公开(公告)号：US20230232618A1

公开(公告)日：2023-07-20

申请号：US18123736

申请日：2023-03-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H10B12/00

CPC classification number: H10B12/488 ,  H10B12/34 ,  H10B12/053 ,  H10B12/315 ,  H10B12/482

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.

公开(公告)号：US20210066305A1

公开(公告)日：2021-03-04

申请号：US16896470

申请日：2020-06-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L23/528

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.

公开(公告)号：US20250016980A1

公开(公告)日：2025-01-09

申请号：US18629799

申请日：2024-04-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kiseok Lee ,  Bongsoo Kim ,  Yongkwan Kim ,  Jongmin Kim ,  Taejin Park ,  Chansic Yoon ,  Jinwoo Han

IPC: H10B12/00

Abstract: A semiconductor device includes an active array in which a plurality of active patterns are arranged on a substrate; a gate structure extending in a first direction and crossing central portions of the active patterns; a bit line structure contacting first portions of the active patterns adjacent to a first sidewall of the gate structure and extending in a second direction; and a capacitor electrically connected to a second portion of each of the active patterns adjacent to a second sidewall of the gate structure. In a plan view, an upper end portion of each of the active patterns and a lower end portion of each of the active patterns are arranged to be spaced apart in a third direction oblique with respect to the first direction. The active patterns arranged side by side in the second direction form an active column.

公开(公告)号：US20240315006A1

公开(公告)日：2024-09-19

申请号：US18424447

申请日：2024-01-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Huijung Kim ,  Sangjae Park ,  Taejin Park ,  Junhyeok Ahn ,  Chansic Yoon ,  Myeongdong Lee

IPC: H10B12/00

CPC classification number: H10B12/315 ,  H10B12/0335 ,  H10B12/482

Abstract: A semiconductor device includes an active pattern array including active patterns on a substrate, a first contact structure on a central portion of each active pattern, a bit line structure on the first contact structure, a second contact structure on an end portion of each active pattern, a third contact structure on the second contact structure, a filling pattern between the bit line structure and the third contact structure and including a void, and a capacitor electrically connected to the third contact structure. The active pattern array includes active pattern rows spaced apart from each other in a first direction, and each active pattern row includes the active patterns spaced apart from each other in a second direction. Each active pattern extends in a third direction, and the active patterns in each active pattern row are aligned in the second direction.

公开(公告)号：US20240188284A1

公开(公告)日：2024-06-06

申请号：US18371663

申请日：2023-09-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jongmin Kim ,  Chansic Yoon ,  Junhyeok Ahn

IPC: H10B12/00

CPC classification number: H10B12/482 ,  H10B12/02 ,  H10B12/315 ,  H10B12/485

Abstract: A semiconductor device includes a gate electrode disposed within a cell region of a substrate, each of bit line structure pairs including a first bit line structure and a second bit line structure, and extension portion pairs disposed within an interface region of the substrate, each extension portion pair including a first extension portion and a second extension portion that are connected to the first bit line structure and the second bit line structure, respectively. The bit line structure pairs are spaced apart from each other by a first distance. In each bit line structure pair, the first bit line structure and the second bit line structure are spaced apart from each other by the first distance. In each extension portion pair, the first extension portion and the second extension portion are spaced apart from each other at a second distance less than the first distance.

公开(公告)号：US11616066B2

公开(公告)日：2023-03-28

申请号：US17384347

申请日：2021-07-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L23/528

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.

公开(公告)号：US11088143B2

公开(公告)日：2021-08-10

申请号：US16896470

申请日：2020-06-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L23/528

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.