公开(公告)号：US3367231A

公开(公告)日：1968-02-06

申请号：US33761064

申请日：1964-01-14

Applicant: LEITZ ERNST GMBH

Inventor： GUNTHER MEINECKE ,  HERIBERT LUSSEM

IPC: G01J3/06 ,  G01J3/18

CPC classification number: G01J3/18 ,  G01J3/06

公开(公告)号：US3277774A

公开(公告)日：1966-10-11

申请号：US25193363

申请日：1963-01-16

Applicant: SPEX IND INC

Inventor： LANDON DONALD O ,  JOSEPH MARCOVECCHIO

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/32

CPC classification number: G01J3/32 ,  G01J3/02 ,  G01J3/0286 ,  G01J3/06

公开(公告)号：US2758502A

公开(公告)日：1956-08-14

申请号：US31363252

申请日：1952-10-08

Applicant: PERKIN ELMER CORP

Inventor： SCOTT LARKIN B ,  ABE OFFNER

IPC: G01J3/06 ,  G02B26/10

CPC classification number: G01J3/06 ,  G02B26/10

公开(公告)号：US2686894A

公开(公告)日：1954-08-17

申请号：US22810251

申请日：1951-05-24

Applicant: CIE RADIO CINEMA

Inventor： CESAR MATHIEU FREDERIC

IPC: G01J3/06

CPC classification number: G01J3/06

公开(公告)号：US12287240B2

公开(公告)日：2025-04-29

申请号：US17582741

申请日：2022-01-24

Applicant: Bar-Ilan University ,  Tel HaShomer Medical Research Infrastructure and Services Ltd.

Inventor： Yuval Garini ,  Irena Bronshtein-Berger ,  Iris Barshack

IPC: G01J3/28 ,  G01J3/46 ,  G01J3/06

Abstract: A spectral imaging device includes an imager, a scanning stage to establish relative motion between the imager and a sample in a scanning direction and an optical system controlling a light characteristic of a light beam constituting an image of the sample to the imager. The optical system includes a light varying element to receive the light beam and provide an output light beam with spatially varying light characteristic over a cross-section thereof. A set of redirecting optical elements direct light rays from the sample to form the light beam, and to focus the output light beam onto the imager. A controller controls the scanning stage and the imager to capture a plurality of image frames with an overlap including a defined shift that is greater than 1 pixel along the scanning direction between consecutive image frames. A computing device consolidates image data to provide an image of the sample.

公开(公告)号：US20250052691A1

公开(公告)日：2025-02-13

申请号：US18394784

申请日：2023-12-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngsun CHOI ,  Soonyang KWON ,  Kwangrak KIM ,  Jangryul PARK ,  Jiwoong KIM ,  Youngjun LEE

IPC: G01N21/956 ,  G01J3/02 ,  G01J3/06 ,  G01J3/45 ,  H01L21/66

Abstract: A method of manufacturing a semiconductor device using a semiconductor measurement apparatus includes extracting an interference pattern using a microsphere, and measuring a distance between a specimen and the microsphere, based on the interference pattern. A semiconductor measurement apparatus includes a light source configured to output at least one light, a scanner having a microsphere-objective lens, the scanner configured to allow the at least one light to be incident on a specimen, a spectrometer configured to obtain a spectrum of light reflected from the specimen; and a distance measurement apparatus configured to calculate a microsphere-to-specimen distance by analyzing a change in the spectrum.

公开(公告)号：US20250013066A1

公开(公告)日：2025-01-09

申请号：US18889787

申请日：2024-09-19

Applicant: Cymer, LLC

Inventor： Eric Anders Mason

IPC: G02B27/42 ,  G01J3/06 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G02B26/00 ,  G03F7/00 ,  H01L21/027 ,  H01S3/00 ,  H01S3/08 ,  H01S3/225 ,  H01S3/23

Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

公开(公告)号：US12124053B2

公开(公告)日：2024-10-22

申请号：US18081971

申请日：2022-12-15

Applicant: Cymer, LLC

Inventor： Eric Anders Mason

IPC: G02B26/00 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G02B5/04 ,  G02B27/12 ,  G02B27/14 ,  G02B27/42 ,  G03F7/00 ,  H01L21/027 ,  H01S3/00 ,  H01S3/08 ,  H01S3/23 ,  G01J3/12 ,  H01S3/225

CPC classification number: G02B27/4244 ,  G01J3/06 ,  G01J3/14 ,  G01J3/1804 ,  G02B26/007 ,  G03F7/70575 ,  H01L21/0275 ,  H01S3/0085 ,  H01S3/08004 ,  H01S3/2308 ,  G01J2003/061 ,  G01J2003/063 ,  G01J2003/064 ,  G01J2003/069 ,  G01J2003/1208 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/2366

Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

公开(公告)号：US12038325B2

公开(公告)日：2024-07-16

申请号：US17482512

申请日：2021-09-23

Applicant: Seiko Epson Corporation

Inventor： Kei Kudo

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/06 ,  G01J3/12

CPC classification number: G01J3/2823 ,  G01J3/0205 ,  G01J3/06 ,  G01J2003/1226

Abstract: An optical filter includes a variable wavelength interference filter including a pair of reflection films and having a plurality of transmission peak wavelengths according to the dimension of the gap between the pair of reflection films and a fixed wavelength filter disposed so as to face the variable wavelength interference filter and having a plurality of filter regions different from one another in transmission wavelength segment. The plurality of transmission peak wavelengths of the variable wavelength interference filter correspond to the transmission wavelength segments of the plurality of filter regions, respectively. The plurality of transmission peak wavelengths of the variable wavelength interference filter each change within the corresponding transmission wavelength segment of the plurality of filter regions in accordance with a change in the gap dimension.

公开(公告)号：US20240159680A1

公开(公告)日：2024-05-16

申请号：US18082822

申请日：2022-12-16

Applicant: NCS Testing Technology CO.,LTD

Inventor： Yunhai Jia ,  Liang Sheng ,  Liangjing Yuan ,  Lei Yu ,  Qiaochu Zhang

IPC: G01N21/67 ,  G01J3/06 ,  G01J3/457 ,  G01N21/31 ,  G01N21/88 ,  G01N21/93 ,  G01N33/2022

CPC classification number: G01N21/67 ,  G01J3/06 ,  G01J3/457 ,  G01N21/31 ,  G01N21/8851 ,  G01N21/93 ,  G01N33/2022 ,  G01J2003/061 ,  G01N2021/3196

Abstract: A spark spectrometry for inclusions content distribution on the surface of large size metallic materials, comprising the following steps: analyzing the surface of large-size metallic materials by spark discharge continuous excitation scanning, obtaining a mixture intensity distribution data of the solid solution and inclusions of an element on the surface of the large-size metallic materials; the relative frequency distribution diagram of spectral intensity is subjected to peak fitting of normal distribution and Gumbel distribution, obtaining an extreme value distribution data of spectral intensity of the inclusions; a size information of the inclusions in a small sample and that of the largest inclusions are correlated with the spectral intensity distribution data of inclusions, obtaining a result of content distribution of the inclusions on the surface of the large size metallic materials. The invention can quickly obtain accurate distribution information of inclusions of various elements on the surface of metallic materials.