公开(公告)号：US20130119267A1

公开(公告)日：2013-05-16

申请号：US13466947

申请日：2012-05-08

Applicant: Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

Inventor： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

IPC: G01N21/01 ,  G01N23/00

CPC classification number: G01N21/01 ,  G01N21/0303 ,  G01N23/00 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

Abstract: An in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid and the source of such radiation may be located within the body of the holder itself. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500 μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

Abstract translation: 公开了一种在动态实验中进行成像和分析的原位光学样本架。 该支架组件包括一组聚焦和反射光学器件以及环境细胞。 电磁辐射可以用于在存在或不存在流体的情况下光学激发样品，并且这种辐射源可以位于保持器本体的主体内。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 支架具有使流体在试样上连续循环的条件。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

公开(公告)号：US20130087706A1

公开(公告)日：2013-04-11

申请号：US13699975

申请日：2011-04-29

Applicant: Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

Inventor： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J37/023 ,  H01J37/228 ,  H01J37/256 ,  H01J37/26 ,  H01J2237/024 ,  H01J2237/2482

Abstract: The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Abstract translation: 本发明涉及一种阴极发光检测系统，包括：收集光学元件（112），其从由带电粒子束照射的样品收集光辐射（108），并将所述辐射（108）反射到分析装置上，所述收集光学元件（112） 放置在称为真空室的室中，其中压力低于大气压; 以及用于使放置在聚光镜（112）下游的光辐射的装置（316），并被设计成使分析装置的入口处的所述光辐射（108）适应。 所述系统的特征在于，全部或部分适应装置（316）被置于压力高于所述真空室中的压力的​​环境中。

公开(公告)号：US08319181B2

公开(公告)日：2012-11-27

申请号：US13017016

申请日：2011-01-30

Applicant: N. William Parker ,  Mark W. Utlaut

Inventor： N. William Parker ,  Mark W. Utlaut

IPC: H01J37/26 ,  G01N21/64 ,  G01N23/00

CPC classification number: G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N23/225 ,  H01J37/228 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/206 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2803 ,  H01J2237/2857

Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传技术将报道基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。

公开(公告)号：US08164058B2

公开(公告)日：2012-04-24

申请号：US12501822

申请日：2009-07-13

Applicant: Eiko Nakazawa ,  Masahiro Tomita ,  Hiroyuki Kobayashi

Inventor： Eiko Nakazawa ,  Masahiro Tomita ,  Hiroyuki Kobayashi

IPC: G21K7/00

CPC classification number: G01N23/2252 ,  H01J37/222 ,  H01J37/226 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2807

Abstract: It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.

Abstract translation: 本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域 在带电粒子束装置中，其代表是电子显微镜。 在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置 通过用带电粒子束照射检测X射线。

公开(公告)号：US20110226949A1

公开(公告)日：2011-09-22

申请号：US13050035

申请日：2011-03-17

Applicant: Dirk Zeidler ,  Ulrike Zeile

Inventor： Dirk Zeidler ,  Ulrike Zeile

IPC: H01J37/26

CPC classification number: H01J37/28 ,  H01J37/09 ,  H01J37/228 ,  H01J2237/043 ,  H01J2237/06333 ,  H01J2237/206 ,  H01J2237/24585

Abstract: A combined inspection system for inspecting an object disposable in an object plane 19, comprises a particle-optical system, which provides a particle-optical beam path 3, and a light-optical system, which provides a light-optical beam path 5; and a controller 60, wherein the light-optical system comprises at least one light-optical lens 30 arranged in the light-optical beam, which comprises a first lens surface facing the object plane which has two lens surfaces 34, 35 and a through hole 32, wherein the particle-optical system comprises a beam deflection device 23, in order to scan a primary particle beam 15 over a part of the sample plane 19, and wherein the controller is configured to control the beam deflection device 23 in such a manner that a deflected primary particle beam 15 intersects an optical axis 3 of the particle-optical beam path in a plane which is arranged inside the through hole.

Abstract translation: 用于检查在物平面19中一次性物体的组合检查系统包括提供粒子光束路径3的粒子光学系统和提供光束光路5的光学系统; 以及控制器60，其中所述光学系统包括布置在所述光 - 光束中的至少一个光 - 透镜30，所述至少一个光 - 透镜30包括面对所述物平面的第一透镜表面，所述第一透镜表面具有两个透镜表面34,35和通孔 32，其中所述粒子光学系统包括光束偏转装置23，以便在样本平面19的一部分上扫描初级粒子束15，并且其中控制器被配置为以这种方式控制束偏转装置23 偏转的一次粒子束15在布置在通孔内的平面中与粒子光束路径的光轴3相交。

公开(公告)号：US20110168889A1

公开(公告)日：2011-07-14

申请号：US13002448

申请日：2009-07-02

Applicant: Dov Shachal ,  Rafi De Picciotto

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: G01N23/04 ,  G01N23/00

CPC classification number: G01N23/22 ,  G01N2223/079 ,  G01N2223/08 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/208 ,  H01J2237/244 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US07777183B2

公开(公告)日：2010-08-17

申请号：US11834220

申请日：2007-08-06

Applicant: Noriyuki Kaneoka ,  Kaoru Umemura ,  Koji Ishiguro

Inventor： Noriyuki Kaneoka ,  Kaoru Umemura ,  Koji Ishiguro

IPC: G01N23/225

CPC classification number: G01N23/225 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/0455 ,  H01J2237/2482 ,  H01J2237/31745

Abstract: A charged particle beam system, a sample processing method, and a semiconductor inspection system enable an accurate detection of a particle in a film without causing LMIS contamination and allow observation with an electron microscope quickly. A particle 65 causing a defect in a film 66 that has been detected with a separate optical inspection system is detected with an optical microscope 43 based on position information acquired by the separate optical inspection system. A sample 31 is processed with a nonmetal ion beam 22 so as to allow observation of the particle 65 with an electron microscope image or an ion microscope image, or ultimate analysis of the particle 65 with an EDX.

Abstract translation: 带电粒子束系统，样品处理方法和半导体检查系统能够精确地检测膜中的颗粒而不引起LMIS污染，并且可以快速用电子显微镜观察。 基于通过单独的光学检查系统获取的位置信息，用光学显微镜43检测导致用单独的光学检查系统检测到的膜66中的缺陷的颗粒65。 用非金属离子束22处理样品31，以便用电子显微镜图像或离子显微镜图像观察颗粒65，或者用EDX对颗粒65进行最终分析。

公开(公告)号：US07714285B2

公开(公告)日：2010-05-11

申请号：US11588689

申请日：2006-10-27

Applicant: Bryan Robert Barnard

Inventor： Bryan Robert Barnard

IPC: G01N23/00

CPC classification number: H01J37/29 ,  H01J37/228 ,  H01J37/252

Abstract: A spectrometer (10) for sample surface analysis by irradiation of the surface by primary particles and a corresponding method of surface analysis spectroscopy. The spectrometer (10) provides sample viewing and secondary charged particle collection substantially normal to the sample surface. A collection chamber (22) comprises a secondary charged particle lens arrangement (20) to focus the emitted particles in a downstream direction along a first normal axis (24) and thereby to define a charged particle optical crossover location (25); and a light-reflecting optical element (50) downstream of the lens arrangement and arranged to receive image light (41) and reflect it away from a second normal axis (42) for providing a viewable image of the surface. The optical element (50) is positioned at, or near to, the crossover location (25) and comprises an opening (52) therethrough, such that the focused particles pass through the opening for downstream spectroscopic analysis substantially without obstruction by the optical element.

Abstract translation: 用于通过初级粒子照射表面进行样品表面分析的光谱仪（10）和相应的表面分析光谱法。 光谱仪（10）提供基本上垂直于样品表面的样品观察和二次带电粒子收集。 收集室（22）包括二次带电粒子透镜装置（20），以沿着第一法线轴线（24）沿下游方向聚焦发射的颗粒，从而限定带电粒子光学交叉位置（25）; 以及在所述透镜装置的下游的光反射光学元件（50），并被布置成接收图像光（41）并将其反射离开第二法线轴（42），以提供所述表面的可视图像。 光学元件（50）位于交叉位置（25）处或附近，并且包括通过其的开口（52），使得聚焦的微粒基本上不受光学元件的阻碍而穿过开口进行下游光谱分析。

公开(公告)号：US20100091362A1

公开(公告)日：2010-04-15

申请号：US12588387

申请日：2009-10-14

Applicant: Hisashi Isozaki ,  Fumio Ohtomo ,  Kazuo Nunokawa

Inventor： Hisashi Isozaki ,  Fumio Ohtomo ,  Kazuo Nunokawa

IPC: G02B21/36 ,  G21K7/00

CPC classification number: G02B21/367 ,  H01J37/226 ,  H01J37/228 ,  H01J37/28

Abstract: A complex type microscopic device includes a slider unit moving a stage, an optical microscope, a scanning electron microscope with an electron axis intersecting with an optical axis of the optical microscope, an optical measurement/observation unit having a magnification between those of the scanning electron microscope and the optical microscope and co-using an objective lens with the optical microscope, and a control unit controlling the entire device, and a display unit having a display screen. During display of a low-magnification optical microscopic image, the control unit controls the display unit to display, on the image, a representation to designate an area to be observed at a magnification of the optical measurement/observation unit, and to display, on the image, another representation to designate an area to be observed at a magnification of the scanning electron microscope during display of a high-magnification optical microscopic image.

Abstract translation: 复合型显微镜装置包括：移动台的滑块单元，光学显微镜，具有与光学显微镜的光轴相交的电子轴的扫描电子显微镜;具有扫描电子的放大率的光学测量/观察单元 显微镜和光学显微镜，并与光学显微镜共同使用物镜，以及控制整个装置的控制单元和具有显示屏的显示单元。 在显示低倍率光学显微镜图像期间，控制单元控制显示单元在图像上显示表示以在光学测量/观察单元的放大倍率下观察的区域，并且在 该图像是在显示高倍率光学显微镜图像期间指定在扫描电子显微镜的放大倍率下观察的区域的另一表示。

公开(公告)号：US07675034B2

公开(公告)日：2010-03-09

申请号：US12130038

申请日：2008-05-30

Applicant: Jacob Simon Faber

Inventor： Jacob Simon Faber

IPC: G01N13/10 ,  G01N23/02 ,  G21K5/04

CPC classification number: G02B21/0016 ,  H01J37/026 ,  H01J37/20 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/2482

Abstract: An optical microscope slide in a charged particle instrument such as an electron microscope or a focused ion beam instrument. Conventional microscope slides are not fit for use in an electron microscope as they are insulating and would thus charge when viewed in an electron microscope due to the impinging beam of charged particles. However, microscope slides exist that show a coating with a conductive layer of e.g. Indium Tin Oxide (ITO). These microscope slides are normally used for heating the object mounted on the slide by passing a current through the conductive layer. Experiments show that these microscope slides can be used advantageously in a charged particle instrument by connecting the conductive layer to e.g. ground potential, thereby forming a return path for the impinging charged particles and thus avoiding charging. The invention further relates to a charged particle instrument that is further equipped with an optical microscope.

Abstract translation: 在电子显微镜或聚焦离子束仪器等带电粒子仪器中的光学显微镜载玻片。 常规的显微镜载玻片不适合用于电子显微镜，因为它们是绝缘的，因此由于带电粒子的撞击光束在电子显微镜中观察时会充电。 然而，显示器载玻片存在，其显示具有例如导电层的涂层。 氧化铟锡（ITO）。 这些显微镜幻灯片通常用于通过使电流通过导电层来加热安装在载玻片上的物体。 实验表明，这些显微镜载玻片可以有利地用于带电粒子仪器，通过将导电层连接到例如电极。 接地电位，从而形成用于撞击带电粒子的返回路径，从而避免充电。 本发明还涉及另外配备有光学显微镜的带电粒子仪器。