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公开(公告)号:US11024622B2
公开(公告)日:2021-06-01
申请号:US16722324
申请日:2019-12-20
发明人: Tung-Heng Hsieh , Hui-Zhong Zhuang , Chung-Te Lin , Sheng-Hsiung Wang , Ting-Wei Chiang , Li-Chun Tien
IPC分类号: H01L27/02 , G06F30/39 , G06F30/392 , G06F30/398 , H01L23/528 , H01L27/092
摘要: An integrated circuit includes a plurality of gate electrode structures extending along a first direction and having a predetermined spatial resolution measurable along a second direction orthogonal to the first direction. The plurality of gate electrode structures includes a first gate electrode structure having a first portion and a second portion separated in the first direction, and a second gate electrode structure having a third portion and a fourth portion separated in the first direction. The integrated circuit further includes a conductive feature including a first section electrically connected to the second portion, wherein the first section extends in the second direction, a second section electrically connected to the third portion, wherein the second section extends in the second direction, and a third section electrically connecting the first section and the second section, the third section extends in a third direction angled with respect to the first and second directions.
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公开(公告)号:US10970451B2
公开(公告)日:2021-04-06
申请号:US16553958
申请日:2019-08-28
发明人: Jian-Sing Li , Ting-Wei Chiang , Hui-Zhong Zhuang , Jung-Chan Yang , Li-Chun Tien , Ting Yu Chen , Tzu-Ying Lin
IPC分类号: G06F30/392 , H01L27/02
摘要: A method includes positioning a first active region adjacent to a pair of second active regions in an initial integrated circuit (IC) layout diagram of an initial cell, to align side edges of the first active region and corresponding side edges of each second active region of the pair of second active regions along a cell height direction. The method further includes arranging at least one first fin feature in the first active region, to obtain a modified cell having a modified IC layout diagram. The side edges of the first active region and the corresponding side edges of each second active region extend along the cell height direction. A height dimension of the first active region in the cell height direction is less than half of a height dimension of each second active region of the pair of second active regions in the cell height direction. At least one of the positioning the first active region or the arranging the at least one first fin feature is executed by a processor.
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公开(公告)号:US10950594B2
公开(公告)日:2021-03-16
申请号:US16420919
申请日:2019-05-23
发明人: Chung-Te Lin , Ting-Wei Chiang , Hui-Zhong Zhuang , Pin-Dai Sue , Li-Chun Tien
IPC分类号: H01L27/02 , G06F30/392 , H01L27/092 , H01L29/423 , H01L27/118
摘要: A layout includes a plurality of cells and at least one dummy gate electrode continuously extends across the cells. Since the dummy gate electrode is electrically conductive, the dummy gate electrode can be utilized for interconnecting the cells. That is, some signals may travel through the dummy gate electrode rather than through a metal one line or a metal two line. Therefore, an amount of metal one lines and/or metal two lines for interconnecting the cells can be reduced.
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公开(公告)号:US10552568B2
公开(公告)日:2020-02-04
申请号:US15845101
申请日:2017-12-18
发明人: Sheng-Hsiung Chen , Jyun-Hao Chang , Ting-Wei Chiang , Fong-Yuan Chang , I-Lun Tseng , Po-Hsiang Huang
IPC分类号: G06F17/50
摘要: A method of modifying a cell includes identifying a maximum overlapped pin group. The method further includes determining a number of pins in the maximum overlapped pin group. The method further includes determining a span region of the maximum overlapped pin group. The method further includes comparing the number of pins and the span region to determine a global tolerance of the cell. The method further includes increasing a length of at least one pin of the maximum overlapped pin group in response to the global tolerance failing to satisfy a predetermined threshold. The method further includes fabricating a mask based on the increased length of the at least one pin.
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公开(公告)号:US10522527B2
公开(公告)日:2019-12-31
申请号:US15233126
申请日:2016-08-10
发明人: Tung-Heng Hsieh , Hui-Zhong Zhuang , Chung-Te Lin , Sheng-Hsiung Wang , Ting-Wei Chiang , Li-Chun Tien
IPC分类号: G06F17/50 , H01L27/02 , H01L23/528 , H01L27/092
摘要: An integrated circuit includes a plurality of gate electrode structures extending along a first direction and having a predetermined spatial resolution measurable along a second direction orthogonal to the first direction. The plurality of gate electrode structures includes a first gate electrode structure having a first portion and a second portion separated by a first carve-out region, and a conductive feature over the first carve-out region and electrically connecting the first portion and the second portion of the first gate electrode.
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公开(公告)号:US10007750B2
公开(公告)日:2018-06-26
申请号:US15606621
申请日:2017-05-26
发明人: Ting-Wei Chiang , Shun Li Chen , Yi-Hsun Chiu , Li-Chun Tien
CPC分类号: G06F17/5072 , B82Y40/00 , H01L27/0207 , H01L27/11807 , H01L29/0657 , H01L29/0665 , H01L29/42316 , Y10S977/938
摘要: A layout design of a standard cell for a set of masks includes a first gate pad layout pattern, a second gate pad layout pattern immediately adjacent to the first gate pad layout pattern, and a third gate pad layout pattern immediately adjacent to the second gate pad layout pattern. Each gate pad layout pattern has first and second sides extending along a first direction, the second side further along a second direction than the first side. A first gate pad pitch is a distance between first sides of the first and second gate pad layout patterns and has a value different from that of a second gate pad pitch that is a distance between first sides of the second and third gate pad layout patterns. Each gate pad pattern is usable for forming a gate pad surrounding a set of channel structures.
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公开(公告)号:US09659129B2
公开(公告)日:2017-05-23
申请号:US14253205
申请日:2014-04-15
IPC分类号: H01L23/50 , G06F17/50 , H01L21/768 , H01L27/118 , H01L27/02
CPC分类号: G06F17/5072 , H01L21/768 , H01L27/0207 , H01L27/11807 , H01L2027/11875 , H01L2924/0002 , H01L2924/00
摘要: An integrated circuit, manufactured by a process having a nominal minimum pitch of metal lines, includes a plurality of metal lines and a plurality of standard cells under the plurality of metal lines. The plurality of metal lines extends along a first direction, and the plurality of metal lines are separated, in a second direction perpendicular to the first direction, by integral multiples of the nominal minimum pitch. At least one of the plurality of standard cells has a cell height along the second direction, and the cell height is a non-integral multiple of the nominal minimum pitch.
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公开(公告)号:US20160329405A1
公开(公告)日:2016-11-10
申请号:US15212969
申请日:2016-07-18
发明人: Hsiang-Jen Tseng , Ting-Wei Chiang , Wei-Yu Chen , Kuo-Nan Yang , Ming-Hsiang Song , Ta-Pen Guo
IPC分类号: H01L29/417 , H01L29/78 , H01L29/66 , H01L27/088
CPC分类号: H01L29/41775 , H01L21/823814 , H01L21/823821 , H01L27/0886 , H01L29/66795 , H01L29/7848 , H01L29/785 , H01L29/7851 , H01L2029/7858
摘要: The invention relates to a contact structure of a semiconductor device. An exemplary structure for a semiconductor device comprises an insulation region over a substrate; a gate electrode layer over the insulation region comprising a gate middle line; a first contact structure over the insulation region adjacent to the gate electrode layer comprising a first middle line, wherein the first middle line and the gate middle line has a first distance; and a second contact structure over the insulation region on a side of the gate electrode layer opposite to the first contact structure comprising a second middle line, wherein the second middle line and the gate middle line has a second distance greater than the first distance.
摘要翻译: 本发明涉及半导体器件的接触结构。 半导体器件的示例性结构包括在衬底上的绝缘区域; 绝缘区域上的栅极电极层,包括栅极中间线; 在与栅极电极层相邻的绝缘区域上的第一接触结构,包括第一中间线,其中第一中间线和栅极中间线具有第一距离; 以及在与包括第二中间线的第一接触结构相对的栅极电极层的一侧上的绝缘区域上的第二接触结构,其中第二中间线和栅极中间线具有大于第一距离的第二距离。
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公开(公告)号:US20160254190A1
公开(公告)日:2016-09-01
申请号:US15150149
申请日:2016-05-09
发明人: Tung-Heng Hsieh , Chung-Te Lin , Sheng-Hsiung Wang , Hui-Zhong Zhuang , Min-Hsiung Chiang , Ting-Wei Chiang , Li-Chun Tien
IPC分类号: H01L21/8234 , H01L21/304 , H01L29/66
CPC分类号: H01L21/82345 , G06F17/5072 , H01L21/3043 , H01L21/32139 , H01L21/823431 , H01L27/0207 , H01L27/11807 , H01L29/66545 , H01L29/66795
摘要: A method of forming a layout design for fabricating an integrated circuit (IC) is disclosed. The method includes identifying one or more areas in the layout design occupied by one or more segments of a plurality of gate structure layout patterns of the layout design; and generating a set of layout patterns overlapping the identified one or more areas. The plurality of gate structure layout patterns has a predetermined pitch smaller than a spatial resolution of a predetermined lithographic technology. A first layout pattern of the set of layout patterns has a width less than twice the predetermined pitch.
摘要翻译: 公开了一种形成用于制造集成电路(IC)的布局设计的方法。 该方法包括识别由布局设计的多个门结构布局图案的一个或多个段所占据的布局设计中的一个或多个区域; 以及生成与所识别的一个或多个区域重叠的一组布局模式。 多个栅极结构布局图案具有比预定光刻技术的空间分辨率小的预定间距。 布置图案集合的第一布局图案具有小于预定间距的两倍的宽度。
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公开(公告)号:US09336348B2
公开(公告)日:2016-05-10
申请号:US14484588
申请日:2014-09-12
发明人: Tung-Heng Hsieh , Chung-Te Lin , Sheng-Hsiung Wang , Hui-Zhong Zhuang , Min-Hsiung Chiang , Ting-Wei Chiang , Li-Chun Tien
IPC分类号: G06F17/50
CPC分类号: H01L21/82345 , G06F17/5072 , H01L21/3043 , H01L21/32139 , H01L21/823431 , H01L27/0207 , H01L27/11807 , H01L29/66545 , H01L29/66795
摘要: A method of forming a layout design for fabricating an integrated circuit (IC) is disclosed. The method includes identifying one or more areas in the layout design occupied by one or more segments of a plurality of gate structure layout patterns of the layout design; and generating a set of layout patterns overlapping the identified one or more areas. The plurality of gate structure layout patterns has a predetermined pitch smaller than a spatial resolution of a predetermined lithographic technology. A first layout pattern of the set of layout patterns has a width less than twice the predetermined pitch.
摘要翻译: 公开了一种形成用于制造集成电路(IC)的布局设计的方法。 该方法包括识别由布局设计的多个门结构布局图案的一个或多个段所占据的布局设计中的一个或多个区域; 以及生成与所识别的一个或多个区域重叠的一组布局模式。 多个栅极结构布局图案具有比预定光刻技术的空间分辨率小的预定间距。 布置图案集合的第一布局图案具有小于预定间距的两倍的宽度。
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