公开(公告)号：US07863564B2

公开(公告)日：2011-01-04

申请号：US12259771

申请日：2008-10-28

Applicant: Ruriko Tsuneta ,  Hideki Kikuchi ,  Takafumi Yotsuji ,  Toshie Yaguchi

Inventor： Ruriko Tsuneta ,  Hideki Kikuchi ,  Takafumi Yotsuji ,  Toshie Yaguchi

IPC: H01J49/00

CPC classification number: H01J37/20 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20242 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/2611 ,  H01J2237/262 ,  H01J2237/28 ,  H01J2237/2802

Abstract: An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement.

Abstract translation: 提供一种带电粒子束显微镜，其中由于样本旋转而导致的样本运动被分类为可重复运动和不可重复运动，确定运动模型用于可重复运动，运动范围被确定为 不可重复运动，基于运动模型通过开环校正可重复运动，并且在基于运动范围设置的条件下校正不可重复运动。

公开(公告)号：US5591980A

公开(公告)日：1997-01-07

申请号：US492878

申请日：1995-06-20

Applicant: Mitsuo Ogasawara ,  Hiroyuki Kobayashi ,  Morioki Kubozoe

Inventor： Mitsuo Ogasawara ,  Hiroyuki Kobayashi ,  Morioki Kubozoe

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/20242 ,  H01J2237/20285 ,  H01J2237/26

Abstract: In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein.DELTA.y=y(1-cos .theta..sub.y2 /cos .theta..sub.y1).DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1.

Abstract translation: 在用于在五轴样本位置（x，y，z）和样本倾斜角度（θx，θy）中控制的电子显微镜中使用的偏心侧入口测角器台中，自动校正样品倾斜期间的图像偏移。 假设观测点的坐标为（x，y，z），则通过使用基于以下等式的计算器计算图像偏移DELTA y和DELTA z的校正值来自动校正观察图像的偏移，并且通过将观测点 当倾斜角θy从θ1到θ2变化时，使用样本位置和倾斜角度控制器到坐标（x，y-DELTA y，z-DELTA z），其中DELTA y = y（1-cosθy2 / cosθy1）DELTA z = y（sinθy2-sinθy1）/cosθy1。

公开(公告)号：US20140117251A1

公开(公告)日：2014-05-01

申请号：US14124722

申请日：2012-06-06

Applicant: Yasuyuki Momoi ,  Kaname Takahashi ,  Shigeru Haneda

Inventor： Yasuyuki Momoi ,  Kaname Takahashi ,  Shigeru Haneda

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/20214 ,  H01J2237/20242 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/28

Abstract: In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.

Abstract translation: 在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。

公开(公告)号：US20100163752A1

公开(公告)日：2010-07-01

申请号：US12481772

申请日：2009-06-10

Applicant: Shen-Chuan LO ,  Ming-Wei Lai ,  Shi-Ri Lee ,  Li-Jiaun Lin

Inventor： Shen-Chuan LO ,  Ming-Wei Lai ,  Shi-Ri Lee ,  Li-Jiaun Lin

IPC: G21K5/04 ,  G21K5/08

CPC classification number: H01J37/20 ,  H01J2237/20235 ,  H01J2237/20242 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method of processing objects by a FIB (Focused Ion Beam) system and a carrier used therewith are provided. The carrier includes a carrying member and a processing portion having an object disposed thereon. Before the carrier is disposed into the FIB system, the carrying member is set to be flush in height with the processing portion having the object disposed thereon. After an eucentric height adjustment inside the FIB system, both the carrying member and the processing portion are in a same plane with the eucentric point of the system. Therefore, after the object on the processing portion is processed, a processed object or a processed block of the object can be moved to the carrying member without performing further eucentric height adjustment with respect to the carrying member.

Abstract translation: 提供了一种通过FIB（聚焦离子束）系统和与其一起使用的载体来处理物体的方法。 载体包括承载构件和其上设置有物体的处理部分。 在将载体设置到FIB系统之前，承载构件被设置为与其上设置物体的处理部分高度齐平。 在FIB系统内进行了一个偏心的高度调节后，承载部件和加工部分都与系统的中心点处于同一平面。 因此，在处理部分上的物体被处理之后，物体的处理物体或加工块可以移动到承载构件而不进行相对于承载构件进一步的偏心高度调节。

公开(公告)号：US06992309B1

公开(公告)日：2006-01-31

申请号：US10917597

申请日：2004-08-13

Applicant: Klaus Petry ,  Joseph Ferrara ,  Klaus Becker

Inventor： Klaus Petry ,  Joseph Ferrara ,  Klaus Becker

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/20 ,  H01J37/304 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20235 ,  H01J2237/20242 ,  H01J2237/24528 ,  H01J2237/31703

Abstract: Dosimetry systems and methods are also presented for measuring a scanned ion beam at a plurality of points along a curvilinear path at a workpiece location in a process chamber. An illustrated dosimetry system comprises a sensor and a mounting apparatus that supports support the sensor and selectively positions the sensor at a plurality of points along the curvilinear path, wherein the mounting apparatus can selectively position the sensor to point toward a vertex of the scanned ion beam.

Abstract translation: 还提出了测量系统和方法，用于在处理室中的工件位置处沿着曲线路径的多个点处测量扫描离子束。 所示的剂量测定系统包括传感器和安装设备，其支撑传感器并且选择性地将传感器定位在沿着曲线路径的多个点处，其中安装设备可以选择性地将传感器定位成朝向扫描离子束的顶点 。

公开(公告)号：US09337076B2

公开(公告)日：2016-05-10

申请号：US13798909

申请日：2013-03-13

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： James P. Buonodono ,  Michael Esposito

IPC: H01L21/687 ,  H01J37/30 ,  H01J37/317

CPC classification number: H01L21/68764 ,  H01J37/20 ,  H01J37/30 ,  H01J37/3171 ,  H01J2237/2005 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20242

Abstract: A workpiece adjustment assembly is disclosed. The assembly can include a shaft, a spherical bearing, and a wafer support. A spherical housing receives the spherical bearing and allows the bearing to rotate therein. The housing and bearing may form an air bearing. A seal may be formed in the housing to prevent gas from the air bearing and the ambient atmosphere from migrating to a process chamber side of the housing. A set of spherical air pads may be positioned on an ambient side of the bearing to press the bearing against the housing when the process chamber is not under vacuum conditions. The seal can include a set of differentially pumped grooves. The spherical bearing enables the wafer manipulation end, and a wafer attached thereto, to be moved with four degrees of freedom. The arrangement facilitates isocentric scanning of a workpiece. Methods for using the assembly are also disclosed.

Abstract translation: 公开了一种工件调整组件。 组件可以包括轴，球面轴承和晶片支撑件。 球形壳体接收球面轴承并允许轴承在其中旋转。 外壳和轴承可以形成空气轴承。 可以在壳体中形成密封件，以防止来自空气轴承和周围空气的气体迁移到壳体的处理室侧。 当处理室不在真空条件下时，一组球形空气垫可以定位在轴承的环境侧上，以将轴承压靠在壳体上。 密封件可以包括一组差异泵浦的凹槽。 球面轴承使得晶片操纵端和附接到其上的晶片以四个自由度移动。 该装置有助于工件的等中心扫描。 还公开了使用组件的方法。

公开(公告)号：US20140265093A1

公开(公告)日：2014-09-18

申请号：US13798909

申请日：2013-03-13

Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

Inventor： James P. Buonodono ,  Michael Esposito

IPC: H01L21/687

CPC classification number: H01L21/68764 ,  H01J37/20 ,  H01J37/30 ,  H01J37/3171 ,  H01J2237/2005 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20242

Abstract: A workpiece adjustment assembly is disclosed. The assembly can include a shaft, a spherical bearing, and a wafer support. A spherical housing receives the spherical bearing and allows the bearing to rotate therein. The housing and bearing may form an air bearing. A seal may be formed in the housing to prevent gas from the air bearing and the ambient atmosphere from migrating to a process chamber side of the housing. A set of spherical air pads may be positioned on an ambient side of the bearing to press the bearing against the housing when the process chamber is not under vacuum conditions. The seal can include a set of differentially pumped grooves. The spherical bearing enables the wafer manipulation end, and a wafer attached thereto, to be moved with four degrees of freedom. The arrangement facilitates isocentric scanning of a workpiece. Methods for using the assembly are also disclosed.

Abstract translation: 公开了一种工件调整组件。 组件可以包括轴，球面轴承和晶片支撑件。 球形壳体接收球面轴承并允许轴承在其中旋转。 外壳和轴承可以形成空气轴承。 可以在壳体中形成密封件，以防止来自空气轴承和周围空气的气体迁移到壳体的处理室侧。 当处理室不在真空条件下时，一组球形空气垫可以定位在轴承的环境侧上，以将轴承压靠在壳体上。 密封件可以包括一组差异泵浦的凹槽。 球面轴承使得晶片操纵端和附接到其上的晶片以四个自由度移动。 该装置有助于工件的等中心扫描。 还公开了使用组件的方法。

公开(公告)号：US07718981B2

公开(公告)日：2010-05-18

申请号：US12134919

申请日：2008-06-06

Applicant: Haruo Takahashi ,  Yo Yamamoto ,  Toshiaki Fujii

Inventor： Haruo Takahashi ,  Yo Yamamoto ,  Toshiaki Fujii

IPC: G01N23/00

CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/20242 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.

Abstract translation: 提供了一种作为复合带电粒子束系统布置气体离子束装置，FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1，SEM透镜镜筒2，气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中，使得聚焦离子束4，电子束5和气体离子束6在单点相交，FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交，并且FIB透镜镜筒1的轴线，气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上

公开(公告)号：US20080315088A1

公开(公告)日：2008-12-25

申请号：US12134919

申请日：2008-06-06

Applicant: Haruo Takahashi ,  Yo YAMAMOTO ,  Toshiaki FUJII

Inventor： Haruo Takahashi ,  Yo YAMAMOTO ,  Toshiaki FUJII

IPC: G01N23/00

CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/20242 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.

Abstract translation: 提供了一种作为复合带电粒子束系统布置气体离子束装置，FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1，SEM透镜镜筒2，气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中，使得聚焦离子束4，电子束5和气体离子束6在单点相交，FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交，并且FIB透镜镜筒1的轴线，气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上

公开(公告)号：US20070125958A1

公开(公告)日：2007-06-07

申请号：US11590583

申请日：2006-10-31

Applicant: Hendrik Tappel ,  Ian van Hees ,  Danny Lankers ,  Gerard van Veen ,  Richard Young ,  Lucille Giannuzzi

Inventor： Hendrik Tappel ,  Ian van Hees ,  Danny Lankers ,  Gerard van Veen ,  Richard Young ,  Lucille Giannuzzi

IPC: G01K5/08

CPC classification number: H01L21/68 ,  G01R31/2898 ,  H01J37/20 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20242 ,  H01L21/68764

Abstract: A particle-optical apparatus comprising: A first source, for generating a first irradiating beam (E) along a first axis (A1); A second source, for generating a second irradiating beam (I) along a second axis (A2) that intersects the first axis at a beam intersection point, the first and second axes (A1, A2) defining a beam plane, A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with: A sample table (21) to which the sample can be mounted; A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point, wherein the set of actuators is further arranged to effect: rotation of the sample table about a rotation axis (RA) substantially parallel to the Z-axis, and; rotation of the sample table about a flip axis (FA) substantially perpendicular to the Z-axis, whereby the flip axis (FA) can itself be rotated about the rotation axis (RA).

Abstract translation: 一种粒子光学装置，包括：用于沿着第一轴线（A 1> 1）产生第一照射光束（E）的第一光源; 第二源，用于沿着在光束交叉点处与第一轴相交的第二轴线（A 2 2）产生第二辐射光束（I），第一和第二轴线（A 1） （3），用于将样品定位在光束交叉点附近，具有：样品台（21），其中至少一个样品台 样品可以安装; 一组致动器，被布置成使得样品台沿着与垂直于光束平面的X轴基本平行的方向，平行于光束平面的Y轴和平行于光束平面的Z轴实现平移 所述X轴，Y轴和Z轴相互正交并穿过所述光束交叉点，其中所述致动器组进一步布置成实现：所述样品台绕旋转轴线（RA）大致平行于 Z轴，和; 样品台围绕基本上垂直于Z轴的翻转轴（FA）旋转，由此翻转轴（FA）本身可绕旋转轴线（RA）旋转。