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    Method and system for generating a light-sustained plasma in a flanged transmission element
    25.
    发明授权
    Method and system for generating a light-sustained plasma in a flanged transmission element 有权

    公开(公告)号：US09775226B1

    公开(公告)日：2017-09-26

    申请号：US14231196

    申请日：2014-03-31

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine

    IPC: A61N5/06 ,  H05H1/24

    CPC classification number: H05H1/24 ,  H01J61/52 ,  H01J65/04

    Abstract: A system for forming a light-sustained plasma capable of emitting vacuum ultraviolet light includes an illumination source configured to generate illumination, a plasma cell including a transmission element having one or more openings, one or more flanges disposed at the openings of the transmission element and configured to enclose the internal volume of the transmission element in order to contain a volume of gas within the plasma cell. The system further includes a collector element arranged to focus the illumination from the illumination source into the volume of gas to generate a plasma within the volume of gas contained within the plasma cell. Further, the plasma emits broadband radiation including at least vacuum ultraviolet radiation. In addition, the transmission element of the plasma cell is transparent to the illumination generated by the illumination source and at least the vacuum ultraviolet radiation emitted by the plasma.

    Non-Contact Thermal Measurements of VUV Optics
    26.
    发明申请
    Non-Contact Thermal Measurements of VUV Optics 审中-公开

    公开(公告)号：US20170153145A1

    公开(公告)日：2017-06-01

    申请号：US15360722

    申请日：2016-11-23

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Kenneth P. Gross

    IPC: G01J5/10 ,  H04N5/225 ,  H04N5/33

    CPC classification number: G01J5/10 ,  G01J5/0003 ,  G01J5/524 ,  G01J2005/0077 ,  G01J2005/103

    Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.

    Light source with nanostructured antireflection layer
    28.
    发明授权
    Light source with nanostructured antireflection layer 有权
    具有纳米结构抗反射层的光源

    公开(公告)号：US09530636B2

    公开(公告)日：2016-12-27

    申请号：US14660849

    申请日：2015-03-17

    Applicant: KLA-Tencor Corporation

    Inventor： Sebaek Oh ,  Anant Chimmalgi ,  Rahul Yadav ,  Matthew Derstine ,  Ilya Bezel

    IPC: H01J65/00 ,  H01J61/02 ,  H01J65/04 ,  H01J61/32

    CPC classification number: H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

    Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

    Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

    Method and System for Controlling Convective Flow in a Light-Sustained Plasma
    29.
    发明申请
    Method and System for Controlling Convective Flow in a Light-Sustained Plasma 有权
    用于控制轻维持等离子体中对流的方法和系统

    公开(公告)号：US20160322211A1

    公开(公告)日：2016-11-03

    申请号：US15207136

    申请日：2016-07-11

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Kenneth P. Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

    IPC: H01J65/04 ,  H05H1/24

    CPC classification number: H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

    Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

    Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。

    Laser sustained plasma light source with electrically induced gas flow
    30.
    发明授权
    Laser sustained plasma light source with electrically induced gas flow 有权
    具有电致气流的激光持续等离子体光源

    公开(公告)号：US09390892B2

    公开(公告)日：2016-07-12

    申请号：US13924608

    申请日：2013-06-23

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel

    IPC: H01J7/24 ,  H05B31/26 ,  H01J37/32 ,  H01J61/04 ,  H01J61/12 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/28 ,  H01J65/04

    CPC classification number: H01J37/32055 ,  H01J61/04 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/28 ,  H01J65/04

    Abstract: A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.

    Abstract translation: 激光持续等离子体光源包括等离子体灯泡，其包含由等离子体灯泡内的电流驱动的工作气体流。 带电粒子被引入等离子体灯泡的工作气体中。 维持在不同电压水平的电极布置驱动带电粒子通过工作气体。 带电粒子在工作气体内的移动导致工作气体通过夹带在带电粒子的运动方向上流动。 所产生的工作气体流量增加等离子体周围的对流并且增加激光到等离子体相互作用。 可以通过控制存在于每个电极上的电压来稳定和控制等离子体灯泡内的工作气体流。 通过等离子体的工作气体的更稳定的流动有助于在等离子体灯泡内更稳定的等离子体形状和位置。

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