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    Measurement of thin film porosity
    31.
    发明授权
    Measurement of thin film porosity 有权
    测量薄膜孔隙率

    公开(公告)号：US07907264B1

    公开(公告)日：2011-03-15

    申请号：US12193450

    申请日：2008-08-18

    Applicant: Shankar Krishnan

    Inventor： Shankar Krishnan

    IPC: G01N21/41 ,  G01N15/08 ,  G01B11/00 ,  G01B11/22 ,  G01R31/26

    CPC classification number: G01N15/08

    Abstract: A method of measuring a porosity of a film, by measuring a refractive index of the film in a first environment having a first relative humidity to produce a first refractive index measurement. The refractive index of the film is measured in a second environment having a second relative humidity, where the first relative humidity is different from the second relative humidity, to produce a second refractive index measurement. Multiple gases can be used to create the first and second environments. The first refractive index measurement and the second refractive index measurement are input into a model that correlates refractive index to film porosity, to output the porosity of the film.

    Abstract translation: 一种通过在具有第一相对湿度的第一环境中测量膜的折射率来测量膜的孔隙率以产生第一折射率测量的方法。 在具有第二相对湿度的第二环境中测量膜的折射率，其中第一相对湿度与第二相对湿度不同，以产生第二折射率测量。 可以使用多种气体来创建第一和第二种环境。 第一折射率测量和第二折射率测量被输入到将折射率与膜孔隙度相关联的模型中，以输出膜的孔隙率。

    Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
    32.
    发明授权
    Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system 有权
    测量系统被配置为执行被配置成为测量系统提供照明的样本和照明子系统的测量

    公开(公告)号：US07869040B1

    公开(公告)日：2011-01-11

    申请号：US12184419

    申请日：2008-08-01

    Applicant: Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

    Inventor： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

    IPC: G01J4/00

    CPC classification number: G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

    Abstract: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

    Abstract translation: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

    Global registration of multiple 3D point sets via optimization on a manifold
    33.
    发明授权
    Global registration of multiple 3D point sets via optimization on a manifold 有权
    通过在歧管上进行优化来全局注册多个3D点集

    公开(公告)号：US07831090B1

    公开(公告)日：2010-11-09

    申请号：US11480044

    申请日：2006-06-30

    Applicant: Shankar Krishnan ,  Pei Yean Lee ,  John Barrett Moore ,  Suresh Venkatasubramanian

    Inventor： Shankar Krishnan ,  Pei Yean Lee ,  John Barrett Moore ,  Suresh Venkatasubramanian

    IPC: G06K9/00 ,  G06T15/00

    CPC classification number: G06K9/00214 ,  G06K9/6211 ,  G06T7/30 ,  G06T17/00 ,  G06T2207/10028

    Abstract: A method for registering multiple 3D point sets by determining optimal relative positions and orientations of the 3D point sets. Initial values are determined for the rotation matrices corresponding to the relative orientations of reference frames of the 3D point sets. A registration error cost function is optimized on a product manifold of all of the rotation matrices to determine optimal values of the rotation matrices. The optimal values of the rotation matrices are used to determine optimal values for translation vectors corresponding to the relative positions of the reference frames of the 3D point sets. The 3D point sets are registered on a common reference frame using the optimal rotation matrices and the optimal translation vectors.

    Abstract translation: 一种用于通过确定3D点集合的最佳相对位置和取向来登记多个3D点集的方法。 对于与3D点集的参考帧的相对取向相对应的旋转矩阵确定初始值。 在所有旋转矩阵的乘积歧管上优化注册误差成本函数，以确定旋转矩阵的最佳值。 旋转矩阵的最佳值用于确定对应于3D点集的参考帧的相对位置的平移向量的最优值。 使用最佳旋转矩阵和最优平移向量将3D点集登记在公共参考帧上。

    METHOD AND APPARATUS FOR LOCATING FACILITIES
    34.
    发明申请
    METHOD AND APPARATUS FOR LOCATING FACILITIES 审中-公开
    用于定位设施的方法和装置

    公开(公告)号：US20100088415A1

    公开(公告)日：2010-04-08

    申请号：US12246973

    申请日：2008-10-07

    Applicant: AARON ARCHER ,  Shankar Krishnan

    Inventor： AARON ARCHER ,  Shankar Krishnan

    IPC: G06F15/16

    CPC classification number: H04L41/0826 ,  H04L41/12

    Abstract: A method and apparatus for providing facility location plans for a network are disclosed. For example, the method identifies a facility and a number of nearest active clients associated with a minimized cost per unit demand of connecting these clients to this facility. The method then connects the number of nearest active clients to the facility associated with the minimized cost per unit demand. In one embodiment, the method iterates this process with the remaining clients until all demands have been assigned to facilities.

    Abstract translation: 公开了一种用于为网络提供设施位置计划的方法和装置。 例如，该方法识别与将这些客户端连接到该设施的每单位需求的最小化成本相关联的设施和最近的活动客户端的数量。 然后，该方法将最近的活动客户端的数量连接到与每单位需求的最小化成本相关联的设施。 在一个实施例中，该方法与剩余的客户端重复该过程，直到所有需求都被分配给设施。

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