公开(公告)号：US20250052691A1

公开(公告)日：2025-02-13

申请号：US18394784

申请日：2023-12-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngsun CHOI ,  Soonyang KWON ,  Kwangrak KIM ,  Jangryul PARK ,  Jiwoong KIM ,  Youngjun LEE

IPC: G01N21/956 ,  G01J3/02 ,  G01J3/06 ,  G01J3/45 ,  H01L21/66

Abstract: A method of manufacturing a semiconductor device using a semiconductor measurement apparatus includes extracting an interference pattern using a microsphere, and measuring a distance between a specimen and the microsphere, based on the interference pattern. A semiconductor measurement apparatus includes a light source configured to output at least one light, a scanner having a microsphere-objective lens, the scanner configured to allow the at least one light to be incident on a specimen, a spectrometer configured to obtain a spectrum of light reflected from the specimen; and a distance measurement apparatus configured to calculate a microsphere-to-specimen distance by analyzing a change in the spectrum.

公开(公告)号：US20200257142A1

公开(公告)日：2020-08-13

申请号：US16857756

申请日：2020-04-24

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)

Inventor： Kiyeon YANG ,  Youngsun CHOI ,  Seokho SONG ,  Jaewoong YOON ,  Choloong HAN ,  Yongsung KIM ,  Jeongyub LEE ,  Changseung LEE

IPC: G02F1/09 ,  G02B6/12 ,  G02B6/293 ,  G02F1/31 ,  G02F1/095 ,  G02B6/42 ,  G02B6/27

Abstract: Nonreciprocal optical transmission devices and optical apparatuses including the nonreciprocal optical transmission devices are provided. A nonreciprocal optical transmission device includes an optical input portion, an optical output portion, and an intermediate connecting portion interposed between the optical input portion and the optical output portion, and comprising optical waveguides. A complex refractive index of any one or any combination of the optical waveguides changes between the optical input portion and the optical output portion, and a transmission direction of light through the nonreciprocal optical transmission device is controlled by a change in the complex refractive index.

公开(公告)号：US20180188559A1

公开(公告)日：2018-07-05

申请号：US15632640

申请日：2017-06-26

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)

Inventor： Kiyeon YANG ,  Youngsun CHOI ,  Seokho SONG ,  Jaewoong YOON ,  Choloong HAN ,  Yongsung KIM ,  Jeongyub LEE ,  Changseung LEE

IPC: G02F1/09 ,  G02B6/42 ,  G02B6/27 ,  G02F1/095 ,  G02F1/31

CPC classification number: G02F1/093 ,  G02B6/12007 ,  G02B6/2746 ,  G02B6/2935 ,  G02B6/4209 ,  G02B2006/12157 ,  G02F1/0955 ,  G02F1/31 ,  G02F2203/04 ,  G02F2203/06

Abstract: Nonreciprocal optical transmission devices and optical apparatuses including the nonreciprocal optical transmission devices are provided. A nonreciprocal optical transmission device includes an optical input portion, an optical output portion, and an intermediate connecting portion interposed between the optical input portion and the optical output portion, and comprising optical waveguides. A complex refractive index of any one or any combination of the optical waveguides changes between the optical input portion and the optical output portion, and a transmission direction of light through the nonreciprocal optical transmission device is controlled by a change in the complex refractive index.