公开(公告)号：US09200961B2

公开(公告)日：2015-12-01

申请号：US14067244

申请日：2013-10-30

Applicant: University of South Carolina

Inventor： Stanley Michael Angel ,  Jerry Chance Carter

IPC: G01J3/45 ,  G01J3/44 ,  G01J3/14 ,  G01J3/453 ,  G01N21/65

CPC classification number: G01J3/44 ,  G01J3/14 ,  G01J3/4531 ,  G01J2003/451 ,  G01N21/65

Abstract: The present subject matter is directed to a device for spectroscopy. The device includes an excitation source and a first spatial heterodyne spectrometer configured to receive wavelengths from the excitation source and filter the wavelengths to produce fringes on a sample. The device also includes a second heterodyne spectrometer configured to receive Raman wavelengths from the sample.

Abstract translation: 本发明涉及用于光谱学的装置。 该装置包括激发源和第一空间外差光谱仪，其被配置为接收来自激发源的波长并过滤波长以在样品上产生条纹。 该装置还包括配置成从样品接收拉曼波长的第二外差光谱仪。

公开(公告)号：US09068940B2

公开(公告)日：2015-06-30

申请号：US14058672

申请日：2013-10-21

Applicant: Michal Nikodem ,  Gerard Wysocki

Inventor： Michal Nikodem ,  Gerard Wysocki

IPC: G01J3/45 ,  G01N21/59 ,  G01N21/31 ,  G01J3/433

CPC classification number: G01N21/59 ,  G01J3/4338 ,  G01J2003/451 ,  G01N21/31 ,  G01N2021/3133 ,  G01N2021/3185

Abstract: An apparatus and method for differential optical dispersion using a first sample and a second sample are disclosed. The apparatus includes a single frequency chirped laser source configured to generate a single frequency chirped laser beam. A first beam splitter is configured to split the single frequency chirped laser beam into first and second optical branches, the first sample being located in the first optical branch, the second sample being located in the second optical branch. A frequency shifter is located in the second optical branch, downstream of the second sample. A second beam splitter is configured to combine the first and second optical branches and generate a chirp-modulated mixed light beam. A square law detector is configured to detect the chirp-modulated mixed light beam and generate a heterodyne beatnote signal. A demodulator is configured for detection of the heterodyne beatnote signal to generate a transmission/differential optical dispersion spectrum.

Abstract translation: 公开了使用第一样品和第二样品的差分光学色散的装置和方法。 该装置包括被配置为产生单个频率啁啾激光束的单频啁啾激光源。 第一分束器被配置为将单频啁啾激光束分裂成第一和第二光分支，第一样本位于第一光分支中，第二样本位于第二光分支中。 移频器位于第二光学分支中，位于第二样本的下游。 第二分束器被配置为组合第一和第二光学分支并产生啁啾调制的混合光束。 平方律检测器被配置为检测啁啾调制混合光束并产生外差打击信号。 解调器被配置用于检测外差打击信号以产生传输/差分光学色散谱。

公开(公告)号：US20140362376A1

公开(公告)日：2014-12-11

申请号：US14466861

申请日：2014-08-22

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Jun LIU ,  Fangjia LI ,  Ruxin LI

IPC: G01J3/45 ,  G01J3/18

CPC classification number: G01J3/45 ,  G01J3/18 ,  G01J11/00 ,  G01J2003/1861 ,  G01J2003/451 ,  G02B19/0095 ,  G02B27/0988

Abstract: Apparatuses and method for real-time measuring ultrashort pulse shape and pulse width. Transient-grating effect on a transparent optical medium is used to generate a reference beam. A black plate with four equal-sized holes divides the incoming laser beam into four beams, one of which is attenuated and introduced an appropriate time delay relative to the other three. The four laser beams pass through a concave mirror and are focused onto a nonlinear transparent optical medium. The three beams without attenuation are used to generate a transient-grating light in the transparent medium. The transient-grating light is collinear and overlapped with the fourth attenuated beam. According to the third-order nonlinear effect, the transient-grating light has a broader spectral bandwidth and more smooth spectrum phase with respect to the incident laser. By measuring the spectral interference, the spectrum and spectral phase may be retrieved by spectral interferometry.

Abstract translation: 用于实时测量超短脉冲形状和脉冲宽度的装置和方法。 使用透明光学介质上的瞬态光栅效应来产生参考光束。 具有四个相等尺寸孔的黑色板将入射激光束分成四个光束，其中一个光束被衰减并且相对于其它三个光束引入适当的时间延迟。 四个激光束通过凹面镜并聚焦到非线性透明光学介质上。 不使用衰减的三个光束用于在透明介质中产生瞬时光栅光。 瞬态光栅光线与第四衰减光束共线并重叠。 根据三阶非线性效应，瞬态光栅光具有相对于入射激光器的更宽的光谱带宽和更平滑的光谱相位。 通过测量光谱干涉，光谱和光谱相位可以通过光谱干涉测量来检索。

公开(公告)号：US20140111808A1

公开(公告)日：2014-04-24

申请号：US14058672

申请日：2013-10-21

Applicant: Michal Nikodem ,  Gerard Wysocki

Inventor： Michal Nikodem ,  Gerard Wysocki

IPC: G01N21/25 ,  G01N21/59

CPC classification number: G01N21/59 ,  G01J3/4338 ,  G01J2003/451 ,  G01N21/31 ,  G01N2021/3133 ,  G01N2021/3185

Abstract: An apparatus and method for differential optical dispersion using a first sample and a second sample are disclosed. The apparatus includes a single frequency chirped laser source configured to generate a single frequency chirped laser beam. A first beam splitter is configured to split the single frequency chirped laser beam into first and second optical branches, the first sample being located in the first optical branch, the second sample being located in the second optical branch. A frequency shifter is located in the second optical branch, downstream of the second sample. A second beam splitter is configured to combine the first and second optical branches and generate a chirp-modulated mixed light beam. A square law detector is configured to detect the chirp-modulated mixed light beam and generate a heterodyne beatnote signal. A demodulator is configured for detection of the heterodyne beatnote signal to generate a transmission/differential optical dispersion spectrum.

Abstract translation: 公开了使用第一样品和第二样品的差分光学色散的装置和方法。 该装置包括被配置为产生单个频率啁啾激光束的单频啁啾激光源。 第一分束器被配置为将单频啁啾激光束分裂成第一和第二光分支，第一样本位于第一光分支中，第二样本位于第二光分支中。 移频器位于第二光学分支中，位于第二样本的下游。 第二分束器被配置为组合第一和第二光学分支并产生啁啾调制的混合光束。 平方律检测器被配置为检测啁啾调制混合光束并产生外差打击信号。 解调器被配置用于检测外差打击信号以产生传输/差分光学色散谱。

公开(公告)号：US20180252578A1

公开(公告)日：2018-09-06

申请号：US15905925

申请日：2018-02-27

Applicant: Shuichi Suzuki ,  Hidetaka Noguchi ,  Masayuki Fujishima ,  Hidenori Kato ,  Junichi Azumi ,  Masashi Suematsu

Inventor： Shuichi Suzuki ,  Hidetaka Noguchi ,  Masayuki Fujishima ,  Hidenori Kato ,  Junichi Azumi ,  Masashi Suematsu

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/30

CPC classification number: G01J3/021 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/06 ,  G01J3/18 ,  G01J3/28 ,  G01J3/30 ,  G01J3/453 ,  G01J3/52 ,  G01J2003/064 ,  G01J2003/451

Abstract: A spectrum measuring device including a ribbon element, a light detection element, and circuitry. The ribbon element includes a first light reflector including a plurality of first light reflection surfaces configured to be translated in an out-of-plane direction, and a second light reflector including a plurality of second light reflection surfaces that are fixed. The circuitry supplies a drive signal to the ribbon element in such a manner that a change of a displacement amount difference between the first light reflection surfaces and the second light reflection surfaces corresponds to a predetermined frequency; and acquires the light quantity data detected by the light detection element at a predetermined sampling frequency.

公开(公告)号：US09863756B1

公开(公告)日：2018-01-09

申请号：US14877882

申请日：2015-10-07

Applicant: KLA-TENCOR CORPORATION

Inventor： Shifang Li

IPC: G01B11/02 ,  G01B11/06 ,  G01J3/45 ,  G01J3/02 ,  G01J3/18

CPC classification number: G01B11/0608 ,  G01J3/0208 ,  G01J3/1838 ,  G01J3/4531 ,  G01J2003/451

Abstract: A device and method for surface height profiling are presented. The device has a source with a source slit through which light is provided. The device includes an objective lens having a reference surface. The objective lens is configured to illuminate a sample with test light from the source and to combine test light reflected from the sample with reference light reflected from the reference surface to form combined light. A spectrometer is positioned to receive the combined light at an entrance slit. The spectrometer is configured to image the combined light as a 2D image with a wavelength dimension and a spatial position dimension. A processor in electrical communication with the spectrometer is programmed to receive a signal representing the 2D image and to determine a surface height profile of the sample based on the signal.

公开(公告)号：US20170363472A1

公开(公告)日：2017-12-21

申请号：US15527098

申请日：2015-11-11

Applicant: B.G. NEGEV TECHNOLOGIES & APPLICATIONS LTD. AT BEN-GURION UNIVERSITY

Inventor： Ibrahim ABDULHALIM

IPC: G01J3/447 ,  G02F1/139 ,  G02F1/1347 ,  G01J3/28 ,  G01J3/44 ,  G01J3/45

CPC classification number: G01J3/447 ,  G01B2210/56 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/4412 ,  G01J3/45 ,  G01J4/00 ,  G01J2003/1269 ,  G01J2003/2826 ,  G01J2003/451 ,  G01N21/21 ,  G01N21/4738 ,  G01N21/64 ,  G01N21/65 ,  G01N21/8422 ,  G02B27/286 ,  G02F1/13471 ,  G02F1/1393 ,  G02F2203/055 ,  G02F2203/12

Abstract: A system is described that combines spectropolarimetry with scatterometry. The system uses an annular mirror and liquid crystal devices to control the angle of the incident light cone, the polarization and wavelength, an imaging setup and one or more video cameras so that spectroseopic-polarimetric-scatterometric images can be grabbed rapidly. The system is also designed to incorporate additional imaging modes such as interference, phase contrast, fluorescence and Raman spectropolarimetric imaging.

公开(公告)号：US20170244218A1

公开(公告)日：2017-08-24

申请号：US15248763

申请日：2016-08-26

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Kwang Ryong OH

IPC: H01S5/14 ,  G01J3/45 ,  G01J3/18 ,  H01S5/028

CPC classification number: H01S5/141 ,  G01J3/1804 ,  G01J2003/1842 ,  G01J2003/451 ,  H01S5/0028 ,  H01S5/028 ,  H01S5/4062 ,  H01S5/4068

Abstract: Disclosed is an optical sensor, including an external cavity laser configured to output sensing light and reference light; and a photodetector configured to detect a beating signal by an interference of the sensing light and the reference light output from the external cavity laser, in which the external cavity laser includes a reflecting filter including a sensing grating, to which a sensing object is attachable, and a reference grating, which is disposed on the same plane as that of the sensing grating, and outputs sensing light reflected from the sensing grating and reference light reflected from the reference grating. Accordingly, the optical sensor does not require a high-resolution spectroscope and has improved resolution and sensitivity.

公开(公告)号：US20150030503A1

公开(公告)日：2015-01-29

申请号：US14484556

申请日：2014-09-12

Applicant: Stanley Michael Angel ,  J. Chance Carter ,  Nathaniel Gomer

Inventor： Stanley Michael Angel ,  J. Chance Carter ,  Nathaniel Gomer

IPC: G01N21/65

CPC classification number: G01N21/65 ,  B33Y80/00 ,  G01J3/14 ,  G01J3/44 ,  G01J3/45 ,  G01J3/4531 ,  G01J2003/451 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/068 ,  G01N2201/08

Abstract: The present subject matter is directed to a device for spectroscopy. The device includes an excitation source configured to illuminate a sample with wavelengths. The device also includes a spatial heterodyne interferometer configured to receive Raman wavelengths from the sample.

Abstract translation: 本发明涉及用于光谱学的装置。 该装置包括被配置为用波长照射样品的激发源。 该装置还包括被配置为从样品接收拉曼波长的空间外差干涉仪。

公开(公告)号：US20130188181A1

公开(公告)日：2013-07-25

申请号：US13654924

申请日：2012-10-18

Applicant: Stanley Michael Angel ,  Jerry Chance Carter ,  Nate Gomer

Inventor： Stanley Michael Angel ,  Jerry Chance Carter ,  Nate Gomer

IPC: G01J3/44 ,  G01J3/45

CPC classification number: G01N21/65 ,  B33Y80/00 ,  G01J3/14 ,  G01J3/44 ,  G01J3/45 ,  G01J3/4531 ,  G01J2003/451 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/068 ,  G01N2201/08

Abstract: The present subject matter is directed to a device for spectroscopy. The device includes an excitation source configured to illuminate a sample with wavelengths. The device also includes a spatial heterodyne interferometer configured to receive Raman wavelengths from the sample.