公开(公告)号：US09865427B2

公开(公告)日：2018-01-09

申请号：US14704453

申请日：2015-05-05

Applicant: FEI COMPANY

Inventor： Martinus Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Steven Berger ,  Ben Jacobus Marie Bormans ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus W. G. Persoon

IPC: H01J37/26 ,  H01J37/18 ,  H01J37/21 ,  H01J37/302 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

公开(公告)号：US20160104596A1

公开(公告)日：2016-04-14

申请号：US14878513

申请日：2015-10-08

Applicant: FEI Company

Inventor： Bart Buijsse ,  Gijs van Duinen

IPC: H01J37/02 ,  H01J37/153 ,  H01J37/26

CPC classification number: H01J37/023 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/024 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

Abstract: When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.

Abstract translation: 当准备无孔相板（HFPP）时，应该在TEM的衍射平面或与其共轭的平面上以高精度放置优选无特征薄膜。 描述了将薄膜准确地放置在所述平面中的两种方法。 当TEM处于成像模式时，一种方法使用薄膜的Ronchigram，并且调整Ronchigram的放大倍率，使得Ronchigram中间的放大倍率是无穷大的。 第二种方法是在TEM处于衍射模式时使用由薄膜散射的电子。 当薄膜与衍射平面不一致时，由薄膜散射的电子似乎源自与零光束交叉的另一位置。 这被观察为光环。 光晕的不存在证明薄膜与衍射平面重合。

公开(公告)号：US20160096734A2

公开(公告)日：2016-04-07

申请号：US14560919

申请日：2014-12-04

Applicant: FEI Company ,  Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V

Inventor： Bart Buijsse ,  Radostin Stoyanov Danev ,  Kasim Sader

IPC: C01B31/04 ,  H01J37/31 ,  H01J37/22

CPC classification number: C01B32/20 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26 ,  H01J37/31 ,  H01J2237/3114

Abstract: A freestanding thin film of nano-crystalline graphite is described, as well as a method of producing a freestanding thin film of nano-crystalline graphite including: providing a freestanding thin film of amorphous carbon, heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. The films can be used, for example, as phase plates in a Transmission Electron Microscope.

Abstract translation: 描述了独立的纳米晶体石墨薄膜，以及制造纳米晶体石墨的独立薄膜的方法，包括：提供独立的无定形碳薄膜，将独立的薄膜加热到高温下 惰性气氛或真空中; 并且允许独立的薄膜冷却，由此形成独立的纳米晶体石墨薄膜。 这些膜可以用作例如透射电子显微镜中的相位板。

公开(公告)号：US09129774B2

公开(公告)日：2015-09-08

申请号：US14262340

申请日：2014-04-25

Applicant: FEI Company ,  Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e. V.

Inventor： Bart Buijsse ,  Radostin Stoyanov Danev

IPC: H01J37/26 ,  G21K5/04 ,  H01J37/285

CPC classification number: H01J37/263 ,  H01J37/285 ,  H01J2237/2614

Abstract: The invention relates to a method of using a phase plate, having a thin film, in a transmission electron microscope (TEM), comprising: introducing the phase plate in the TEM; preparing the phase plate by irradiating the film with a focused electron beam; introducing a sample in the TEM; and forming an image of the sample using the prepared phase plate, wherein preparing the phase plate involves locally building up a vacuum potential resulting from a change in the electronic structure of the thin film by irradiating the phase plate with a focused beam of electrons, the vacuum potential leading to an absolute phase shift |φ| with a smaller value than at the non-irradiated thin film. Preferably the phase plate is heated to avoid contamination. The phase shift achieved with this phase plate can be tuned by varying the diameter of the irradiated spot.

Abstract translation: 本发明涉及一种在透射电子显微镜（TEM）中使用具有薄膜的相位板的方法，包括：在TEM中引入相位板; 通过用聚焦电子束照射膜来制备相位板; 在TEM中引入样品; 以及使用所制备的相位板形成样品的图像，其中准备所述相位板包括通过用聚焦的电子束照射所述相位板来在所述薄膜的电子结构的变化中局部地形成真空电位， 真空电位导致绝对相移|＆phgr | | 其值比未经照射的薄膜的值小。 优选地，相板被加热以避免污染。 可以通过改变照射斑点的直径来调节用该相位板实现的相移。

公开(公告)号：US20150151972A1

公开(公告)日：2015-06-04

申请号：US14560919

申请日：2014-12-04

Applicant: FEI Company

Inventor： Bart Buijsse ,  Radostin Stoyanov Danev ,  Kasim Sader

IPC: C01B31/04 ,  H01J37/31 ,  H01J37/22

CPC classification number: C01B32/20 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26 ,  H01J37/31 ,  H01J2237/3114

Abstract: A freestanding thin film of nano-crystalline graphite is described, as well as a method of producing a freestanding thin film of nano-crystalline graphite including: providing a freestanding thin film of amorphous carbon, heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. The films can be used, for example, as phase plates in a Transmission Electron Microscope.

Abstract translation: 描述了独立的纳米晶体石墨薄膜，以及制造纳米晶体石墨的独立薄膜的方法，包括：提供独立的无定形碳薄膜，将独立的薄膜加热到高温下 惰性气氛或真空中; 并且允许独立的薄膜冷却，由此形成独立的纳米晶体石墨薄膜。 这些膜可以用作例如透射电子显微镜中的相位板。

公开(公告)号：US20140326876A1

公开(公告)日：2014-11-06

申请号：US14262340

申请日：2014-04-25

Applicant: FEI Company ,  Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e. V.

Inventor： Bart Buijsse ,  Radostin Stoyanov Danev

IPC: H01J37/26 ,  H01J37/285

CPC classification number: H01J37/263 ,  H01J37/285 ,  H01J2237/2614

Abstract: The invention relates to a method of using a phase plate, having a thin film, in a transmission electron microscope (TEM), comprising: introducing the phase plate in the TEM; preparing the phase plate by irradiating the film with a focused electron beam; introducing a sample in the TEM; and forming an image of the sample using the prepared phase plate, wherein preparing the phase plate involves locally building up a vacuum potential resulting from a change in the electronic structure of the thin film by irradiating the phase plate with a focused beam of electrons, the vacuum potential leading to an absolute phase shift 10 with a smaller value than at the non-irradiated thin film. Preferably the phase plate is heated to avoid contamination. The phase shift achieved with this phase plate can be tuned by varying the diameter of the irradiated spot.

Abstract translation: 本发明涉及一种在透射电子显微镜（TEM）中使用具有薄膜的相位板的方法，包括：在TEM中引入相位板; 通过用聚焦电子束照射膜来制备相位板; 在TEM中引入样品; 以及使用所制备的相位板形成样品的图像，其中准备所述相位板包括通过用聚焦的电子束照射所述相位板来在所述薄膜的电子结构的变化中局部地形成真空电位， 真空电位导致绝对相移10，其值比未经照射的薄膜小。 优选地，相板被加热以避免污染。 可以通过改变照射斑点的直径来调节用该相位板实现的相移。

公开(公告)号：US20130313428A1

公开(公告)日：2013-11-28

申请号：US13896103

申请日：2013-05-16

Applicant: FEI Company

Inventor： Bart Buijsse

IPC: H01J37/26

CPC classification number: H01J37/263 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: A phase plate, specifically a Zernike type phase plate, for use in an electron microscope, comprises a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function.The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.

Abstract translation: 在电子显微镜中使用的相位板，特别是Zernike型相位板包括中心孔和导致穿过所述膜的电子的相移的薄膜。 该相移会导致对比度传递函数（CTF）从正弦函数变为余弦函数。 相板配备有由较薄的膜承载的环形形式的膜。 因此，仅在较小的空间频率范围（对于低频），相位发生变化（因而CTF），而对于其他空间频率，相移可忽略不计，因此CTF保持不变。 由于载体膜的厚度小得多，所以电子的散射也是可忽略的。