公开(公告)号：US20080136034A1

公开(公告)日：2008-06-12

申请号：US12032707

申请日：2008-02-18

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L23/48

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/60 ,  H01L24/02 ,  H01L24/10 ,  H01L24/11 ,  H01L24/13 ,  H01L27/0251 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2224/0231 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/0401 ,  H01L2224/13 ,  H01L2224/13099 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04953 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/19041 ,  H01L2924/30105 ,  Y10T29/49124 ,  Y10T29/49204 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

公开(公告)号：US20080124918A1

公开(公告)日：2008-05-29

申请号：US12025001

申请日：2008-02-02

申请人： Jin-Yuan Lee ,  Mou-Shiung Lin ,  Ching-Cheng Huang

发明人： Jin-Yuan Lee ,  Mou-Shiung Lin ,  Ching-Cheng Huang

IPC分类号： H01L21/4763

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/60 ,  H01L24/02 ,  H01L24/10 ,  H01L24/11 ,  H01L24/13 ,  H01L27/0251 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2224/0231 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/0401 ,  H01L2224/13 ,  H01L2224/13099 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04953 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/19041 ,  H01L2924/30105 ,  Y10T29/49124 ,  Y10T29/49204 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

公开(公告)号：US20080122099A1

公开(公告)日：2008-05-29

申请号：US12024999

申请日：2008-02-02

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L23/52

CPC分类号： H01L23/5283 ,  H01L23/5286 ,  H01L23/5329 ,  H01L24/02 ,  H01L24/10 ,  H01L24/11 ,  H01L24/13 ,  H01L27/0248 ,  H01L2224/0231 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/0401 ,  H01L2224/05073 ,  H01L2224/0558 ,  H01L2224/05644 ,  H01L2224/05655 ,  H01L2224/05657 ,  H01L2224/13 ,  H01L2224/13099 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04953 ,  H01L2924/12044 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

公开(公告)号：US20080050912A1

公开(公告)日：2008-02-28

申请号：US11930182

申请日：2007-10-31

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L21/4763

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/60 ,  H01L24/02 ,  H01L24/10 ,  H01L24/11 ,  H01L24/13 ,  H01L27/0251 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2224/0231 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/0401 ,  H01L2224/13 ,  H01L2224/13099 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04953 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/19041 ,  H01L2924/30105 ,  Y10T29/49124 ,  Y10T29/49204 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

公开(公告)号：US20080048328A1

公开(公告)日：2008-02-28

申请号：US11930181

申请日：2007-10-31

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L23/48

CPC分类号： H01L23/5283 ,  H01L23/5286 ,  H01L23/5329 ,  H01L24/02 ,  H01L24/10 ,  H01L24/11 ,  H01L24/13 ,  H01L27/0248 ,  H01L2224/0231 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/0401 ,  H01L2224/05073 ,  H01L2224/0558 ,  H01L2224/05644 ,  H01L2224/05655 ,  H01L2224/05657 ,  H01L2224/13 ,  H01L2224/13099 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04953 ,  H01L2924/12044 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

公开(公告)号：US06936531B2

公开(公告)日：2005-08-30

申请号：US10690250

申请日：2003-10-20

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L21/02 ,  H01L21/4763 ,  H01L21/768 ,  H01L23/48 ,  H01L23/52 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  H01L23/60 ,  H01L27/06 ,  H01L27/08 ,  H01L21/44 ,  H05K3/00

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/53295 ,  H01L23/60 ,  H01L24/02 ,  H01L24/10 ,  H01L24/11 ,  H01L24/13 ,  H01L27/0251 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2224/0231 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/0401 ,  H01L2224/13 ,  H01L2224/13099 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04953 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15174 ,  H01L2924/19041 ,  H01L2924/30105 ,  Y10T29/49124 ,  Y10T29/49204 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

摘要翻译： 芯片结构包括基板，第一堆叠层，钝化层和第二堆积层。 基板包括放置在基板的表面上的许多电气装置。 第一组合层位于基底上。 第一组合层设置有第一电介质体和第一互连方案，其中第一互连方案与第一介电体内部交错并电连接到电气装置。 第一互连方案由第一金属层和插塞构成，其中相邻的第一金属层通过插塞电连接。 钝化层设置在第一堆叠层上并且设有暴露第一互连方案的开口。 第二堆叠层形成在钝化层上。 第二组合层设置有第二电介质体和第二互连方案，其中第二互连方案在第二介电体内部交织并与第一互连方案电连接。 第二互连方案由至少一个第二金属层和至少一个通孔金属填料构成，其中第二金属层电连接到通孔金属填料。 第二金属层的迹线的厚度，宽度和横截面积分别大于第一金属层的厚度，宽度和横截面面积。

公开(公告)号：US20050121771A1

公开(公告)日：2005-06-09

申请号：US10977289

申请日：2004-10-28

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L21/60 ,  H01L23/31 ,  H01L23/36 ,  H01L23/498 ,  H01L23/538 ,  H01L23/12 ,  H01L21/4763

CPC分类号： H01L24/19 ,  H01L21/568 ,  H01L23/3114 ,  H01L23/36 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/5389 ,  H01L24/97 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/24137 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/15174 ,  H01L2924/15311 ,  H01L2924/15747 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2224/82 ,  H01L2224/83 ,  H01L2924/00

摘要： An integrated chip package structure and method of manufacturing the same is by adhering dies on a metal substrate and forming a thin-film circuit layer on top of the dies and the metal substrate. Wherein the thin-film circuit layer has an external circuitry, which is electrically connected to the metal pads of the dies, that extends to a region outside the active surface of the dies for fanning out the metal pads of the dies. Furthermore, a plurality of active devices and an internal circuitry is located on the active surface of the dies. Signal for the active devices are transmitted through the internal circuitry to the external circuitry and from the external circuitry through the internal circuitry back to other active devices. Moreover, the chip package structure allows multiple dies with different functions to be packaged into an integrated package and electrically connecting the dies by the external circuitry.

摘要翻译： 集成芯片封装结构及其制造方法是通过在金属基板上附着金属模并在金属基板的顶部形成薄膜电路层。 其中薄膜电路层具有电连接到模具的金属焊盘的外部电路，其延伸到模具的有效表面外部的区域，以扇出模具的金属焊盘。 此外，多个有源器件和内部电路位于管芯的有效表面上。 有源器件的信号通过内部电路传输到外部电路，并通过内部电路从外部电路传输回其他有源器件。 此外，芯片封装结构允许将具有不同功能的多个裸片封装在集成封装中并通过外部电路电连接裸片。

公开(公告)号：US06762115B2

公开(公告)日：2004-07-13

申请号：US10125226

申请日：2002-04-16

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L2144

CPC分类号： H01L28/10 ,  H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/60 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/20 ,  H01L2221/1036 ,  H01L2224/05546 ,  H01L2924/01019 ,  H01L2924/12044 ,  H01L2924/15174 ,  H01L2924/00

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

公开(公告)号：US06756295B2

公开(公告)日：2004-06-29

申请号：US10124388

申请日：2002-04-15

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L2144

CPC分类号： H01L21/768 ,  H01L21/76807 ,  H01L21/76838 ,  H01L23/522 ,  H01L23/5222 ,  H01L23/5223 ,  H01L23/5227 ,  H01L23/5228 ,  H01L23/5283 ,  H01L23/5286 ,  H01L23/5329 ,  H01L23/60 ,  H01L24/05 ,  H01L24/13 ,  H01L24/45 ,  H01L27/0676 ,  H01L27/08 ,  H01L28/10 ,  H01L28/20 ,  H01L2221/1036 ,  H01L2224/0401 ,  H01L2224/16 ,  H01L2224/45 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/12044 ,  H01L2924/15174 ,  H01L2924/19041 ,  H01L2924/19051 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2224/48 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/45099

摘要： A chip structure comprises a substrate, a first built-up layer, a passivation layer and a second built-up layer. The substrate includes many electric devices placed on a surface of the substrate. The first built-up layer is located on the substrate. The first built-up layer is provided with a first dielectric body and a first interconnection scheme, wherein the first interconnection scheme interlaces inside the first dielectric body and is electrically connected to the electric devices. The first interconnection scheme is constructed from first metal layers and plugs, wherein the neighboring first metal layers are electrically connected through the plugs. The passivation layer is disposed on the first built-up layer and is provided with openings exposing the first interconnection scheme. The second built-up layer is formed on the passivation layer. The second built-up layer is provided with a second dielectric body and a second interconnection scheme, wherein the second interconnection scheme interlaces inside the second dielectric body and is electrically connected to the first interconnection scheme. The second interconnection scheme is constructed from at least one second metal layer and at least one via metal filler, wherein the second metal layer is electrically connected to the via metal filler. The thickness, width, and cross-sectional area of the traces of the second metal layer are respectively larger than those of the first metal layers.

摘要翻译： 芯片结构包括基板，第一堆叠层，钝化层和第二堆积层。 基板包括放置在基板的表面上的许多电气装置。 第一组合层位于基底上。 第一组合层设置有第一电介质体和第一互连方案，其中第一互连方案与第一介电体内部交错并电连接到电气装置。 第一互连方案由第一金属层和插塞构成，其中相邻的第一金属层通过插塞电连接。 钝化层设置在第一堆叠层上并且设有暴露第一互连方案的开口。 第二堆叠层形成在钝化层上。 第二组合层设置有第二电介质体和第二互连方案，其中第二互连方案在第二介电体内部交织并与第一互连方案电连接。 第二互连方案由至少一个第二金属层和至少一个通孔金属填料构成，其中第二金属层电连接到通孔金属填料。 第二金属层的迹线的厚度，宽度和横截面积分别大于第一金属层的厚度，宽度和横截面面积。

公开(公告)号：US06746898B2

公开(公告)日：2004-06-08

申请号：US10174462

申请日：2002-06-17

申请人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

发明人： Mou-Shiung Lin ,  Jin-Yuan Lee ,  Ching-Cheng Huang

IPC分类号： H01L2148

CPC分类号： H01L24/97 ,  H01L23/36 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/5389 ,  H01L23/642 ,  H01L23/645 ,  H01L24/19 ,  H01L2221/68363 ,  H01L2221/68377 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/1517 ,  H01L2924/15174 ,  H01L2924/15311 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/351 ,  H01L2224/82 ,  H01L2924/00

摘要： An integrated chip package structure and method of manufacturing the same is by adhering dies on a silicon substrate and forming a thin-film circuit layer on top of the dies and the silicon substrate. Wherein the thin-film circuit layer has an external circuitry, which is electrically connected to the metal pads of the dies, that extends to a region outside the active surface of the dies for fanning out the metal pads of the dies. Furthermore, a plurality of active devices and an internal circuitry is located on the active surface of the dies. Signal for the active devices are transmitted through the internal circuitry to the external circuitry and from the external circuitry through the internal circuitry back to other active devices. Moreover, the chip package structure allows multiple dies with different functions, to be packaged into an integrated package and electrically connecting the dies by the external circuitry.

摘要翻译： 集成芯片封装结构及其制造方法是通过在硅基板上附着模具并在芯片和硅基板的顶部形成薄膜电路层。 其中薄膜电路层具有电连接到模具的金属焊盘的外部电路，其延伸到模具的有效表面外部的区域，以扇出模具的金属焊盘。 此外，多个有源器件和内部电路位于管芯的有效表面上。 有源器件的信号通过内部电路传输到外部电路，并通过内部电路从外部电路传输回其他有源器件。 此外，芯片封装结构允许具有不同功能的多个管芯被封装成集成封装并且通过外部电路电连接管芯。