公开(公告)号：US08981292B2

公开(公告)日：2015-03-17

申请号：US14114170

申请日：2012-04-24

Applicant: Anjam Khursheed ,  Hung Quang Hoang

Inventor： Anjam Khursheed ,  Hung Quang Hoang

IPC: H01J49/48 ,  H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  H01J37/05 ,  H01J37/22

CPC classification number: H01J37/261 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J49/48 ,  H01J49/482 ,  H01J49/484 ,  H01J49/486 ,  H01J49/488 ,  H01J2237/2446 ,  H01J2237/24485

Abstract: A parallel radial mirror analyzer (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

Abstract translation: 公开了一种用于促进由入射在试样上的带电束引起的带电粒子的旋转对称检测的并行径向镜分析仪（PRMA）（700）。 PRMA包括零伏等势网格（728）和多个电极（702,704,706,708,710,712,714,716,718,720,722），电气地配置为产生相应的静电场用于偏转 所述带电粒子根据所述带电粒子的相应能级移动通过所述格栅（728）以在检测器（206）上形成对应的二阶焦点。 检测器（206）设置在相应静电场的外部。 还公开了相关方法。

公开(公告)号：US08946649B2

公开(公告)日：2015-02-03

申请号：US14126792

申请日：2012-04-16

Applicant: Yuko Sasaki ,  Hiroyuki Ito

Inventor： Yuko Sasaki ,  Hiroyuki Ito

IPC: H01J37/28 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.

Abstract translation: 提供了一种用于改善其能量过滤器的能量解决方案的带电粒子束装置。 在一个实施例中，带电粒子束装置包括偏转器，用于将从样品发射的带电粒子偏转到能量滤波器，并且针对多个偏转中的每一个发现随施加到能量滤波器的电压变化而引起的亮度值的变化 偏转器的条件以及使得亮度值的变化满足预定条件的偏转条件被设定为偏转器的偏转状态。

公开(公告)号：US20140339424A1

公开(公告)日：2014-11-20

申请号：US14277933

申请日：2014-05-15

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Albrecht Glasmachers ,  Michel Aliman

IPC: H01J37/05 ,  H01J37/252 ,  H01J37/244

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/252 ,  H01J49/022 ,  H01J49/027 ,  H01J49/424 ,  H01J2237/028 ,  H01J2237/057

Abstract: A device for mass selective determination of at least one ion or of a plurality of ions is used, for example, in a measuring apparatus having an ion trap. The ion trap has a ring electrode having a first opening. A first electrode is arranged at the first opening. Furthermore, an amplifier for providing a radio-frequency storage signal for the ion trap and a first transformer are provided, said first transformer being connected to the amplifier and the first electrode in such a way that the radio-frequency storage signal is coupled into the first electrode via the first transformer.

Abstract translation: 例如，在具有离子阱的测量装置中使用用于质量选择性测定至少一种离子或多种离子的装置。 离子阱具有具有第一开口的环形电极。 第一电极布置在第一开口处。 此外，提供了一种用于提供用于离子阱的射频存储信号和第一变压器的放大器，所述第一变压器以这样的方式连接到放大器和第一电极，使得射频存储信号耦合到 第一电极经由第一变压器。

公开(公告)号：US20140175301A1

公开(公告)日：2014-06-26

申请号：US14124408

申请日：2012-06-05

Applicant: Jacques Gierak ,  Nicolas Allemandou ,  Klaus Hasselbach ,  Jean-Paul Leggeri ,  Guillaume Donnier-Valentin ,  Stephen Purcell ,  Pauline Gavand

Inventor： Jacques Gierak ,  Nicolas Allemandou ,  Klaus Hasselbach ,  Jean-Paul Leggeri ,  Guillaume Donnier-Valentin ,  Stephen Purcell ,  Pauline Gavand

IPC: H01J37/08 ,  H01J37/317 ,  H01J37/05 ,  H01J3/18 ,  H01J27/02 ,  H01J3/26

CPC classification number: H01J37/08 ,  H01J3/18 ,  H01J3/26 ,  H01J27/022 ,  H01J27/024 ,  H01J27/22 ,  H01J37/05 ,  H01J37/317 ,  H01J37/3174 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/0827

Abstract: A ion source comprises: a chamber (45), an injection to inject matter into the chamber, wherein said matter comprises at least a first species, a tip with an apex located in the chamber, wherein the apex has a surface made of a metallic second species, a generator to generate ions of said species, and a regulation system adapted to set operative conditions of the chamber to alternatively generate ions from the gaseous first species, and ions from the non-gaseous metallic second species.

Abstract translation: 离子源包括：室（45），用于将物质注入到室中的注入，其中所述物质包括至少第一种类，具有位于所述室中的顶点的尖端，其中所述顶点具有由金属 第二种类，用于产生所述物质的离子的发生器，以及调节系统，其适于设置所述室的操作条件以交替地从所述气态第一物质产生离子，以及从所述非气态金属第二物质产生离子。

公开(公告)号：US08053725B2

公开(公告)日：2011-11-08

申请号：US12494024

申请日：2009-06-29

Applicant: Gregory A. Schwind ,  Jonathan H. Orloff

Inventor： Gregory A. Schwind ,  Jonathan H. Orloff

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/305

CPC classification number: H01J37/3056 ,  H01J37/05 ,  H01J37/147 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.

Abstract translation: 申请人已经发现离子源的离子的​​不对称能量分布允许通过在低能量束尾部过滤离子来降低色差，而不会显着缩短处理时间。 一个优选的实施例在离子束列内包括从梁中去除低能量离子的过滤器。

公开(公告)号：US07439500B2

公开(公告)日：2008-10-21

申请号：US11384044

申请日：2006-03-17

Applicant: Juergen Frosien ,  Stefan Lanio

Inventor： Juergen Frosien ,  Stefan Lanio

IPC: H01J37/244 ,  H01J37/05 ,  H01J49/48 ,  G01R31/305

CPC classification number: H01J37/05 ,  G01R31/305 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/26

Abstract: The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.

Abstract translation: 本发明涉及具有改进的检测方案的分析系统和包括该分析系统的带电粒子束装置。 用于分析带电粒子束的分析系统具有分隔器，用于将带电粒子束根据其能量分成低能量束和高能量束; 用于检测高能束的前检测器; 以及用于检测低能量束的至少一个反向检测器。 分隔器位于前检测器和至少一个反向检测器之间，并且前分辨器和/或至少一个反向检测器被分段。

公开(公告)号：US07057167B2

公开(公告)日：2006-06-06

申请号：US10940466

申请日：2004-09-14

Applicant: Vincent R. Farnsworth

Inventor： Vincent R. Farnsworth

IPC: H01J37/05

CPC classification number: H01J49/004

Abstract: A method for filtering ions having a selected mass-to-charge ratio is set forth. In accordance with the method, one or more ions are injected into ion inlets of first and second ion selection chambers in a generally concurrent manner. The first and second ion selection chambers each have a corresponding ion outlet. The first ion selection chamber has a first plurality of electrodes disposed between the respective ion inlet and ion outlet and the said second ion selection chamber has a second plurality of electrodes disposed between its respective ion inlet and ion outlet. One or more RF signals are applied to the first and second plurality of electrodes to generate a rotating electric field respectively in each of the first and second ion selection chambers. Ions exiting the ion outlets of the first and second ion selection chambers, for example, to generate a mass spectrum for the injected ions.

Abstract translation: 阐述了一种用于过滤具有选定的质荷比的离子的方法。 按照该方法，一个或多个离子以大致并发的方式注入第一离子选择室和第二离子选择室的离子入口。 第一和第二离子选择室各自具有相应的离子出口。 第一离子选择室具有设置在相应的离子入口和离子出口之间的第一多个电极，并且所述第二离子选择室具有设置在其各自的离子入口和离子出口之间的第二多个电极。 将一个或多个RF信号施加到第一和第二多个电极，以分别在第一和第二离子选择室中的每一个中产生旋转电场。 离开离开第一和第二离子选择室的离子出口的离子例如产生用于注入的离子的质谱。

公开(公告)号：US07022983B2

公开(公告)日：2006-04-04

申请号：US10751907

申请日：2004-01-07

Applicant: Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

Inventor： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J37/05

CPC classification number: H01J37/05 ,  H01J37/153 ,  H01J37/28

Abstract: An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

公开(公告)号：US20050285032A1

公开(公告)日：2005-12-29

申请号：US11168728

申请日：2005-06-28

Applicant: Krzysztof Grzelakowski

Inventor： Krzysztof Grzelakowski

IPC: H01J37/05 ,  H01J49/48

CPC classification number: H01J37/05 ,  H01J49/484 ,  H01J2237/151

Abstract: An imaging energy filter for deflecting electrons and other charged particles filters an object formed by these particles at the filter inlet by means of an energetic selection of charged particles in the region of a dispersion screen. The filter includes two concentric and spherical electrodes, which produce an electrostatic field that deflects the charged particles at an angle α that is greater than π and less than 2π. The dispersion screen, operating as a deflecting element that generates a deflection field, is disposed at an intersection point of the inlet axis and the outlet axis and in a plane of symmetry of the angle α, wherein the plane of symmetry simultaneously is an electro-optical plane. The deflection field generated by the deflecting element deflects the charged particles at an angle π-α/2, leading to a total deflection angle of 2π and co-linearity of the inlet axis and outlet axis.

Abstract translation: 用于偏转电子和其它带电粒子的成像能量过滤器通过在分散屏幕的区域中的带电粒子的能量选择来过滤由过滤器入口处的这些颗粒形成的物体。 滤波器包括两个同心和球形电极，其产生静电场，该电场以大于pi且小于2pi的角度α偏转带电粒子。 作为产生偏转场的偏转元件运行的分散屏幕被设置在入口轴线和出口轴线的交点和角度α的对称平面中，其中对称平面线同时为电 - 光学平面。 由偏转元件产生的偏转场以角度pi-α/ 2偏转带电粒子，导致2π的总偏转角和入口轴线和出口轴线的共线性。

公开(公告)号：US06960498B2

公开(公告)日：2005-11-01

申请号：US10610755

申请日：2003-07-02

Applicant: Osamu Nakamura

Inventor： Osamu Nakamura

IPC: H01J37/05 ,  H01J37/317 ,  H01L21/00 ,  H01L21/265 ,  H01L21/338

CPC classification number: H01L21/67253 ,  H01J2237/31701 ,  H01L21/26513 ,  H01L21/2658 ,  Y10S438/918

Abstract: A doping method capable of controlling a dose amount in response to a change the ratio in ion species during a doping process, a control system for controlling a doping amount, and a doping apparatus having a control system are provided. An ion current value of a specific ion in an ion beam is measured. There is an ion detector that measures an ion current value of a specific ion in an ion beam and enters the obtained monitor signal into a control means. Set data for setting a predetermined dose amount is entered into the control means, convert data for obtaining an actual dose amount from the monitor signal is entered into the control means by a memory means. The control means performs data processing on the basis of the input monitor signal and the convert data, a control signal for obtaining the predetermined dose amount is entered from the control means to the dose amount control system to dope the controlled ion beam into the target material.

Abstract translation: 提供了能够响应于在掺杂过程期间离子种类的比率的变化来控制剂量的掺杂方法，用于控制掺杂量的控制系统和具有控制系统的掺杂装置。 测量离子束中特定离子的离子电流值。 存在离子检测器，其测量离子束中的特定离子的离子电流值，并将获得的监视信号输入到控制装置中。 将用于设定预定剂量的设定数据输入到控制装置中，通过存储装置将从监视信号获取实际剂量的数据转换为控制装置。 控制装置基于输入监视信号和转换数据执行数据处理，从控制装置输入用于获得预定剂量的控制信号到剂量控制系统以将受控离子束掺杂到目标材料中 。