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    ELECTRON LENS AND THE ELECTRON BEAM DEVICE
    21.
    发明申请
    ELECTRON LENS AND THE ELECTRON BEAM DEVICE 审中-公开
    电子镜头和电子束装置

    公开(公告)号：US20140252245A1

    公开(公告)日：2014-09-11

    申请号：US14271940

    申请日：2014-05-07

    Applicant: PARAM CORPORATION

    Inventor： Hiroshi Yasuda

    IPC: H01J37/143 ,  H01J37/30 ,  H01J37/317 ,  H01J3/24

    CPC classification number: H01J3/24 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/143 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/1405

    Abstract: There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.

    Abstract translation: 提供了一种用于使用永磁体有效地绘制精细图案的装置。 该装置具有由Z轴作为中心轴的圆柱形铁磁体构成的外筒201，位于外筒内部并沿着Z轴方向极化的圆柱形永磁体202，位于筒状永久磁铁内部的校正线圈204， 用于调整由圆柱形永磁体沿Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂 流过其中并控制圆筒形永磁体的温度变化。

    Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
    22.
    发明申请
    Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
    用于聚焦多个带电粒子束的多轴磁镜

    公开(公告)号：US20130153782A1

    公开(公告)日：2013-06-20

    申请号：US13464261

    申请日：2012-05-04

    Applicant: Weiming Ren ,  Zhongwei Chen

    Inventor： Weiming Ren ,  Zhongwei Chen

    IPC: H01J3/20 ,  H01F7/02

    CPC classification number: H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

    Abstract: The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

    Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁性转印透镜，另一种类型是可能需要较低磁动势的多轴磁性非浸没物镜，另外一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

    Method and apparatus for magnetic focusing of off-axis electron beam
    25.
    发明申请
    Method and apparatus for magnetic focusing of off-axis electron beam 有权
    离轴电子束磁聚焦的方法和装置

    公开(公告)号：US20040007959A1

    公开(公告)日：2004-01-15

    申请号：US10192772

    申请日：2002-07-09

    Applicant: Communications and Power Industries, Inc., a Delaware Corporation

    Inventor： Mark J. Cattelino ,  Fred I. Friedlander

    IPC: H01J029/46

    CPC classification number: H01J23/0876 ,  H01J3/20 ,  H01J23/087

    Abstract: Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device. The magnetic field symmetry is independent of beam voltage, beam current and applied magnetic field strength. A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a multi-beam electron beam device. The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the device. The flux plate includes apertures for each beam of the multi-beam device. A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps may be implemented in a number of ways all of which have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the device as linear beams.

    Abstract translation: 围绕多光束电子束装置的每个光束的纵向轴线提供轴向对称的磁场。 磁场对称性与束电压，束电流和施加的磁场强度无关。 通量均衡器组件设置在阴极和阳极之间以及多束电子束装置的阴极附近。 组件包括完全包含在装置的磁聚焦电路内的铁磁通量板。 磁通板包括用于多光束装置的每个光束的孔。 磁通平衡间隙或间隙设置在磁通板中，以在磁通板中的磁场中产生扰动，其反映由波束的离轴位置引起的不对称性。 间隙可以以多​​种方式实现，其中所有这些都具有产生局部连续变化的磁阻的作用，其局部地反映磁场不对称性。 通量均衡器组件防止或基本上减少光束扭曲，并将器件的所有电子束保持为线性光束。

    Permanent magnet based high performance multi-axis immersion electron lens array with low axial leakage field
    30.
    发明授权
    Permanent magnet based high performance multi-axis immersion electron lens array with low axial leakage field 有权
    永磁高性能多轴浸没电子透镜阵列具有低轴向泄漏场

    公开(公告)号：US09165745B2

    公开(公告)日：2015-10-20

    申请号：US14196190

    申请日：2014-03-04

    Applicant: Tao Luo

    Inventor： Tao Luo

    IPC: H01J37/145 ,  H01J37/14 ,  H01J37/143 ,  H01J3/20

    CPC classification number: H01J37/14 ,  H01J3/20 ,  H01J37/143 ,  H01J37/145 ,  H01J2237/1405

    Abstract: An apparatus includes a magnetic adjustment lens positioned at the electron beam path between the electron source and sample, the magnetic adjustment lens excited by an electric coil, and a permanent magnet lens positioned below the magnetic adjustment lens to focus the electron beam onto the sample surface, the permanent magnet lens excited by one or more permanent ring magnets enclosed except on a bottom surface by a magnetic field conductor. The magnetic adjustment lens may be excited to eliminate magnetic field leakage of the permanent magnet lens.

    Abstract translation: 一种设备包括位于电子源和样品之间的电子束路径处的磁调节透镜，由电线圈激励的磁调节透镜和位于磁调节透镜下方的永磁体透镜，以将电子束聚焦到样品表面上 由一个或多个永久环形磁体激励的永磁体透镜，除了在磁场表面之外被磁场导体所包围。 可以激励磁调节透镜以消除永磁体透镜的磁场泄漏。

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