公开(公告)号：US08921802B2

公开(公告)日：2014-12-30

申请号：US13385618

申请日：2012-02-27

Applicant: Nicholas R. White

Inventor： Nicholas R. White

IPC: H01J3/20 ,  H01J37/14 ,  H01J3/22 ,  H01J3/24 ,  H01J37/05 ,  H01J37/317 ,  H01J49/06 ,  H01J49/20

CPC classification number: H01J3/22 ,  H01J3/24 ,  H01J37/05 ,  H01J37/14 ,  H01J37/3171 ,  H01J49/06 ,  H01J49/20 ,  H01J2237/055 ,  H01J2237/057

Abstract: The present invention is an apparatus and multi-unit assembly which is able to achieve two different and highly desirable functions: A focusing of a charged particle beam; and a mass separation of desired ion species from unwanted ion species in traveling ion beams. The apparatus is a simply organized and easily manufactured article; is relatively light-weight and less expensive to make; and is easier to install, align, and operate than conventionally available devices.

Abstract translation: 本发明是一种能够实现两种不同和非常理想的功能的装置和多单元组件：带电粒子束的聚焦; 并且将所需离子物质与不需要的离子物质在行进离子束中的质量分离。 该装置是简单有组织且容易制造的物品; 相对较轻，制造成本较低; 并且比常规可用设备更容易安装，对准和操作。

公开(公告)号：US20140353517A1

公开(公告)日：2014-12-04

申请号：US14287767

申请日：2014-05-27

Applicant: SEN CORPORATION

Inventor： Mitsuaki Kabasawa ,  Kazuhiro Watanabe ,  Haruka Sasaki ,  Kouji Kato ,  Hitoshi Ando

IPC: H01J37/317

CPC classification number: H01J37/3172 ,  A61N5/1044 ,  G21K1/10 ,  H01J37/05 ,  H01J37/09 ,  H01J37/3007 ,  H01J37/3171

Abstract: A high-energy ion implanter includes a beam generation unit that includes an ion source and a mass analyzer, a high-energy multi-stage linear acceleration unit, a high-energy beam deflection unit that changes the direction of a high-energy ion beam toward a wafer, and a beam transportation unit that transports the deflected high-energy ion beam to the wafer. The beam transportation unit includes a beam shaper, a high-energy beam scanner, a high-energy beam collimator, and a high-energy final energy filter. Further, the high-energy beam collimator is an electric field type beam collimator that collimates a scan beam while performing the acceleration and the deceleration of a high-energy beam by an electric field.

Abstract translation: 高能离子注入机包括一个束生成单元，它包括一个离子源和一个质量分析器，一个高能多级线性加速单元，一个改变高能离子束方向的高能束偏转单元 以及将偏转的高能离子束传送到晶片的光束传送单元。 光束传输单元包括光束整形器，高能束扫描器，高能束准直仪和高能最终能量滤光器。 此外，高能量射束准直仪是在通过电场执行加速度和高能量光束的减速的同时准直扫描光束的电场型光束准直仪。

公开(公告)号：US08890068B2

公开(公告)日：2014-11-18

申请号：US14002275

申请日：2012-01-27

Applicant: Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

Inventor： Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

IPC: H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  G01N23/225 ,  G06T1/00

CPC classification number: H01J37/05 ,  G01N23/2251 ,  G06T1/00 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities.

Abstract translation: 提供了一种使具有不同能量的信号带电粒子的合成功能自动化的技术。 带电粒子束装置包括：带电粒子源，被配置为用一次带电粒子射线照射样品; 第一检测器，被配置为检测从所述样品产生的信号带电粒子的具有第一能量的第一信号电子; 第二检测器，被配置为检测从样品产生的信号带电粒子的具有第二能量的第二信号电子; 第一操作部，被配置为改变第一信号电子的信号强度和第二信号电子的信号强度的合成比，并且生成与每个合成比相对应的检测图像; 第二操作部，被配置为计算与针对每个合成比生成的检测图像的预定的两个区域相对应的信号强度的比率; 以及第三操作部件，被配置为基于信号强度比的变化来确定用于获取检测到的图像的混合比率。

公开(公告)号：US20140312223A1

公开(公告)日：2014-10-23

申请号：US14357139

申请日：2012-11-02

Applicant: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT CO., LTD

Inventor： Libo Peng ,  Huiyue Long ,  Junyu Xie

IPC: H01J49/30

CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057

Abstract: A broadband ion beam analyzer, used for isolating required ions from a broadband ion beam, comprises an upper magnetic pole (1), a lower magnetic pole (2), an upper excitation coil (3), a lower excitation coil (4), an analysis grating (7), and a magnetic yoke (5 and 6). The upper magnetic pole (1) and the lower magnetic pole (2) are both provided with a camber-shaped incident-end boundary (101) and a camber-shaped emergence side boundary (102). The camber radii (Rb) of the incident-end boundary (101) and of the emergence-end boundary (102) are equal to the deflection radius (R) of the required ions in the magnetic field. The required ions in the broadband ion beam are allowed to focus ideally at the mid-section of the magnetic field, to acquire an ideal focal spot having a size that equals to zero. This allows for acquisition of the optimal resolution by selecting an appropriate width for a minimal analysis gap (701), thus implementing complete isolation of the required ions from other ions in the broadband ion beam.

Abstract translation: 用于从宽带离子束分离所需离子的宽带离子束分析仪包括上磁极（1），下磁极（2），上激励线圈（3），下激励线圈（4） 分析光栅（7）和磁轭（5和6）。 上磁极（1）和下磁极（2）均设有弧形入射端边界（101）和弧形出射边界（102）。 入射端边界（101）和出射端边界（102）的弧度半径（Rb）等于磁场中所需离子的偏转半径（R）。 允许宽带离子束中所需的离子理想地聚焦在磁场的中间部分，以获得具有等于零的大小的理想焦斑。 这允许通过为最小分析间隙选择适当的宽度来获取最佳分辨率（701），从而实现所需离子与宽带离子束中的其它离子的完全隔离。

公开(公告)号：US08847148B2

公开(公告)日：2014-09-30

申请号：US13215514

申请日：2011-08-23

Applicant: Sean R. Kirkpatrick ,  Allen R. Kirkpatrick

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick

IPC: H01J37/00 ,  H01J37/147 ,  H01J37/317 ,  H01J37/05

CPC classification number: G03F1/80 ,  B24B37/04 ,  G03F1/82 ,  H01J37/05 ,  H01J37/147 ,  H01J37/317 ,  H01J37/3171 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  H01L21/02115 ,  H01L21/02274 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/26566 ,  H01L21/31105 ,  H01L21/31111 ,  H01L29/36 ,  H05H3/02 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/30

Abstract: An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials.

公开(公告)号：US08835866B2

公开(公告)日：2014-09-16

申请号：US13111634

申请日：2011-05-19

Applicant: James B. McGinn

Inventor： James B. McGinn

IPC: H01J1/50 ,  H01J37/05 ,  H01J49/28 ,  H01J37/15

CPC classification number: H01J37/05 ,  H01J37/15 ,  H01J49/288 ,  H01J2237/057 ,  H01J2237/31749

Abstract: An ExB Wien mass filter providing a method and structure for mechanically adjusting the magnetic field distributions at the mass filter entrance and exit end caps. The reluctance of the flux return path may be modified by configuring pluralities of magnetic shims within slots at the outer diameters of the entrance and exit end caps, and also by configuring pluralities of magnetic plug shims within circular flux dams surrounding the entrance and exit apertures. Advantages of purely mechanical adjustment for the magnetic fields of the present invention, compared with prior art electromagnet adjustment methods include greater reliability, simplicity, lower cost, and lack of power dissipation. The invention may employ either permanent magnets or electromagnets for generation of the mass-separation magnetic field.

Abstract translation: 提供了一种用于机械调节质量过滤器入口和出口端盖处的磁场分布的方法和结构的ExB维恩质量过滤器。 可以通过在入口和出口端盖的外径处的槽内配置多个磁性垫片，并且还可以通过在入口和出口孔周围的圆形焊剂坝内配置多个磁性塞子垫片来修改磁通返回路径的磁阻。 与现有技术的电磁调节方法相比，本发明的磁场纯机械调整的优点包括更高的可靠性，简便性，更低的成本和功耗的缺乏。 本发明可以采用永磁体或电磁体来产生质量分离磁场。

公开(公告)号：US08723135B2

公开(公告)日：2014-05-13

申请号：US13438424

申请日：2012-04-03

Applicant: Hilton Frank Glavish ,  Shojiro Dohi ,  Benjamin Thomas King

Inventor： Hilton Frank Glavish ,  Shojiro Dohi ,  Benjamin Thomas King

IPC: H01J3/20

CPC classification number: H01J37/05 ,  H01J37/1475 ,  H01J2237/055 ,  H01J2237/1523 ,  H01J2237/31701

Abstract: An ion beam bending magnet provides a curved path through the magnet for bending a ribbon-shaped ion beam having its major cross-sectional dimension normal to the bending plane of the magnet. The magnet comprises a ferromagnetic yoke surrounding the beam path and having an internal profile in cross-section formed of four angled sides. These sides are angled to the major dimension of the ribbon beam passing through the magnet, so that the internal profile of the yoke is relatively wide in the center of the ribbon beam and relatively narrow near the top and bottom edges of the ribbon beam. Electrical conductors against the internal surfaces of the yoke provide a uniform distribution of electrical current per unit length along the angled sides of the profile, providing a substantially uniform magnetic bending field within the magnet yoke.

Abstract translation: 离子束弯曲磁体提供穿过磁体的弯曲路径，用于弯曲具有垂直于磁体的弯曲平面的主横截面尺寸的带状离子束。 磁体包括铁磁磁轭，其围绕光束路径并且具有由四个成角度的侧面形成的横截面的内部轮廓。 这些侧面与通过磁体的带状束的主要尺寸成角度，使得轭的内部轮廓在带状束的中心处相对较宽，并且在带状束的顶部和底部边缘附近相对较窄。 抵靠轭的内表面的电导体沿着轮廓的成角度的侧面提供均匀分布的单位长度的电流，从而在磁轭内提供基本上均匀的磁弯曲场。

公开(公告)号：US20140124666A1

公开(公告)日：2014-05-08

申请号：US14126792

申请日：2012-04-16

Applicant: Yuko Sasaki ,  Hiroyuki Ito

Inventor： Yuko Sasaki ,  Hiroyuki Ito

IPC: H01J37/05 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.

Abstract translation: 提供了一种用于改善其能量过滤器的能量解决方案的带电粒子束装置。 在一个实施例中，带电粒子束装置包括偏转器，用于将从样品发射的带电粒子偏转到能量滤波器，并且针对多个偏转中的每一个发现随施加到能量滤波器的电压变化而引起的亮度值的变化 偏转器的条件以及使得亮度值的变化满足预定条件的偏转条件被设定为偏转器的偏转状态。

公开(公告)号：US08669523B2

公开(公告)日：2014-03-11

申请号：US13410506

申请日：2012-03-02

Applicant: Chien-Huei Chen ,  Peter White ,  Michael J. Van Riet ,  Sankar Venkataraman ,  Hai Jiang ,  Hedong Yang ,  Ajay Gupta

Inventor： Chien-Huei Chen ,  Peter White ,  Michael J. Van Riet ,  Sankar Venkataraman ,  Hai Jiang ,  Hedong Yang ,  Ajay Gupta

IPC: H01J37/28 ,  G01N23/04 ,  G06T5/50

CPC classification number: H01J37/28 ,  G01N23/04 ,  G06T5/50 ,  G06T7/001 ,  G06T2207/30148 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244

Abstract: One embodiment relates to a method of inspecting a site location on a target substrate. Contours are obtained, the contours having been generated from a reference image using a design clip. A target image of the site location is acquired. The contours are aligned to the target image, and contrast values are computed for pixels on the contours. A threshold is applied to the contrast values to determine contour-based defect blobs. Another embodiment relates to a method of generating contours for use in inspecting a site location for defects. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种检查目标基板上的位置位置的方法。 获得轮廓，使用设计剪辑从参考图像生成轮廓。 获取站点位置的目标图像。 轮廓与目标图像对齐，并且对轮廓线上的像素计算对比度值。 将阈值应用于对比度值以确定基于轮廓的缺陷斑点。 另一个实施例涉及一种产生用于检查位置缺陷的轮廓的方法。 还公开了其它实施例，方面和特征。

公开(公告)号：US08642956B2

公开(公告)日：2014-02-04

申请号：US13337033

申请日：2011-12-23

Applicant: Joerg Fober

Inventor： Joerg Fober

IPC: H01J37/26 ,  G01N23/00 ,  G21K5/00

CPC classification number: H01J37/26 ,  H01J37/05 ,  H01J37/244 ,  H01J2237/20221 ,  H01J2237/24585

Abstract: A transmission electron microscope comprises a high-voltage source for outputting a high voltage at two high-voltage outputs and outputting a control signal at a controller output; a focusing lens for focusing a beam; a monochromator which allows only those particles of the particle beam to pass whose kinetic energy is within an adjustable energy interval; an energy-dispersive component which deflects particles of different kinetic energies differently; a detector; and a controller connected to the controller output, which controls a beam deflector, arranged between the energy-dispersive component and the detector, the monochromator, or the energy-dispersive component in dependence on the control signal, or superposes plural of intensity distributions detected by the detector with an offset relative to one another, which offset is set in dependence on the control signal.

Abstract translation: 透射电子显微镜包括用于在两个高电压输出端输出高电压并在控制器输出端输出控制信号的高电压源; 用于聚焦光束的聚焦透镜; 单色仪，其仅允许粒子束的那些粒子通过，其动能在可调节的能量间隔内; 能量分散组件，其不同地偏转不同动能的颗粒; 检测器 以及控制器，其连接到控制器输出，其根据控制信号控制布置在能量色散部件和检测器，单色器或能量色散部件之间的光束偏转器，或叠加由 检测器相对于彼此具有偏移，该偏移根据控制信号设定。