Abstract:
A thin film transistor comprises an insulator interposed between a gate electrode and a polycrystalline silicon semiconductor layer, with the polycrystalline silicon semiconductor layer having a source region and a drain region with a channel between the source region and the drain region. The insulator comprises an ONO structure having an interfacial oxide layer in contact with the polycrystalline silicon semiconductor layer, a cap oxide layer in contact with the gate electrode, and a nitride layer interposed between the interfacial oxide layer and the nitride layer.
Abstract:
A method for fabricating a thin film transistor includes the steps of: forming a semiconductor layer and a gate electrode on an insulating substrate with a gate insulating film interposed therebetween; and implanting an impurity element into a surface of the semiconductor layer by accelerating hydrogen ions and ions of an element of the group III or the group V of the periodic table using at least one of the gate electrode and a resist mask used for forming the gate electrode as a mask, so as to perform both formation of source and drain regions and hydrogenation of a channel region, wherein the concentration of hydrogen ions in the channel region of the semiconductor layer is regulated in the range of 1.times.10.sup.19 ions/cm.sup.3 to 1.times.10.sup.20 ions/cm.sup.3.
Abstract translation:一种制造薄膜晶体管的方法包括以下步骤:在绝缘基板上形成半导体层和栅电极,其间插有栅绝缘膜; 以及通过使用用于形成栅极的栅电极和抗蚀剂掩模中的至少一个来加速元素周期表中第III族元素或第V族元素的氢离子和离子,将杂质元素注入到半导体层的表面中 电极作为掩模,以便同时进行源区和漏区的形成和沟道区的氢化,其中半导体层的沟道区中的氢离子的浓度在1×1019离子/ cm 3至1×1020离子的范围内 / cm3。
Abstract:
An ion implantation apparatus having a plasma source for generating ions, an ion accelerator for accelerating the generated ions, and a substrate holder provided on a position which the accelerated ions irradiate, wherein a current density of a desired kind of ions is measured by an electromagnetic ion energy analyzer having an electric field and a magnetic field, thereby controlling a dose of the ions.
Abstract:
An electrode pattern forming method comprising the steps of: forming a transparent conductive film on a substrate, covering said transparent conductive film with an aluminum film, forming a resist material film for etching on said aluminum film, exposing said resist material film followed by developing by immersing said substrate in an electrolyte to form a resist pattern, and patterning said aluminum film using said resist pattern as a mask;the formation of said resist pattern in said electrolyte being conducted with another transparent conductive film which is in direct contact with said electrolyte and electrically connected to said aluminum film.
Abstract:
A TFTs fabricating process practicable at a low temperature, which includes the steps of forming a multi-layer body on a substrate, the multi-layer body including a semiconductor layer, a gate insulating layer and a lower thin layer, patterning the multi-layer body into islands, thereby removing the other portions of the multi-layer body, forming an insulating layer on the sides of the island-patterned multi-layered portion by etching at a selective ratio between the constituents of the insulating layer and the lower thin layer, forming an upper thin layer, and etching the upper and lower thin layers into upper and lower gate electrodes by use of one resist pattern.
Abstract:
There is described an inverter type resistance welding machine comprising one rectifier, one inverter connected in series to the rectifier, and a plurality of welding current elements connected in series between a plurality of welding transformers and an output of one inverter. It is possible to reduce the space of installation of the resistance welding machine and cost involved in the installation thereof and reduce a weld time.
Abstract:
A current sensor assures the detection of a current flowing through a welder conductor without requiring a particular power source, and indicates the current state with the aid of a lamp. In one embodiment, a welder conductor penetrates a toroidal core across which connects a slider resistor whose sliding arm connects through a rectifier circuit, and a parallel circuit of a capacitor and a resistor, to a lamp. A second embodiment imterposed between the parallel circuit and lamp wherein a series circuit of a second resistor and a Zener diode, and a transistor base is connected to a connection point between the second resistor and a Zener diode, and the emitter-collector circuit of which transistor drives the lamp. A third embodiment adds a further series circuit of another lamp and resistor across the parallel circuit and across the series circuit of the second resistor and the Zener diode. Also, the collector of the transistor is connected to the control terminal of a thyristor, the cathode of which thyristor is connected to the output terminal of the rectifier circuit and to the anode of which thyristor the lamp is connected. The other end of which lamp connects to the other output terminal of said rectifier circuit.
Abstract:
Fuel consumption of a declerating automotive vehicle internal combustion engine is reduced while preventing stalling. In response to a valve for selectively supplying air and fuel to the engine being in a fully closed condition, a first signal is derived. In response to the engine speed dropping below a first predetermined value a second signal is derived. In response to derivation of the first and second signals a controller for the valve is activated. The controller responds to engine and brake responsive parameters of the vehicle for opening the valve in respone to any of: (a) the engine being decelerated under no load, and (b) the brake being abruptly applied and (c) the engine speed dropping below a second value. The second value is less than the first value and is determined in response to the rate of change of engine speed.
Abstract:
A bidirectional switch includes a plurality of unit cells 11 including a first ohmic electrode 15, a first gate electrode 17, a second gate electrode 18, and a second ohmic electrode 16. The first gate electrodes 15 are electrically connected via a first interconnection 31 to a first gate electrode pad 43. The second gate electrodes 18 are electrically connected via a second interconnection 32 to a second gate electrode pad 44. A unit cell 11 including a first gate electrode 17 having the shortest interconnect distance from the first gate electrode pad 43 includes a second gate electrode 18 having the shortest interconnect distance from the second gate electrode pad 44.
Abstract:
An electronic equipment includes a cooling system using boiling and condensation of a refrigerant, especially stabilizes the cooling performance, and reduces the influence which vibration accompanying phase change of boiling and condensation gives to the electronic equipment. Electronic equipment includes a cooling system including a cooling part which cools heat generating from a heat generator such as a heat generating component by using boiling of a refrigerant and is thermally connected to the heat generator such as the heat generating element, a heat radiation part which radiates heat absorbed by the refrigerant in the cooling part by condensation, a refrigerant drive part for delivering the condensed refrigerant to the cooling part again, and piping which fluidly connects them, and the electronic equipment includes preliminary heating means for heating the refrigerant, which flows to the cooling part from the refrigerant drive part, between the refrigerant drive part and the cooling part.