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    Scanning electron microscope
    36.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US06667476B2

    公开(公告)日：2003-12-23

    申请号：US09486042

    申请日：2000-02-17

    申请人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

    发明人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

    IPC分类号： H01J3728

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756

    摘要： The present invention relates to a scanning electron microscope employing a deceleration field forming technology (retarding), more particularly a scanning electron microscope which separates and detects secondary electrons at high efficiency. The object of the present invention is accomplished by providing an electron source, a lens for condensing the primary electron beam which is emitted from said electron source, a detector for detecting electrons which are generated by radiation of the primary electron beam onto a specimen, a first deceleration means for decelerating the primary electron beam which is radiated onto said specimen, a second deceleration means for decelerating electrons which are generated on the specimen, and a deflector for deflecting said electrons which are decelerated by said second decelerating means.

    摘要翻译： 本发明涉及一种使用减速场形成技术（延迟）的扫描电子显微镜，更具体地说，涉及一种以高效率分离和检测二次电子的扫描电子显微镜。 本发明的目的是通过提供电子源，用于冷凝从所述电子源发射的一次电子束的透镜，用于检测通过将一次电子束辐射到样本上产生的电子的检测器， 第一减速装置，用于使被辐射到所述样本上的一次电子束减速，用于减速在所述样本上产生的电子的第二减速装置，以及用于使由所述第二减速装置减速的所述电子偏转的偏转器。

    Scanning electron microscope
    37.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US6043491A

    公开(公告)日：2000-03-28

    申请号：US133667

    申请日：1998-08-12

    申请人： Yoichi Ose ,  Kiyomi Yoshinari ,  Hideo Todokoro ,  Mitsugu Sato

    发明人： Yoichi Ose ,  Kiyomi Yoshinari ,  Hideo Todokoro ,  Mitsugu Sato

    IPC分类号： H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/026 ,  H01J2237/0475

    摘要： A scanning electron microscope in the present invention, by employing a retarding method and suppressing interferences between an electron beam and secondary electrons or back scattered electrons, makes it possible to obtain a clearer SEM image with a higher resolution. In the scanning electron microscope in the present invention, a shield electrode 117 is provided for shielding the electron beam 104 from electric fields of an energy analyzer 118 and a detector 121, and the energy analyzer 118 and the detector 121 are located in contact with an electron beam aperture 115 and the shield electrode 117.

    摘要翻译： 本发明的扫描型电子显微镜，通过采用延迟方法，抑制电子束与二次电子或背散射电子之间的干扰，能够得到更清晰的具有更高分辨率的SEM图像。 在本发明的扫描型电子显微镜中，设有屏蔽电极117，用于将电子束104与能量分析器118和检测器121的电场进行屏蔽，能量分析器118和检测器121位于与 电子束孔115和屏蔽电极117。

    Scanning electron microscope
    38.
    发明授权
    Scanning electron microscope 失效
    扫描电子显微镜

    公开(公告)号：US5677530A

    公开(公告)日：1997-10-14

    申请号：US668177

    申请日：1996-06-21

    申请人： Mitsugu Sato ,  Ryuji Hoya ,  Yoichi Ose

    发明人： Mitsugu Sato ,  Ryuji Hoya ,  Yoichi Ose

    IPC分类号： H01J37/141 ,  G01R31/305 ,  H01J37/147 ,  H01J37/153 ,  H01J37/244 ,  H01J37/28

    CPC分类号： G01R31/305 ,  H01J37/153 ,  H01J37/28

    摘要： A scanning electron microscope comprising an objective lens for forming lens magnetic field on the sample side, and observing the image of the sample after detecting the secondary electrons from the sample on the upper side of the objective lens is disclosed. The accelerating electrode is arranged along the electron beam passage of the objective lens, and an positive potential is applied thereto. The electric field correction electrode is disposed outside the accelerating electrode or to the sample side. A negative potential is applied to the electric field correction electrode. An image observation with high resolution also is realized even when the sample is inclined.

    摘要翻译： 公开了一种扫描电子显微镜，其包括用于在样品侧形成透镜磁场的物镜，并且在从物镜的上侧的样品检测到二次电子之后观察样品的图像。 加速电极沿物镜的电子束通路配置，向其施加正电位。 电场校正电极设置在加速电极或样品侧的外侧。 对电场校正电极施加负电位。 即使样品倾斜，也可以实现高分辨率的图像观察。

    Scanning electron microscope and its analogous device
    39.
    发明授权
    Scanning electron microscope and its analogous device 失效
    扫描电子显微镜及其类似装置

    公开(公告)号：US5668372A

    公开(公告)日：1997-09-16

    申请号：US615650

    申请日：1996-03-13

    申请人： Yuko Iwabuchi ,  Mitsugu Sato ,  Yoichi Ose

    发明人： Yuko Iwabuchi ,  Mitsugu Sato ,  Yoichi Ose

    IPC分类号： H01J37/20 ,  H01J37/12 ,  H01J37/153 ,  H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/15

    摘要： A device enables high resolution observation even when a sample is tiled. A deflecting electrode device for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens is provided between the objective lens and the sample. A voltage applied to the deflecting electrode device is controlled in accordance with the tilting of a sample stage. A lateral electric field component generated on the optical axis when the sample stage is tiled is corrected by a deflected electric field generated by the deflecting electrode device. This is effective to suppress generation of astigmatism, and to allows effective arrival of an secondary electron at a secondary electron detector disposed at a position nearer the electron source side than the objective lens.

    摘要翻译： 即使在样品被平铺时，该装置也能够进行高分辨率观察。 在物镜和样品之间设置用于产生具有与物镜的中心轴（光轴）垂直的方向的分量的电场的偏转电极装置。 根据样品台的倾斜来控制施加到偏转电极装置的电压。 当采样台平铺时在光轴上产生的横向电场分量由偏转电极装置产生的偏转电场来校正。 这有效地抑制散光的产生，并且允许二次电子在位于比物镜更靠近电子源侧的位置处的二次电子检测器的有效到达。

    Mass spectrometer and ion source
    40.
    发明授权
    Mass spectrometer and ion source 失效
    质谱仪和离子源

    公开(公告)号：US5532483A

    公开(公告)日：1996-07-02

    申请号：US403980

    申请日：1995-03-15

    申请人： Yoichi Ose ,  Kiyomi Yoshinari ,  Masayoshi Yano ,  Tadao Mimura

    发明人： Yoichi Ose ,  Kiyomi Yoshinari ,  Masayoshi Yano ,  Tadao Mimura

    IPC分类号： H01J49/06 ,  H01J49/10

    CPC分类号： H01J49/10 ,  H01J49/06

    摘要： An ion beam having a good converging property and a good quality is provided by satisfying the limitations controlling both angle of dispersion and the width of beam at the same time. The voltage 12d of a repeller electrode 1f in an ion source of electron bombardment type is input to an ion source state monitor 11 and the ion source state monitor 11 output a predicted value 12e of the voltage applied to an extractor electrode 1g to an extractor power source 9. As for the extractor electrode system, the width of a slit in the acceleration electrode 1b is made larger than the width of a slit of the extractor electrode 1g, and the extractor electrode 1g is set in a position apart from the acceleration electrode 1b by the distance nearly equal to the distance between the acceleration electrode 1b and the ion generating region 2a. By doing so, the electric field leaked from the slit of the acceleration electrode 1b to the inside of the ionization chamber 1a expands to the vicinity of the ion generating region. As the result, the ion beam 2 is effectively extracted to pass through the slits in the acceleration electrode 1b and the extractor 1g. The amount of the current passing through the slits is measured with an ion current monitor 8a and the voltage 12f of a converging electrode 1d is adjusted so that the value of the current becomes the maximum.

    摘要翻译： 通过满足同时控制分散角和宽度的限制来提供具有良好的会聚特性和良好质量的离子束。 电子轰击型离子源中的斥极电极1f的电压12d被输入到离子源状态监视器11，离子源状态监视器11将施加到抽出电极1g的电压的预测值12e输出到提取电力 对于提取器电极系统，使加速电极1b中的狭缝的宽度大于提取电极1g的狭缝的宽度，并且将提取电极1g设置在离开加速电极1的位置 1b的距离几乎等于加速电极1b和离子产生区域2a之间的距离。 通过这样做，从加速电极1b的狭缝向电离室1a的内部泄漏的电场扩大到离子产生区域附近。 结果，有效地提取离子束2以通过加速电极1b和提取器1g中的狭缝。 通过离子电流监视器8a测量通过狭缝的电流量，调节会聚电极1d的电压12f，使得电流值变为最大值。