公开(公告)号：US09837242B2

公开(公告)日：2017-12-05

申请号：US15614941

申请日：2017-06-06

Applicant: THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC

Inventor： Alan Ronemus

IPC: H01J37/00 ,  H01J37/09 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/09 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/2442

Abstract: A charged particle filter includes a magnetic deflector having a bore along an axis thereof passing through the magnetic deflector from a sample end to a detector end of the magnetic deflector, and through which bore charged particles pass when in use, the magnetic deflector being formed from two magnets positioned around the bore, with a gap between the two magnets, the two magnets each having a linear central section and two ends, each end forming a curved surface, the curved surface having an aspect ratio defined by a height in a range of between one tenth and ten times the gap between the two magnets, and a width in a range of between one tenth and ten times the gap.

公开(公告)号：US09778215B2

公开(公告)日：2017-10-03

申请号：US13662072

申请日：2012-10-26

Applicant: FEI Company

Inventor： Michael James Owen ,  Michael Buhot

IPC: G01N23/225 ,  H01J37/28 ,  H01J37/256

CPC classification number: G01N23/2252 ,  G01N2223/418 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/2804 ,  H01J2237/2807

Abstract: The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows untrained operators to use it, as opposed to previous systems, which required extensive training and expertise.

公开(公告)号：US09627175B2

公开(公告)日：2017-04-18

申请号：US14882817

申请日：2015-10-14

Applicant: JEOL Ltd.

Inventor： Masaki Morita ,  Akira Yasuhara

IPC: H01J37/28 ,  H01J37/22

CPC classification number: H01J37/222 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2442 ,  H01J2237/24585 ,  H01J2237/2802

Abstract: An electron microscope includes an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical patterns, and a spectrum at each pixel of the electron microscope image, and an elemental map generation section that adds up the spectrum at each pixel of each of a plurality of areas that are included in the electron microscope image and have an identical size to generate an elemental mapping image of the specimen.

公开(公告)号：US20170018397A1

公开(公告)日：2017-01-19

申请号：US15124684

申请日：2014-03-28

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuya SUZUKI ,  Isao NAGAOKI ,  Hiroaki MATSUMOTO

IPC: H01J37/20 ,  G01N23/225 ,  H01J37/26 ,  H01J37/244

CPC classification number: H01J37/20 ,  G01N23/2252 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/026 ,  H01J2237/2442 ,  H01J2237/2445 ,  H01J2237/2561

Abstract: In energy dispersive X-ray (EDX) analysis, an increase in the area of a detector causes a decrease in the peak/background ratio of a detected signal. In order to solve this problem, a sample holder has a main body part for holding a sample, and a sample retaining part detachably provided to the main body part; the sample retaining part being mounted on the main body part to secure the sample held by the main body part, and the sample retaining part having: a first hole for allowing a charged particle beam to pass therethrough; and a second hole for introducing, from among signals generated by the sample, only a specific signal into a detector. The sample holder is applicable to a charged particle beam device, for example.

Abstract translation: 在能量色散X射线（EDX）分析中，检测器面积的增加引起检测信号的峰值/背景比的降低。 为了解决这个问题，样本保持器具有用于保持样本的主体部分和可拆卸地设置在主体部分上的样本保持部分; 所述样本保持部分安装在所述主体部分上以固定由所述主体部分保持的样本，并且所述样本保持部分具有：用于允许带电粒子束通过的第一孔; 以及从样本产生的信号中仅将特定信号引入检测器的第二孔。 样品架例如适用于带电粒子束装置。

公开(公告)号：US20150168320A1

公开(公告)日：2015-06-18

申请号：US14415405

申请日：2013-07-17

Applicant: Bruker Nano GmbH

Inventor： Meiken Falke ,  Waldemar Hahn

IPC: G01N23/225 ,  G01T1/24

CPC classification number: G01N23/2252 ,  G01T1/244 ,  H01J37/244 ,  H01J2237/2442 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/26

Abstract: The invention relates to a photon detector (10), in particular an x-ray detector, in the form of a measurement finger, which extends along a detector axis (23) and has a detector head (11) at a first end of the measurement finger, wherein the detector head (11) comprises a plurality of at least two detector modules (22), each comprising a sensor chip (12) sensitive to photon radiation (14), in particular x-radiation, said sensor chip having an exposed end face (13) and a face facing away from the end face (13), wherein the detector modules (22) are arranged around the detector axis (23) in a plane (24) extending orthogonally to the detector axis (23).

Abstract translation: 本发明涉及一种以检测器轴线（23）延伸的测量手指形式的光子检测器（10），特别是X射线检测器，并且在第一端处具有检测器头（11） 其中所述检测器头部（11）包括多个至少两个检测器模块（22），每个检测器模块包括对光子辐射（14）敏感的传感器芯片（12），特别是x辐射，所述传感器芯片具有 所述检测器模块（22）围绕所述检测器轴线（23）布置在垂直于所述检测器轴线（23）延伸的平面（24）中， 。

公开(公告)号：US20140332692A1

公开(公告)日：2014-11-13

申请号：US14125470

申请日：2012-06-18

Applicant: Gerhard Lutz ,  Heike Soltau ,  Adrian Niculae

Inventor： Gerhard Lutz ,  Heike Soltau ,  Adrian Niculae

IPC: H01L31/115 ,  G01T1/24 ,  H01L27/144 ,  H01L31/02

CPC classification number: H01L31/115 ,  G01T1/247 ,  G01T1/2928 ,  H01J37/244 ,  H01J2237/2442 ,  H01J2237/2448 ,  H01L27/1443 ,  H01L31/02005 ,  H01L31/022416

Abstract: The invention relates to a semiconductor drift detector for detecting radiation, comprising a semiconductor substrate (HS), in which signal charge carriers are generated during operation, to be precise by incident photons (h·f) having a specific photon energy, more particularly in the form of X-ray fluorescent radiation, and/or by incident electrons (θ), having a specific signal charge carrier current, more particularly in the form of back-scattered electrons (θ), and comprising a read-out anode (A) for generating an electrical output signal in a manner dependent on the signal charge carriers, and comprising an erase contact (RC) for erasing the signal charge carriers that have accumulated in the semiconductor substrate (HS). The invention provides for the semiconductor drift detector to be optionally operable in a first operating mode or in a second operating mode, wherein the semiconductor drift detector in the first operating mode measures the photon energy of the incident photons (h·f), whereas the semiconductor drift detector in the second operating mode measures the signal charge carrier current. Furthermore, the invention encompasses a corresponding operating method.

Abstract translation: 本发明涉及一种用于检测辐射的半导体漂移检测器，其包括半导体衬底（HS），其中在操作期间产生信号电荷载流子，由具有特定光子能量的入射光子（h·f）精确地，更具体地， X射线荧光辐射的形式和/或具有特定信号电荷载流子的入射电子（＆amp; thetas），更特别地以反向散射电子的形式（＆Theta），并且包括读出的阳极 （A），用于以取决于信号电荷载流子的方式产生电输出信号，并且包括用于擦除积聚在半导体衬底（HS）中的信号电荷载流子的擦除接触件（RC）。 本发明提供半导体漂移检测器可选地在第一操作模式或第二操作模式中可操作，其中第一操作模式中的半导体漂移检测器测量入射光子（h·f）的光子能量，而 半导体漂移检测器在第二种工作模式下测量信号载流子电流。 此外，本发明包括相应的操作方法。

公开(公告)号：US20140124665A1

公开(公告)日：2014-05-08

申请号：US14071155

申请日：2013-11-04

Applicant: HORIBA, Ltd.

Inventor： Kengo YASUI ,  Kazutaka OKAMOTO ,  Shuji TAKADA

IPC: G01T1/24 ,  G01N23/223 ,  H01J37/244 ,  H01J37/285

CPC classification number: G01T1/241 ,  G01N23/223 ,  G01N2223/076 ,  G01T1/244 ,  H01J37/244 ,  H01J37/285 ,  H01J2237/2442

Abstract: A radiation detector employed in a radiation detection apparatus and a fluorescent X-ray analyzer includes: a first circuit board on which a semiconductor radiation sensor is mounted and which is cooled by a Peltier device (an electronic cooling unit); and a second circuit board set apart from the first circuit board. A plurality of lead pins are joined to the second circuit board. Then, the first circuit board and the second circuit board are wire-bonded to each other. In comparison with conventional wire bonding performed onto the tips of lead pins, the work of connection is easy, the productivity is high, and the reliability of connection is high. Further, the second circuit board not requiring cooling is set apart so that cooling is concentrated on the first circuit board. This permits size reduction of the radiation detector.

Abstract translation: 用于放射线检测装置和荧光X射线分析仪的放射线检测器包括：安装了半导体辐射传感器并由珀耳帖装置（电子冷却单元）冷却的第一电路板; 以及与第一电路板分离的第二电路板。 多个引脚与第二电路板接合。 然后，第一电路板和第二电路板彼此线接合。 与在引脚的尖端执行的常规引线相比，连接工作容易，生产率高，连接可靠性高。 此外，不需要冷却的第二电路板被分开，使得冷却集中在第一电路板上。 这允许放射线检测器的尺寸减小。

公开(公告)号：US08450215B2

公开(公告)日：2013-05-28

申请号：US12806111

申请日：2010-08-05

Applicant: Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

Inventor： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC: H01L21/302 ,  H01L21/461

CPC classification number: G01N23/2252 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24465 ,  H01J2237/2448

Abstract: An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

Abstract translation: 检查方法包括将颗粒束聚焦到样品上; 操作位于样品附近的至少一个检测器; 将由所述至少一个检测器产生的检测信号分配给不同的强度间隔; 基于分配给所述强度间隔的检测信号，确定与入射到所述检测器上的电子有关的至少一个第一信号分量; 以及基于分配给所述强度间隔的检测信号，确定与入射在所述检测器上的X射线有关的至少一个第二信号分量。

公开(公告)号：US07592591B2

公开(公告)日：2009-09-22

申请号：US11784686

申请日：2007-04-09

Applicant: Satoshi Notoya

Inventor： Satoshi Notoya

IPC: H01J37/26

CPC classification number: H01J37/256 ,  G01N23/22 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/2445 ,  H01J2237/2485 ,  H01J2237/2561

Abstract: An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted for analysis points having different compositions in a case where the numerous analysis points having the plural compositions are analyzed by WDS (wavelength-dispersive X-ray spectrometer). At each analysis point, the analyzer performs quantitative analysis using EDS (energy-dispersive X-ray spectrometer) permitting easy and quick analysis. Based on the results, chemical compounds are identified. If the results indicate that there is any new compound, analytical conditions adapted for the new compound are selected. If the new compound is already registered in a database, the analytical conditions are read from the database. Then, quantitative analysis is performed using WDS.

Abstract translation: 一种电子探针X射线分析仪，其能够通过在具有多种组成的多个分析点的情况下通过对具有不同组成的分析点进行分析的分析条件进行分析来自动设定适当的分析条件， 波长色散X射线光谱仪）。 在每个分析点，分析仪使用EDS（能量色散X射线光谱仪）进行定量分析，可以方便快捷的分析。 根据结果​​，确定了化合物。 如果结果表明存在任何新化合物，则选择适合新化合物的分析条件。 如果新的化合物已经在数据库中注册，则从数据库中读取分析条件。 然后，使用WDS进行定量分析。

公开(公告)号：US20090033913A1

公开(公告)日：2009-02-05

申请号：US12184500

申请日：2008-08-01

Applicant: RICHARD B. MOTT

Inventor： RICHARD B. MOTT

IPC: G01J3/00 ,  G01R35/00

CPC classification number: G01R29/02 ,  G01T1/36 ,  H01J2237/2442 ,  H01J2237/28

Abstract: A method of adjusting a response of an energy measuring filter, such as an FIR filter, of a pulse processor based on a slope of a preamplifier signal having a plurality of step edges each corresponding to a respective photon is provided that includes receiving a digital version of the preamplifier signal comprising a plurality of successive digital samples each having a digital value, the preamplifier signal having a portion defined by a first one of the step edges and a second one of the step edges immediately following the first one of the step edges, using the digital values of each of the digital samples associated with the portion to determine an average slope of the portion normalized by a length of the portion, and using the average slope of the portion normalized by a length of the portion to correct the response of the energy measuring filter.

Abstract translation: 提供了一种基于具有各自对应于各个光子的多个阶跃边缘的前置放大器信号的斜率来调整脉冲处理器的诸如FIR滤波器的能量测量滤波器的响应的方法，其包括接收数字版本 所述前置放大器信号包括多个连续的数字样本，每个具有数字值，所述前置放大器信号具有由所述步骤边缘中的第一个边界限定的部分和紧跟在所述台阶边缘中的第一个之后的所述台阶边缘中的第二个， 使用与该部分相关联的每个数字样本的数字值来确定由该部分的长度归一化的部分的平均斜率，并且使用通过该部分的长度归一化的部分的平均斜率来校正响应的响应 能量测量滤波器。