察切片试样的扫描电子显微镜，气相离子束照射装置，通过将气体离子束照射到 切片试样的表面，切片试样固定并具有至少一个以上的旋转轴的试样台，识别切片试样相对于试样台的位置关系的试样姿势识别装置和试样台控制 意味着基于由姿势识别装置识别的样本姿势和气体离子束照射装置的安装角度来控制样本台，以便允许气体离子束相对于正面或反向的入射角 切片样品为期望值。

    Energy dispersive X-ray analyzer
    10.
    发明授权
    Energy dispersive X-ray analyzer 有权

    公开(公告)号：US06563902B2

    公开(公告)日：2003-05-13

    申请号：US09893715

    申请日：2001-06-28

    Applicant: Haruo Takahashi

    Inventor： Haruo Takahashi

    IPC: G01N23223

    CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01T1/36

    Abstract: In order provide an energy dispersive X-ray analyzer that can perform efficient measurement by optimizing signal processing time of an X-ray counting section, an energy dispersive X-ray analyzer is provided with an energy dispersive X-ray detector, an X-ray counting section for analyzing the signal from the energy dispersive X-ray detector and generating a frequency distribution for each energy level, namely an energy spectrum, and a data control section for performing data processing, user interface etc. The X-ray counting section of the energy dispersive X-ray analyzer has signal processing methods with different processing times for a single X-ray input, and a function for selecting which method result to make use of using input X-ray energy.

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