公开(公告)号：US12058888B2

公开(公告)日：2024-08-06

申请号：US17503358

申请日：2021-10-18

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Sung Lee ,  Seo Jong Oh ,  Byung Soo So ,  Dong-min Lee

IPC: H10K59/12 ,  H01L21/02 ,  H01L29/66 ,  H01L29/786

CPC classification number: H10K59/12 ,  H01L21/02057 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02675 ,  H01L29/66757 ,  H01L29/78675

Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US20200161389A1

公开(公告)日：2020-05-21

申请号：US16679656

申请日：2019-11-11

Applicant: Samsung Display Co., LTD.

Inventor： Dong-Sung Lee ,  Seo Jong Oh ,  Byung Soo So ,  Dong-min Lee

IPC: H01L27/32 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66

Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US11164919B2

公开(公告)日：2021-11-02

申请号：US16679656

申请日：2019-11-11

Applicant: Samsung Display Co., LTD.

Inventor： Dong-Sung Lee ,  Seo Jong Oh ,  Byung Soo So ,  Dong-min Lee

IPC: H01L27/32 ,  H01L21/02 ,  H01L29/66 ,  H01L29/786

Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.