Invention Grant
US08981292B2 Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes 有权
具有倾斜零伏等势出口格栅的平行径向镜分析仪,用于扫描电子显微镜

Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes
Abstract:
A parallel radial mirror analyzer (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.
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