公开(公告)号：US20190287785A1

公开(公告)日：2019-09-19

申请号：US16283379

申请日：2019-02-22

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Derstine

IPC: H01J61/02 ,  G02B27/14 ,  G01N23/04 ,  H01J65/04 ,  G01N21/55

Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.

公开(公告)号：US10163620B2

公开(公告)日：2018-12-25

申请号：US15064294

申请日：2016-03-08

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer

IPC: H01J65/04 ,  H05G2/00

Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

公开(公告)号：US09941655B2

公开(公告)日：2018-04-10

申请号：US14667235

申请日：2015-03-24

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Rahul Yadav ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Derstine

IPC: H05G2/00 ,  H01S3/0915 ,  H01S3/00 ,  G02B6/42 ,  G02B6/28 ,  H01S3/23

CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

公开(公告)号：US20170315369A1

公开(公告)日：2017-11-02

申请号：US15651968

申请日：2017-07-17

Applicant: KLA-Tencor Corporation

Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Panzer ,  Eugene Shifrin

IPC: G02B27/10

CPC classification number: G02B27/1006

Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

公开(公告)号：US20170146399A1

公开(公告)日：2017-05-25

申请号：US15369560

申请日：2016-12-05

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick A. Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: G01J3/10 ,  H01J65/04 ,  G01J3/02 ,  G02B6/293 ,  G01J3/12

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

公开(公告)号：US20170059490A1

公开(公告)日：2017-03-02

申请号：US14839338

申请日：2015-08-28

Applicant: KLA-Tencor Corporation

Inventor： Wei Zhao ,  Kenneth P. Gross ,  Ilya Bezel ,  Matthew Panzer

IPC: G01N21/88 ,  H05G2/00

CPC classification number: H05G2/008 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1213 ,  G01J2003/1286 ,  G01N21/9501 ,  G01N21/956 ,  G02B5/203 ,  G02B26/0833 ,  G03F7/7065

Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.

Abstract translation: 用频谱滤波的照明源照射样本的系统包括被配置为产生具有第一组波长的照明束的照明源。 此外，该系统包括波长滤波子系统，样本台，照明子系统，检测器和用于聚焦来自一个或多个样本的表面的照明并将所收集的照明聚焦到检测器的目的。 此外，波长滤波子系统包括定位成将空间色散引入光束中的一个或多个第一色散元件，空间滤光元件以及定位成从光束去除空间色散的一个或多个色散元件。 空间滤波器元件还被定位成使包括第二组波长的波束的至少一部分通过，其中第二组波长是第一组波长的子集。

公开(公告)号：US09512985B2

公开(公告)日：2016-12-06

申请号：US13774025

申请日：2013-02-22

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: F21S8/10 ,  F21V13/08 ,  F21V13/00 ,  F21V13/12 ,  G02B6/35 ,  G02B6/293

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 本公开涉及用于向用于光学测量的测量头提供照明的系统。 在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。 在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。 在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：US09433070B2

公开(公告)日：2016-08-30

申请号：US14567546

申请日：2014-12-11

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Amir Torkaman

IPC: H05H1/24 ,  H01J61/30 ,  H01J61/52 ,  H01J65/04

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J61/52 ,  H01J65/04

Abstract: A plasma cell for forming light-sustained plasma includes a transmission element configured to contain a volume of gas, a first terminal flange disposed at or near an opening of the transmission element, a second terminal flange disposed at or near another opening of the transmission element, a floating flange disposed between the first or second terminal flange and the transmission element. The floating flange is movable to compensate for thermal expansion of the transmission element. Further, the floating flange is configured to enclose the internal volume of the transmission element to contain a volume of gas within the transmission element. The transmission element is configured to receive illumination from an illumination source in order to generate plasma within the volume of gas. The transmission element is transparent to a portion of the illumination from the illumination source and a portion of broadband radiation emitted by the plasma.

Abstract translation: 用于形成光持久等离子体的等离子体单元包括被配置为容纳一定体积的气体的传输元件，设置在传动元件的开口处或附近的第一端子凸缘，设置在传输元件的另一个开口处或附近的第二端子凸缘 设置在第一或第二端子凸缘与传动元件之间的浮动凸缘。 浮动凸缘可移动以补偿传动元件的热膨胀。 此外，浮动凸缘构造成包围传动元件的内部容积以容纳传动元件内的一定体积的气体。 传输元件被配置为从照明源接收照明，以在气体体积内产生等离子体。 传输元件对于来自照明源的照明的一部分和由等离子体发射的宽带辐射的一部分是透明的。

公开(公告)号：US20140291546A1

公开(公告)日：2014-10-02

申请号：US14224945

申请日：2014-03-25

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Ken Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

IPC: H05H1/24 ,  H01J65/00

CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。

公开(公告)号：US20130342105A1

公开(公告)日：2013-12-26

申请号：US13924608

申请日：2013-06-23

Applicant: KLA-Tencor Corporation

Inventor： Anatoly Shchemelinin ,  Ilya Bezel

IPC: H01J37/32

CPC classification number: H01J37/32055 ,  H01J61/04 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/28 ,  H01J65/04

Abstract: A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.

Abstract translation: 激光持续等离子体光源包括等离子体灯泡，其包含由等离子体灯泡内的电流驱动的工作气体流。 带电粒子被引入等离子体灯泡的工作气体中。 维持在不同电压水平的电极布置驱动带电粒子通过工作气体。 带电粒子在工作气体内的移动导致工作气体通过夹带在带电粒子的运动方向上流动。 所产生的工作气体流量增加等离子体周围的对流并且增加激光到等离子体相互作用。 可以通过控制存在于每个电极上的电压来稳定和控制等离子体灯泡内的工作气体流。 通过等离子体的工作气体的更稳定的流动有助于在等离子体灯泡内更稳定的等离子体形状和位置。