公开(公告)号：US12302705B2

公开(公告)日：2025-05-13

申请号：US17751416

申请日：2022-05-23

Applicant: Samsung Display Co., LTD.

Inventor： Jong Oh Seo ,  Jang Hyun Kim ,  Byung Soo So ,  Jae Woo Jeong

IPC: H10K59/121 ,  H01L27/12 ,  H10K59/12 ,  H10K71/00 ,  H10K77/10 ,  H10K102/00

Abstract: A display device includes: a substrate; a semiconductor layer on the substrate, and including a channel of at least one transistor; a first insulating layer on the semiconductor layer; and a gate electrode on the first insulating layer. The semiconductor layer includes polycrystalline silicon, and the channel includes: a first region containing a first impurity; and a second region containing a second impurity different from the first impurity.

公开(公告)号：US11706949B2

公开(公告)日：2023-07-18

申请号：US17192424

申请日：2021-03-04

Applicant: Samsung Display Co., LTD.

Inventor： Jong Oh Seo ,  Byung Soo So

IPC: H01L27/32 ,  H10K59/121 ,  H10K59/131 ,  H10K71/00 ,  G09G3/3266 ,  G09G3/3275 ,  G09G3/3225 ,  H01L29/66 ,  H01L27/12 ,  H01L29/786 ,  H10K59/12

CPC classification number: H10K59/1213 ,  H10K59/131 ,  H10K71/00 ,  G09G3/3225 ,  G09G3/3266 ,  G09G3/3275 ,  G09G2300/0426 ,  H01L27/1222 ,  H01L27/1274 ,  H01L29/66757 ,  H01L29/78615 ,  H01L29/78675 ,  H10K59/1201

Abstract: A display device and a method of manufacturing a display device are provided. A display device includes a lower conductive pattern disposed on a substrate, a lower insulating layer disposed on the lower conductive pattern, the lower insulating layer including a first lower insulating pattern including an overlapping region overlapping the lower conductive pattern, and a protruding region. The display device includes a semiconductor pattern disposed on the first lower insulating pattern and having a side surface, the side surface being aligned with a side surface of the first lower insulating pattern or disposed inward from the side surface of the first lower insulating pattern, a gate insulating layer disposed on the semiconductor pattern, a gate electrode disposed on the gate insulating layer, and an empty space disposed between the substrate and the protruding region of the first lower insulating pattern.

公开(公告)号：US11380544B2

公开(公告)日：2022-07-05

申请号：US16997454

申请日：2020-08-19

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Min Lee ,  Ji-Hwan Kim ,  Jongoh Seo ,  Byung Soo So

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/268

Abstract: A laser annealing device includes a stage, a laser generator, and a reflective member. The stage supports a substrate with a thin film formed thereon to be processed, and may be moved in a first direction at a set or predetermined speed. The laser generator irradiates a first area of the thin film with a laser beam while the stage is moved. The reflective member reflects a part of the laser beam, which is reflected from the first area of the thin film, to a second area of the thin film. The first area and the second area are spaced apart from each other.

公开(公告)号：US11164919B2

公开(公告)日：2021-11-02

申请号：US16679656

申请日：2019-11-11

Applicant: Samsung Display Co., LTD.

Inventor： Dong-Sung Lee ,  Seo Jong Oh ,  Byung Soo So ,  Dong-min Lee

IPC: H01L27/32 ,  H01L21/02 ,  H01L29/66 ,  H01L29/786

Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US11145703B2

公开(公告)日：2021-10-12

申请号：US16677042

申请日：2019-11-07

Applicant: Samsung Display Co., LTD.

Inventor： Jongoh Seo ,  In Cheol Ko ,  Byung Soo So ,  Dong-min Lee ,  Dong-Sung Lee

IPC: H01L27/15 ,  H01L27/32 ,  H01L51/56 ,  H01L51/00

Abstract: A display device may include a substrate, a first layer on the substrate, the first layer including a first portion having a first thickness and a second portion having a second thickness greater than the first thickness, a second layer on the first layer, an active pattern on the second layer, the active pattern overlapping only the first portion of the first layer, a gate electrode on the active pattern, a source electrode and a drain electrode on the gate electrode and connected to the active pattern, a first electrode connected to one of the source electrode and the drain electrode, a pixel defining layer on the first electrode, the pixel defining layer having an opening portion exposing at least a portion of the first electrode, an emission layer in the opening portion on the first electrode, and a second electrode on the emission layer.

公开(公告)号：US11087980B2

公开(公告)日：2021-08-10

申请号：US15466330

申请日：2017-03-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byung Soo So ,  Mee Jae Kang ,  Ho Seok Lee ,  Jae Gyun Lim ,  Sang Ho Jeon ,  Yeon Hee Jeon

IPC: H01L21/02 ,  H01S3/034 ,  H01L21/67 ,  H01L27/12 ,  H01S3/00 ,  H01S3/03 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/04 ,  H01S3/041

Abstract: A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.

公开(公告)号：US10944011B2

公开(公告)日：2021-03-09

申请号：US16594284

申请日：2019-10-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Tae Hoon Yang ,  Kibum Kim ,  Jongjun Baek ,  Byung Soo So ,  Jong chan Lee ,  Woong Hee Jeong ,  Jaewoo Jeong

IPC: H01L27/12 ,  H01L29/786

Abstract: A display apparatus includes a base substrate, an active pattern on the base substrate including a source region, a drain region, and a channel region that is doped between the source region and the drain region, the channel region including polycrystalline silicon, and a gate electrode overlapping the channel region of the active pattern. The channel region may include a lower portion, an upper portion, and an intermediate portion between the upper portion and the lower portion, and a dopant density of the lower portion may be 80% or more of a dopant density of the upper portion.

公开(公告)号：US10411133B2

公开(公告)日：2019-09-10

申请号：US15948097

申请日：2018-04-09

Applicant: Samsung Display Co., Ltd.

Inventor： Jong Oh Seo ,  Byung Soo So ,  Dong-Min Lee ,  Dong-Sung Lee

IPC: H01L27/14 ,  H01L29/786 ,  H01L27/12 ,  H01L21/02 ,  H01L29/66

Abstract: A manufacturing method of a polysilicon layer of a thin film transistor of a display device, includes: irradiating a first excimer laser beam having a first energy density to an amorphous silicon layer including an oxidation layer thereon, to form a first polysilicon layer including thereon portions of the oxidation layer at grain boundaries of the first polysilicon layer; removing the portions of the oxidation layer at the grain boundaries of the first polysilicon layer; and irradiating a second excimer laser beam having a second energy density of 80% to 100% of the first energy density to the first polysilicon layer from which the portions of the oxidation layer at the grain boundaries thereof are removed, to form a second polysilicon layer as the polysilicon layer of the thin film transistor.

公开(公告)号：US12040186B2

公开(公告)日：2024-07-16

申请号：US17404231

申请日：2021-08-17

Applicant: Samsung Display Co., Ltd.

Inventor： Hiroshi Okumura ,  Jongjun Baek ,  Byung Soo So

IPC: B23K26/06 ,  G02B5/04 ,  G02B26/10 ,  H01L21/02

CPC classification number: H01L21/02691 ,  G02B5/045 ,  G02B26/101 ,  H01L21/02678

Abstract: A laser irradiation apparatus includes a laser light source which emits a laser beam, a first lens through which the laser beam emitted from the laser light source passes, a first scanner which reflects the laser beam passing through the first lens and changes a direction of the laser beam, a second scanner which reflects the laser beam deflected by the first scanner and changes a direction of the laser beam, a plurality of second lenses through which the laser beam deflected by the second scanner passes, where at least one of the plurality of second lenses is configured to vibrate in one direction, and an optical element through which the laser beam passing through the plurality of second lenses passes, where the optical element is configured to correct an incident angle of the laser beam incident a substrate.

公开(公告)号：US11961851B2

公开(公告)日：2024-04-16

申请号：US17672574

申请日：2022-02-15

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-min Lee ,  Ji-Hwan Kim ,  Jongoh Seo ,  Byung Soo So ,  Dong-Sung Lee ,  Jonghoon Choi

IPC: G02B27/14 ,  B23K26/53 ,  G02B27/12 ,  H01L21/02 ,  H01L27/12 ,  H01S3/00

CPC classification number: H01L27/1281 ,  B23K26/53 ,  G02B27/126 ,  H01L21/02675 ,  H01S3/005 ,  H01S3/0071 ,  H01L21/02532

Abstract: A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.